Semiconductor RF Signal Solution – Tokyo Electron 1D86-006761-31 PF-25 | S1060-0376-002 Coaxial Cable
Where This Product Is Used
The Tokyo Electron (TEL) 1D86-006761-31 PF-25 Coaxial Cable (part number S1060-0376-002, internal reference 17288900) is a precision RF/signal interconnect designed for use inside TEL semiconductor processing equipment. Typical deployment environments include:
- Plasma Etch Systems – RF power delivery and endpoint detection signal routing within TEL Tactras, Vigus, and Sinfonia etch chambers
- CVD / ALD Process Modules – Low-loss coaxial signal lines connecting RF match networks to chamber electrodes
- Wafer Inspection & Metrology Subsystems – High-frequency signal transmission between sensor arrays and control PCBs
- Fab Maintenance & Refurbishment – Direct OEM-equivalent replacement during scheduled PM or unplanned downtime events
Technical Specifications
| Attribute | Value |
|---|---|
| Manufacturer | Tokyo Electron (TEL) |
| Part Number | 1D86-006761-31 |
| Series / Assembly | PF-25 |
| Cross-Reference PN | S1060-0376-002 |
| Internal Reference | 17288900 |
| Cable Type | Coaxial Cable |
| Application | RF / Signal Interconnect, Semiconductor Process Equipment |
| Weight | 2,600 g (approx.) |
| Condition | New / Refurbished OEM-Equivalent (specify at inquiry) |
| Country of Origin | Japan |
Why Engineers Specify This Model
- OEM Part Number Traceability – Dual cross-reference (1D86-006761-31 / S1060-0376-002) ensures exact BOM match for TEL equipment service records
- Signal Integrity – PF-25 series construction maintains controlled impedance and shielding effectiveness critical for RF-sensitive etch processes
- Reduced Downtime Risk – Stocking this cable eliminates multi-week OEM lead times during unplanned chamber failures
- Fab-Proven Reliability – Sourced from verified TEL supply chains; suitable for high-uptime 24/7 production environments
Complete System Bill of Materials
This cable is typically ordered alongside the following TEL spare parts for a complete PM kit or chamber rebuild:
- TEL RF Match Network Assembly (chamber-specific PN)
- TEL Electrode / Focus Ring Set
- TEL Chamber O-Ring Kit
- TEL ESC (Electrostatic Chuck) Assembly
- TEL Gas Line / Purge Tube Assembly
Contact Konmask for bundled BOM pricing and availability on complete PM kits.
Compliance & Industry Standards
- Designed to TEL internal engineering specifications for semiconductor-grade equipment
- Compatible with SEMI S2/S8 equipment safety guidelines
- RoHS-compliant materials (confirm at order for specific lot)
- Suitable for Class 1–10 cleanroom handling
Quality Assurance & Sourcing
Konmask.com sources TEL spare parts through established industrial supply channels with full part number verification. Each unit is:
- Inspected against OEM part number and physical specification
- Packaged in anti-static, moisture-barrier packaging
- Accompanied by a Konmask Certificate of Conformance upon request
- Traceable to supplier lot documentation
How to Source This Part
- Add to Cart – Place your order directly on Konmask.com for in-stock units
- Request a Quote – Email [email protected] for volume pricing, lead time, or alternate condition (new vs. refurbished)
- Urgent Requirement – Call/WhatsApp +0086 19859288691 for same-day response on critical fab downtime situations
- BOM Matching – Share your full PM BOM and we will cross-reference all TEL part numbers for consolidated sourcing
Application-Specific FAQ
Q: Is 1D86-006761-31 the same as S1060-0376-002?
A: Yes. These are dual TEL part numbers referencing the same PF-25 coaxial cable assembly. Both numbers appear on TEL service documentation and BOM sheets.
Q: Which TEL tools use this cable?
A: This part is associated with TEL PF-25 series process modules. Confirm compatibility with your specific tool model by sharing your chamber configuration with our technical team.
Q: Can I get a datasheet or drawing?
A: TEL spare part drawings are proprietary. Konmask can provide physical dimension confirmation and connector type verification upon request before shipment.
Q: What is the lead time?
A: In-stock units ship within 1–3 business days. Out-of-stock units typically have a 4–8 week lead time depending on sourcing channel.
Q: Do you offer warranty?
A: Yes. Konmask provides a 90-day functional warranty on all spare parts. Extended warranty available for volume orders.
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Contact: [email protected] | +0086 19859288691
