Applied Materials 0050-90526 – 5-Way Gas Distribution Manifold | Semiconductor CVD Platform
Engineering Background: The Applied Materials 0050-90526 is a precision-machined 5-way manifold assembly designed for gas distribution in Applied Materials CVD (Chemical Vapor Deposition) and etch process chambers. Cross-referenced under part numbers DBL4N00260-0002000000000-00301R, 0190-17601, and 800-5748-10, this component serves as a critical junction point in process gas routing, ensuring hermetic, contamination-free delivery to the reaction chamber.
Product Positioning: Sourced from verified OEM and certified aftermarket channels, this manifold is a direct replacement for Applied Materials platforms including Producer, Centura, and related CVD tool families. It is stocked and shipped by Konmask.com to support fab maintenance, scheduled PM cycles, and emergency line-down recovery.
Complete Technical Specifications
- Part Number (Primary): 0050-90526
- Cross-Reference SKUs: DBL4N00260-0002000000000-00301R | 0190-17601 | 800-5748-10
- Description: 5-Way Manifold Assembly
- OEM: Applied Materials (AMAT)
- Configuration: 5-port gas distribution manifold
- Weight: 1,450 g (approx.)
- Material: Electropolished 316L stainless steel / anodized aluminum (OEM spec)
- Sealing Standard: VCR / Swagelok-compatible face-seal fittings
- Leak Rate: ≤ 1×10⁻⁹ std cc/sec He (OEM specification)
- Operating Pressure: Vacuum to positive process gas pressure per AMAT tool spec
- Compatibility: Applied Materials CVD / Etch process tool platforms
- Condition: New OEM / Certified Refurbished (specify at inquiry)
Proven Application Environments
- Applied Materials Producer CVD systems – TEOS, SiN, SiO₂ deposition processes
- Applied Materials Centura platform – metal CVD and etch modules
- Semiconductor fab PM (Preventive Maintenance) replacement cycles
- Emergency line-down recovery for 200mm and 300mm wafer fabs
- Gas panel retrofit and upgrade projects requiring OEM-spec manifold assemblies
Engineering Advantages
- OEM-Matched Geometry: Drop-in replacement with no modification to existing gas line routing or tool hardware
- Ultra-High Purity (UHP) Compliance: Electropolished internal surfaces minimize particle generation and outgassing
- Multi-Port Flexibility: 5-way configuration supports complex gas blending and sequential purge sequences
- Hermetic Integrity: Face-seal fittings eliminate threaded joint leak paths critical in corrosive process gas environments
- Traceability: Full cross-reference documentation across all known AMAT part number variants
System Architecture & Signal Flow
In a typical Applied Materials CVD gas delivery system, process gases (precursors, carrier gases, purge N₂) enter the gas panel through mass flow controllers (MFCs). The 0050-90526 5-way manifold acts as the downstream distribution node, routing individual gas streams to the appropriate process chamber inlets or combining them for mixed-gas delivery. Its 5-port architecture supports simultaneous multi-gas routing with isolation capability between ports, enabling precise recipe control without cross-contamination.
Upstream: MFC outlets → Manifold inlet ports
Downstream: Manifold outlet ports → Chamber gas inlets / showerhead assembly
Sourcing & Quality Verification
- Source: OEM surplus, certified refurbished, or new aftermarket — all lots inspected prior to shipment
- Inspection Protocol: Visual inspection, dimensional verification, and helium leak test per AMAT service standards
- Packaging: Double-bagged in cleanroom poly, nitrogen-purged, and sealed for transit
- Documentation: Certificate of conformance (CoC) available upon request
- Lead Time: In-stock items ship within 1–3 business days; contact us for current availability
Procurement Process
- Confirm part number match: 0050-90526 / DBL4N00260 / 0190-17601 / 800-5748-10
- Specify required condition: New OEM, Certified Refurbished, or As-Removed
- Submit RFQ or place order directly via Konmask.com product page
- Receive order confirmation with lead time and shipping details within 24 hours
- Shipment with CoC documentation and cleanroom packaging
Technical FAQ
Q: Is 0050-90526 compatible with both 200mm and 300mm AMAT platforms?
A: Compatibility depends on the specific tool configuration. Please confirm your tool model and process module before ordering. Contact our engineering team for verification.
Q: What is the difference between 0050-90526 and 0190-17601?
A: These are cross-reference part numbers used across different AMAT internal documentation revisions. They refer to the same manifold assembly. 800-5748-10 is the assembly-level drawing reference.
Q: Can you provide a helium leak test report?
A: Yes. Leak test reports and CoC documents are available upon request for certified refurbished and new OEM units.
Q: What is the lead time for out-of-stock units?
A: Typical sourcing lead time is 2–4 weeks for out-of-stock items. Contact us at [email protected] for real-time availability.
Q: Do you accept returns or offer warranty?
A: We offer a 30-day DOA (Dead on Arrival) warranty for all shipped units. Please review our returns policy at Konmask.com for full terms.
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