High-Vacuum Solution – LEYBOLD TURBOVAC 50 (V50) | TURBOVAC Series
The LEYBOLD TURBOVAC 50 (V50) is a compact, high-performance turbo molecular pump engineered for demanding high-vacuum and ultra-high-vacuum applications. With part numbers 85406, 2L80-001427-12, TPR4-05-A100T-X0009, and 886304/0, this unit delivers reliable, oil-free pumping performance across a wide range of industrial and scientific environments.
Where This Product Is Used
- Semiconductor Fabrication – Ion implantation, PVD/CVD deposition chambers, and etch process tools requiring clean, stable high vacuum.
- Analytical Instrumentation – Mass spectrometers, electron microscopes (SEM/TEM), and surface analysis systems (XPS, AES, SIMS).
- Thin-Film & Optical Coating – Magnetron sputtering and e-beam evaporation systems where hydrocarbon-free vacuum is critical.
- Research & Development Laboratories – University physics labs, national research institutes, and industrial R&D centers requiring compact, reliable turbopumps.
- Leak Detection Systems – Helium leak detectors and residual gas analyzers (RGA) that demand low base pressure.
- Particle Accelerator Beamlines – Auxiliary pumping stations along accelerator beam paths.
Technical Specifications
- Model: TURBOVAC 50 (V50)
- Manufacturer: LEYBOLD GmbH (Germany)
- Part Numbers: 85406 / 2L80-001427-12 / TPR4-05-A100T-X0009 / 886304/0
- Series: TURBOVAC
- Pump Type: Turbo Molecular Pump (TMP)
- Pumping Speed (N₂): ~50 L/s
- Ultimate Pressure: < 1 × 10⁻⁸ mbar (with suitable backing pump)
- Inlet Flange: DN 63 ISO-K
- Backing Pressure (max): ~1 mbar
- Rotation Speed: ~72,000 RPM
- Bearing Type: Hybrid ceramic ball bearings
- Lubrication: Grease-lubricated (oil-free process side)
- Cooling: Air-cooled (optional water cooling)
- Country of Origin: Germany
- HS Code: 8414.10.00
Why Engineers Specify This Model
- Compact Footprint – Fits space-constrained chambers and portable analytical instruments without sacrificing pumping speed.
- Oil-Free Process Side – Eliminates hydrocarbon backstreaming, protecting sensitive substrates and detectors.
- Fast Spin-Up – Reaches full operating speed quickly, reducing process cycle time.
- Proven LEYBOLD Reliability – Backed by decades of LEYBOLD engineering heritage and global service network.
- Wide Compatibility – Works with LEYBOLD TURBOTRONIK and third-party turbopump controllers.
- Low Vibration – Minimizes mechanical noise in vibration-sensitive metrology and microscopy setups.
Complete System Bill of Materials
- Turbo Molecular Pump: LEYBOLD TURBOVAC 50 (V50) – P/N 85406 / 886304/0 (this item)
- Backing Pump: LEYBOLD TRIVAC D4B or SOGEVAC SV10 (rotary vane, ~4–10 m³/h)
- Turbopump Controller: LEYBOLD TURBOTRONIK NT 10 or NT 20
- Inlet Flange Adapter: DN 63 ISO-K centering ring + claw clamp
- Foreline Hose / Tubing: DN 16 KF flexible bellows
- Vacuum Gauge: LEYBOLD IONIVAC or Pirani/Penning combination gauge
- Vent Valve: DN 16 KF manual or pneumatic vent valve
- Gate Valve (optional): DN 63 ISO-K pneumatic gate valve for chamber isolation
Compliance & Industry Standards
- CE Marked – Compliant with EU Machinery Directive 2006/42/EC
- RoHS Compliant – Restriction of Hazardous Substances
- ISO 21360 – Standard measurement methods for vacuum pumps
- SEMI S2 compatible – Safety guidelines for semiconductor manufacturing equipment
- HS Code: 8414.10.00 (Air or vacuum pumps)
Quality Assurance & Sourcing
Every LEYBOLD TURBOVAC 50 unit offered by Konmask.com undergoes a multi-point inspection process:
- Visual and mechanical integrity check upon receipt
- Rotor spin verification and bearing condition assessment
- Cross-referenced against LEYBOLD factory serial number records where available
- Securely packaged with anti-static and vibration-dampening materials for safe international shipping
We source directly from decommissioned OEM systems, certified refurbishers, and authorized surplus channels to ensure authenticity and traceability.
How to Source This Part
To place an order or request a formal quotation for the LEYBOLD TURBOVAC 50 (V50) – P/N 85406 / 886304/0:
- Email: [email protected]
- Phone / WhatsApp: +0086 19859288691
- Website: https://konmask.com
Lead time, warranty terms, and export documentation (including CO, packing list, and commercial invoice) are available upon request. We support DDP, DAP, EXW, and FOB Incoterms for global shipments.
Application-Specific FAQ
Q: Can the TURBOVAC 50 be used without a backing pump?
A: No. The TURBOVAC 50 requires a suitable roughing/backing pump (typically 4–10 m³/h rotary vane or dry scroll pump) to maintain the foreline pressure below ~1 mbar for stable operation.
Q: Is this pump compatible with corrosive gases?
A: The standard V50 is designed for clean, dry gas applications. For corrosive or reactive process gases, consult LEYBOLD for chemically resistant variants or contact us for application guidance.
Q: What controller is required?
A: The TURBOVAC 50 is compatible with the LEYBOLD TURBOTRONIK NT 10 / NT 20 series. Third-party controllers with matching frequency drive specifications may also be used.
Q: Can Konmask provide a warranty?
A: Yes. We offer a standard 90-day functional warranty on all tested units. Extended warranty and service contracts are available upon request.
Q: Do you provide export documentation for customs clearance?
A: Yes. We provide full export documentation including commercial invoice, packing list, certificate of origin, and HS code declaration (8414.10.00).
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Contact: [email protected] | +0086 19859288691
