Wafer Handling Solution – Applied Materials 0200-06355 | Ceramic Open Pocket Blade Series
The Applied Materials 0200-06355 / 1220-01011 / 0242-02385 Ceramic Open Pocket Wafer Transfer Blade is a precision end-effector component engineered for robotic wafer handling in semiconductor process equipment. Manufactured to OEM specifications, this ceramic blade delivers the contamination-free, electrostatically neutral wafer transport required in advanced fab environments.
Where This Product Is Used
This ceramic open pocket blade is specified for wafer transfer robot assemblies in the following Applied Materials platforms and process environments:
- CVD / PECVD Systems – Centura, Producer, and P5000 platforms requiring high-temperature-compatible end-effectors
- Etch Systems – Applied Materials Enabler and MxP chamber configurations
- PVD / Sputter Systems – Endura platform wafer handling modules
- CMP Post-Process Transfer – Mirra and Reflexion tool wafer routing
- Atmospheric Transfer Modules (ATM) – FOUP-to-loadlock wafer staging
- 300 mm Fab Lines – High-volume production environments with strict particle and metallic contamination budgets
Typical deployment: front-end-of-line (FEOL) and back-end-of-line (BEOL) process steps where wafer integrity and positional repeatability are critical.
Technical Specifications
- Part Numbers: 0200-06355 | 1220-01011 | 0242-02385
- OEM: Applied Materials (AMAT)
- Material: High-purity alumina ceramic (Al₂O₃)
- Blade Type: Open Pocket (non-contact wafer seating)
- Wafer Compatibility: 300 mm (12-inch) silicon wafers
- Surface Finish: Precision-ground, low-particle-generation
- Weight: ~2,600 g (assembled module)
- HS Code: 8486.90.00 – Parts for semiconductor manufacturing apparatus
- Country of Origin: USA
- Electrostatic Properties: Non-conductive; ESD-safe handling required
- Temperature Resistance: Suitable for elevated-temperature transfer environments
Why Engineers Specify This Model
- Zero Metallic Contamination: Alumina ceramic construction eliminates metal ion transfer to wafer backside — critical for gate oxide and thin-film process integrity
- Open Pocket Design: Minimizes contact area, reducing particle generation and backside scratch risk versus solid-pad blades
- Dimensional Repeatability: Precision-ground geometry ensures consistent wafer placement accuracy across millions of transfer cycles
- Thermal Stability: Low coefficient of thermal expansion maintains blade geometry under process chamber thermal cycling
- Drop-in OEM Replacement: Exact form-factor match to Applied Materials robot arm assemblies — no tooling or calibration offset required
- Proven Field Life: Widely deployed in high-volume 300 mm fabs with documented MTBF performance
Complete System Bill of Materials
This blade is typically sourced alongside the following complementary AMAT components for a complete wafer transfer robot rebuild or PM kit:
- Robot Arm Assembly – AMAT 0010-series transfer robot
- Blade Mounting Hardware – Fasteners and alignment pins (AMAT 0200-series)
- Wafer Presence Sensor – Optical or capacitive sensor for blade-seated detection
- Robot Controller Board – AMAT 0100-series motion controller
- Loadlock O-ring Kit – Chamber interface sealing components
- Ceramic Blade Cleaning Kit – IPA-compatible wipe and ESD packaging for PM procedures
Contact [email protected] for bundled PM kit pricing.
Compliance & Industry Standards
- SEMI S2 – Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- SEMI E1.9 – Mechanical specification for 300 mm wafer carriers and handling
- SEMI F47 – Voltage sag immunity (applicable to associated robot controller)
- RoHS Compliant – No restricted hazardous substances in ceramic material composition
- ISO 9001:2015 – Quality management system compliance for sourcing and inspection
- ESD ANSI/ESD S20.20 – ESD-safe packaging and handling protocol applied
Quality Assurance & Sourcing
Every unit sourced through Konmask.com undergoes a structured inspection protocol before shipment:
- Visual Inspection: 100% inspection for chips, cracks, surface defects, and dimensional anomalies
- Dimensional Verification: Critical mounting and pocket geometry checked against OEM drawing tolerances
- Traceability: Part number and lot documentation retained for each unit
- Packaging: Double-bagged in ESD-safe poly, foam-cushioned, and shipped in rigid outer carton
- Sourcing: Procured from authorized distributors, certified refurbishers, or directly from OEM excess inventory channels
How to Source This Part
Konmask.com maintains stock of critical AMAT spare parts for rapid dispatch to global semiconductor fabs and equipment service providers.
- Request a Quote: Email [email protected] with your required quantity and delivery timeline
- Phone / WhatsApp: +0086 19859288691 — available for urgent fab requirements
- Lead Time: In-stock units ship within 1–3 business days; sourced units typically 5–15 business days
- Export: We ship globally with full commercial invoice and packing list documentation for customs clearance
- Payment: T/T wire transfer, PayPal, and credit card accepted
Application-Specific FAQ
Q: Is this blade compatible with both 200 mm and 300 mm wafer platforms?
A: This specific part number (0200-06355) is designed for 300 mm wafer handling. For 200 mm compatibility, please contact us with your tool model number for cross-reference.
Q: Can this ceramic blade be used in vacuum transfer modules (VTM)?
A: Yes. The alumina ceramic material is vacuum-compatible and outgassing-characterized for use in loadlock and VTM environments.
Q: What is the recommended PM interval for blade replacement?
A: Applied Materials typically recommends blade inspection at each scheduled PM cycle (commonly every 6–12 months depending on throughput). Replace upon any visible chipping, cracking, or dimensional drift beyond OEM tolerance.
Q: Do you provide a certificate of conformance (CoC)?
A: Yes. A CoC documenting part number, inspection results, and sourcing channel is available upon request for all units.
Q: Can I order multiple units for a fab-wide PM program?
A: Yes. Volume pricing is available for orders of 3+ units. Contact us for a formal quotation.
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Contact: [email protected] | +0086 19859288691
