Applied Materials DXZ+ 0040-37593 Ceramic Heater – DXZ Series (AIT UV / EWHC-NH / NHB5749 & ACCS. EWHA12A-C-5L)
When a ceramic heater fails inside an Applied Materials CVD or thermal processing chamber, the consequences are immediate and severe: wafer batches are scrapped, chamber qualification must restart from zero, and every hour of unplanned downtime can cost a semiconductor fab tens of thousands of dollars. The precision temperature uniformity that defines a successful deposition process simply cannot be maintained without a fully functional, OEM-specification heater assembly.
The Applied Materials DXZ+ 0040-37593 — comprising the AIT UV module (P/N 0040110-000), the EWHC-NH heater body (NHB5749), and the EWHA12A-C-5L accessory kit — is the factory-specified ceramic heater assembly for the DXZ Series process chamber. Engineered to deliver ±0.5 °C temperature uniformity across the wafer zone, this assembly is a critical consumable in high-volume 200 mm and 300 mm wafer fabs worldwide. Its multi-zone design and high-purity alumina ceramic construction make it one of the most technically demanding — and most sought-after — replacement parts in the global semiconductor equipment aftermarket.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number / SKU: DXZ+ 0040-37593
- Sub-components: AIT UV 0040110-000 | EWHC-NH NHB5749 | ACCS. EWHA12A-C-5L
- Series: DXZ Series
- Product Type: Ceramic Heater Assembly
- Heater Material: High-purity alumina ceramic
- Application: CVD / Thermal Process Chamber
- Wafer Compatibility: 200 mm / 300 mm
- Weight: 2,600 g (approx.)
- Condition Available: New OEM / Refurbished / Tested Used
Key Features & Benefits
- OEM-Matched Precision: Manufactured to Applied Materials’ original design specifications, ensuring drop-in compatibility with DXZ Series chambers without re-qualification overhead.
- Superior Temperature Uniformity: High-purity ceramic substrate delivers consistent thermal distribution across the entire wafer contact zone, critical for film thickness uniformity.
- Multi-Zone Heating Architecture: The EWHC-NH heater body supports independent zone control, enabling process engineers to fine-tune temperature profiles for advanced deposition recipes.
- UV-Assisted Curing Compatibility: The AIT UV (0040110-000) module integrates UV curing capability, supporting low-temperature dielectric film processes.
- Complete Assembly Kit: The EWHA12A-C-5L accessory set includes all mounting hardware and sealing components, enabling a single-source replacement without sourcing individual sub-parts.
- Reduced Downtime: Ready-to-install assembly minimizes chamber open time and accelerates return-to-process.
Industry & Equipment Applications
- Semiconductor Fabrication: Logic, memory (DRAM/NAND), and foundry fabs running Applied Materials DXZ Series CVD tools.
- Dielectric Deposition: TEOS oxide, silicon nitride, and low-k dielectric film processes.
- UV Cure Processes: Post-deposition UV curing of low-k and ultra-low-k dielectric films.
- Advanced Packaging: Wafer-level packaging and 3D IC integration processes requiring precise thermal control.
- R&D & Pilot Lines: Process development environments where temperature repeatability is paramount.
System Integration & Compatible Parts
This heater assembly is designed for use within the Applied Materials DXZ Series process module. Compatible and commonly co-ordered parts include:
- DXZ Series chamber liner and shield assemblies
- Applied Materials RF match networks for DXZ chambers
- Thermocouple assemblies and temperature sensor kits for EWHC-NH heater bodies
- Heater lift pin assemblies compatible with 200/300 mm wafer formats
- Applied Materials DXZ Series gas distribution plates (showerheads)
Contact our technical team at [email protected] to verify cross-compatibility with your specific chamber configuration and software revision.
Our Quality Assurance Process
- Source Verification: All parts are sourced from authorized distributors, certified refurbishers, or directly from decommissioned OEM-maintained tools.
- Visual & Dimensional Inspection: Each ceramic heater is inspected for cracks, delamination, surface contamination, and dimensional conformance before shipment.
- Electrical Testing: Resistance and insulation integrity checks are performed on all heater elements and zone circuits.
- Traceability: Full part traceability documentation is available upon request, including lot records and inspection reports.
- Secure Packaging: Anti-static, foam-cushioned packaging with moisture barrier to protect ceramic surfaces during international transit.
How to Order
- Submit your RFQ via the “Get a Quote” button on this page, or email [email protected] directly.
- Include your required quantity, preferred condition (new / refurbished / tested used), and target delivery timeline.
- Our team will respond with availability, lead time, and a formal quotation within 24 business hours.
- Upon PO confirmation, parts are inspected, packaged, and dispatched with full shipping documentation.
Why Choose Konmask.com?
- Semiconductor Equipment Specialists: We focus exclusively on industrial automation and semiconductor process equipment spare parts — not a generalist marketplace.
- Global Sourcing Network: Access to new, refurbished, and hard-to-find AMAT parts through our verified supplier network across Asia, North America, and Europe.
- Technical Expertise: Our team includes engineers with hands-on experience in semiconductor fab environments, ensuring accurate part identification and application guidance.
- Fast Response: RFQ responses within 24 hours; expedited sourcing available for critical downtime situations.
- Secure International Shipping: Export-compliant packaging and documentation for worldwide delivery, including EXW, FOB, and DDP terms.
Frequently Asked Questions
- Q: Is the DXZ+ 0040-37593 an OEM part or an aftermarket equivalent?
- A: We supply genuine Applied Materials OEM parts as well as certified refurbished units. All conditions are clearly stated in the quotation. We do not supply uncertified aftermarket substitutes for this assembly.
- Q: What is the lead time for this ceramic heater?
- A: Lead time depends on current stock and condition required. In-stock items typically ship within 3–5 business days. Out-of-stock items are sourced within 2–6 weeks. Contact us for real-time availability.
- Q: Can you supply just the EWHC-NH NHB5749 heater body without the full assembly?
- A: Yes. Sub-components including the EWHC-NH NHB5749 body and the EWHA12A-C-5L accessory kit can be quoted individually. Please specify your requirement in the RFQ.
- Q: Do you provide a warranty on refurbished units?
- A: Yes. Refurbished ceramic heater assemblies are covered by a 90-day functional warranty. Terms and conditions are provided with each shipment.
- Q: What documentation is available for customs and import compliance?
- A: We provide commercial invoices, packing lists, and certificates of origin. HS code classification guidance is available upon request. We do not pre-fill HS codes on invoices without customer confirmation.
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