Applied Materials 0021-76409 Slit Valve (SS-010 / ECUA00029) | Replacement, Equivalent & Selection Guide
The Applied Materials 0021-76409 is a high-speed slit valve assembly rated at 6000 R/MIN, part number cross-referenced as SS-010 and ECUA00029. Designed for semiconductor process chamber isolation, this valve controls wafer transfer between load-lock and process modules in Applied Materials CVD/PVD/Etch platforms. Konmask.com supplies OEM-equivalent and genuine units with full traceability for MRO and capital equipment maintenance.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number: 0021-76409
- Cross Reference: SS-010 / ECUA00029
- Type: Slit Valve (Gate Valve for Vacuum Chamber Isolation)
- Speed Rating: 6000 R/MIN
- Weight: ~2.6 kg
- Application: Semiconductor wafer transfer, process chamber isolation
- Compatible Platforms: Applied Materials Centura, Endura, Producer series
- Operating Environment: High-vacuum, cleanroom-compatible
- Actuation: Pneumatic / electro-pneumatic
Compatible Replacement & Equivalent Models
The following models are commonly evaluated as replacements or equivalents for the 0021-76409. Always verify dimensional and interface compatibility before substitution:
- 0021-76409 — OEM original (Applied Materials)
- SS-010 — Internal cross-reference designation
- ECUA00029 — Engineering change unit reference
- Third-party OEM-equivalent slit valves for AMAT Centura/Endura platforms
- VAT Group slit valves (series 02000, 02100) — dimensional cross-check required
- MKS Instruments / HPS slit valves — verify flange and actuator interface
Contact Konmask for a verified compatibility assessment before ordering a replacement.
Why Choose the Original Model
- OEM Precision: Engineered to AMAT process tolerances — no adaptation required
- Vacuum Integrity: Validated sealing performance for high-vacuum semiconductor environments
- Speed & Reliability: 6000 R/MIN rating ensures fast, repeatable wafer transfer cycles
- Traceability: Full OEM documentation and serialization for compliance audits
- Reduced Downtime Risk: Eliminates compatibility uncertainty vs. third-party alternatives
Typical Applications
- CVD / PVD / ALD process chamber isolation
- Load-lock to transfer chamber wafer handoff
- Etch tool vacuum isolation gates
- Semiconductor fab equipment MRO replacement
- Refurbished tool rebuild and upgrade projects
System Compatibility
- Applied Materials Centura — CVD, Metal, Dielectric modules
- Applied Materials Endura — PVD, barrier/seed deposition
- Applied Materials Producer — SACVD, PECVD platforms
- Other AMAT platforms using SS-010 / ECUA00029 interface standard
Not sure if this part fits your tool configuration? Send us your tool serial number or BOM reference — our engineers will confirm compatibility within 24 hours.
Selection Guide
Use the following criteria to select the correct slit valve for your application:
- Step 1 — Confirm Part Number: Match 0021-76409 against your tool BOM or spare parts list
- Step 2 — Verify Cross References: Check SS-010 and ECUA00029 against your engineering drawings
- Step 3 — Assess Condition Requirement: Choose OEM new, OEM refurbished, or OEM-equivalent based on budget and criticality
- Step 4 — Check Lead Time: Contact Konmask for current stock status and delivery timeline
- Step 5 — Confirm Warranty: All units shipped with Konmask quality guarantee and return policy
Quality Assurance & Sourcing
- Units sourced from authorized distributors, OEM surplus, and certified refurbishers
- Each unit inspected and tested prior to shipment
- Packaging: ESD-safe, anti-static foam, double-boxed for international freight
- Documentation: CoC (Certificate of Conformance) available on request
- Export compliance: ECCN classification reviewed for cross-border orders
How to Order
- Online: Add to cart directly from this page
- Email RFQ: support@konmask.com — include part number, quantity, and required delivery date
- Phone / WhatsApp: +0086 19859288691
- Bulk / Contract: Contact us for volume pricing and blanket order arrangements
- Lead Time: In-stock units ship within 3–5 business days; sourced units 2–4 weeks
Replacement & Compatibility FAQ
Q: Is 0021-76409 the same as SS-010?
A: SS-010 is an internal cross-reference designation for the same assembly. Both refer to the same physical part in AMAT documentation.
Q: Can ECUA00029 be used as a direct drop-in replacement?
A: ECUA00029 is an engineering change unit reference tied to 0021-76409. Confirm your tool’s ECU revision level before substituting.
Q: Do you supply refurbished units?
A: Yes. Refurbished units are available at reduced cost with full inspection reports. Specify “refurbished” in your RFQ.
Q: What is the lead time for out-of-stock units?
A: Typically 2–4 weeks for sourced units. Contact us for expedited options.
Q: Do you offer a warranty?
A: All units carry Konmask’s standard quality guarantee. Terms available on request.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
