AMAT 4060-01156 NP420-DN1 4162001DC3 MA4162 Slit Valve Pneumatic Assembly | Replacement, Equivalent & Selection Guide
The AMAT 4060-01156 (also referenced as NP420-DN1, 4162001DC3, MA4162) is an OEM pneumatic slit valve assembly manufactured by Applied Materials (AMAT), designed for use in semiconductor wafer processing equipment. This page provides full technical specifications, compatible replacement options, and a structured selection guide to help engineers and procurement teams source the right part with confidence.
Technical Specifications
- Part Number: 4060-01156
- Cross Reference: NP420-DN1 / 4162001DC3 / MA4162
- Assembly Type: MANF ASSY SLIT VALVE PNEU (Pneumatic Slit Valve Assembly)
- Manufacturer: Applied Materials (AMAT)
- Weight: 2,600 g (approx. 5.73 lbs)
- Actuation: Pneumatic
- Application: Semiconductor process chamber isolation / wafer transfer
- Condition Available: New OEM / Refurbished / Equivalent Replacement
Compatible Replacement & Equivalent Models
The following part numbers are confirmed cross-references or functionally equivalent alternatives for the AMAT 4060-01156:
- NP420-DN1 — OEM alternate part number (AMAT internal reference)
- 4162001DC3 — Assembly sub-reference used in BOM documentation
- MA4162 — Manufacturing assembly designation
- Third-party pneumatic slit valve assemblies compatible with AMAT Centura / Producer / Endura platforms (contact us for verified equivalents)
Always verify dimensional fit, port configuration, and actuator stroke before substituting with a third-party equivalent.
Why Choose the Original AMAT 4060-01156
- ✅ Engineered to OEM tolerances for AMAT process chambers
- ✅ Validated sealing performance under high-vacuum and process gas environments
- ✅ Minimizes re-qualification time vs. third-party alternatives
- ✅ Full traceability and OEM documentation available upon request
- ✅ Direct drop-in replacement — no modification required
Typical Applications
- CVD / PVD / Etch process chamber slit valve isolation
- Wafer transfer between load lock and process module
- AMAT Centura, Producer, Endura, and related cluster tool platforms
- Semiconductor fab maintenance, spare parts inventory, and equipment refurbishment
System Compatibility
- AMAT Centura — CVD / Etch / Implant modules
- AMAT Producer — SACVD / PECVD configurations
- AMAT Endura — PVD / Metal deposition platforms
- Other AMAT cluster tools using NP420-series slit valve actuators
Contact our technical team to confirm compatibility with your specific chamber configuration and software revision.
Selection Guide
Use the following criteria to select the correct slit valve assembly for your application:
- Step 1 — Confirm OEM Part Number: Match against 4060-01156, NP420-DN1, 4162001DC3, or MA4162 in your equipment BOM or service manual.
- Step 2 — Verify Platform: Identify your AMAT tool model and chamber type (CVD, PVD, Etch, etc.).
- Step 3 — Check Actuator Type: Confirm pneumatic actuation is required (vs. electromechanical alternatives).
- Step 4 — Condition Preference: Choose New OEM for critical processes; Refurbished for cost-sensitive MRO applications.
- Step 5 — Contact Us: Provide your tool serial number and chamber ID for final verification before ordering.
Quality Assurance & Sourcing
- All units sourced through authorized channels or certified refurbishment partners
- Inspection and functional testing available upon request
- Certificate of Conformance (CoC) and material traceability documentation provided
- Packaging: ESD-safe, anti-static foam, double-boxed for international shipping
- Export compliance: ECCN classification and export documentation available
How to Order
- Add to cart directly, or contact us for bulk / urgent orders
- Provide your PO number, shipping address, and required delivery date
- Our team will confirm availability, lead time, and issue a proforma invoice within 24 hours
- Payment: T/T, PayPal, credit card accepted
- Shipping: DHL / FedEx / UPS express worldwide; sea freight available for large orders
📧 [email protected] | 📞 +0086 19859288691
Replacement & Compatibility FAQ
Q: Is 4060-01156 the same as NP420-DN1?
A: Yes. NP420-DN1 is an AMAT internal alternate part number for the same assembly. Both refer to the same pneumatic slit valve unit.
Q: Can I use a third-party replacement for 4060-01156?
A: Functionally equivalent third-party assemblies exist, but must be validated for your specific chamber pressure, gas compatibility, and cycle life requirements. Contact us for vetted alternatives.
Q: What is the typical lead time?
A: In-stock units ship within 1–3 business days. Out-of-stock items typically have a 2–6 week lead time depending on sourcing channel.
Q: Do you provide warranty?
A: Yes. New OEM units carry the standard AMAT warranty. Refurbished units include a 90-day functional warranty from Konmask.
Q: Can you supply multiple units for a scheduled maintenance program?
A: Yes. We support blanket POs and scheduled delivery programs. Contact us to discuss volume pricing.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
