Applied Materials 0021-26544 – Blocker TEOS CVD Deposition Module | Precision 5000 / Centura Platform
Engineering Background
The Applied Materials Blocker TEOS module is a critical sub-assembly within AMAT’s industry-leading CVD (Chemical Vapor Deposition) systems, specifically engineered for TEOS-based silicon dioxide film deposition. TEOS (Tetraethyl Orthosilicate) processes are foundational in sub-micron CMOS fabrication, enabling conformal dielectric layers with exceptional step coverage across complex topographies. The “Blocker” assembly functions as the gas distribution and plasma confinement interface between the showerhead and the process chamber, ensuring uniform precursor delivery and plasma stability.
Product Positioning
Konmask.com supplies this module as a verified OEM-equivalent replacement for fabs operating Applied Materials Precision 5000, Centura, and compatible CVD platforms. Each unit is sourced through qualified channels, inspected against AMAT dimensional and material standards, and documented for traceability. Procurement engineers requiring rapid replacement to minimize tool downtime will find this listing fully supported with technical documentation upon request.
Complete Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Primary Part Number: 0021-26544
- Cross-Reference P/N: 853-021818-002 | 0040-13306
- Assembly Type: Blocker Plate / Gas Distribution Module
- Process Compatibility: TEOS CVD (Tetraethyl Orthosilicate)
- Platform: Applied Materials Precision 5000 / Centura CVD
- Material: Anodized Aluminum / Quartz-compatible surfaces (per OEM spec)
- Weight: 2,600 g (approx.)
- Condition: New / Refurbished OEM-grade (specify at inquiry)
- Compliance: RoHS-compatible; SEMI S2/S8 process environment
- Country of Origin: USA (Original OEM)
Proven Application Environments
- Sub-micron CMOS logic and memory fabs (200mm / 300mm wafer lines)
- TEOS-based Pre-Metal Dielectric (PMD) and Inter-Layer Dielectric (ILD) deposition
- High-aspect-ratio gap-fill processes requiring conformal SiO₂
- Foundry and IDM facilities running Applied Materials Precision 5000 or Centura CVD tools
- R&D and pilot line environments requiring OEM-spec process repeatability
Engineering Advantages
- Uniform Gas Distribution: Precision-machined blocker geometry ensures symmetric TEOS precursor flow across the wafer surface, minimizing within-wafer non-uniformity (WIWNU).
- Plasma Confinement Integrity: Engineered to maintain stable plasma boundary conditions, reducing arcing risk and extending RF component life.
- OEM Dimensional Compliance: Drop-in replacement with no process re-qualification required when sourced to original AMAT specifications.
- Thermal Stability: Designed for sustained operation under TEOS process temperatures (350–450°C range), maintaining structural integrity and surface finish.
- Traceability: Each unit supplied with part number verification documentation; lot traceability available on request.
System Architecture & Signal Flow
In the Applied Materials CVD chamber stack, the Blocker TEOS module is positioned between the upper gas inlet manifold and the showerhead faceplate. TEOS vapor and oxidant (O₃ or O₂) enter through the gas inlet, pass through the blocker plate’s distribution holes, and are uniformly delivered to the showerhead for final dispersion onto the wafer surface. The blocker also serves as a secondary plasma confinement boundary, working in conjunction with the RF-powered showerhead to sustain a stable, uniform plasma. Proper installation and surface condition of this module directly impacts film thickness uniformity, deposition rate stability, and particle performance.
Sourcing & Quality Verification
- All units sourced from qualified OEM surplus, authorized distributors, or certified refurbishers.
- Visual and dimensional inspection performed prior to listing.
- Part numbers cross-verified against AMAT BOM documentation (0021-26544 / 853-021818-002 / 0040-13306).
- Packaging: ESD-safe anti-static bag + foam-lined export carton.
- Certificates of conformance (CoC) and inspection reports available upon request.
Procurement Process
- Submit inquiry via product page or email [email protected] with your tool configuration and required condition (new / refurbished).
- Receive stock confirmation, lead time, and formal quotation within 1 business day.
- Issue PO against confirmed quote; payment via T/T, PayPal, or approved credit terms.
- Unit ships with full documentation package (CoC, packing list, tracking).
- Post-delivery technical support available for installation verification.
Technical FAQ
Q: Is this a direct drop-in replacement for the original AMAT 0021-26544?
A: Yes. When sourced to OEM specification, this module is a direct mechanical and functional replacement requiring no process re-qualification.
Q: What is the difference between P/N 0021-26544, 853-021818-002, and 0040-13306?
A: These are cross-reference part numbers used across different AMAT documentation revisions and BOM generations for the same assembly. All three refer to the same Blocker TEOS module.
Q: Can this module be used on both Precision 5000 and Centura platforms?
A: Compatibility depends on the specific chamber configuration. Please confirm your tool model and chamber type at inquiry for definitive cross-reference verification.
Q: What lead time should I expect?
A: In-stock units ship within 3–5 business days internationally. Lead time for sourced units is typically 2–4 weeks depending on availability.
Q: Do you provide a warranty?
A: Yes. Konmask.com provides a 90-day functional warranty on all verified OEM-grade units. Terms available upon request.
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