Semiconductor Process Chamber Solution – Applied Materials VV5Q11-ULB970096 | Pneumatic Manifold Slit Valve Series
Where This Product Is Used
The Applied Materials VV5Q11-ULB970096 (P/N 4060-01102) is a pneumatic manifold slit valve engineered for high-purity process isolation in semiconductor fabrication equipment. It is specified in the following application environments:
- CVD / PECVD Chambers — isolates process gas zones during deposition cycles to prevent cross-contamination
- PVD / Sputter Systems — provides repeatable gate actuation under high-vacuum conditions
- Dry Etch & Strip Chambers — withstands aggressive plasma chemistries (HF, Cl₂, NF₃) via PP/EPDM seal construction
- Wafer Transfer Modules (WTM) — controls atmospheric-to-vacuum transitions in cluster tool architectures
- ALD (Atomic Layer Deposition) Systems — enables precise pulse-and-purge sequencing with fast-cycle pneumatic actuation
Typical fab environments: 200 mm and 300 mm wafer fabs, R&D pilot lines, and refurbished tool integration projects.
Technical Specifications
| Manufacturer Part Number | VV5Q11-ULB970096 |
| Applied Materials P/N | 4060-01102 |
| Internal Reference | LF-I TRANS 8226 / HN-802 |
| Valve Type | Pneumatic Manifold Slit Valve |
| Seal Material | PP (Polypropylene) / EPDM |
| Actuation | Pneumatic (double-acting) |
| Country of Origin | Japan |
| Unit Weight | 2,600 g (approx.) |
| Condition | New / Refurbished / Tested — contact us to confirm current stock condition |
Why Engineers Specify This Model
- Chemical Compatibility — PP body and EPDM seals resist halogen-based process gases and cleaning chemistries common in CVD/etch applications
- Manifold Integration — VV5Q11-series manifold architecture allows multi-valve ganging, reducing pneumatic plumbing complexity on tool platforms
- Repeatable Actuation — pneumatic drive ensures consistent open/close force independent of operator input, critical for process repeatability
- OEM-Equivalent Fit — direct replacement for Applied Materials original P/N 4060-01102 with no mechanical modification required
- Reduced Downtime — stocked as a spare-parts replacement to minimize unplanned chamber downtime during PM cycles
Complete System Bill of Materials
This valve is commonly sourced alongside the following components for a complete chamber maintenance kit:
- Slit valve door seal / O-ring kit (chamber-specific)
- Pneumatic actuator solenoid (24 VDC / 110 VAC)
- Position sensor / proximity switch for valve feedback
- Manifold base plate and port fittings (VV5Q11-series compatible)
- Chamber isolation bellows or gate valve (upstream)
Contact [email protected] for a complete BOM quotation tailored to your tool configuration.
Compliance & Industry Standards
- Designed for use in SEMI-compliant semiconductor process equipment
- PP/EPDM materials meet outgassing requirements for vacuum process environments
- Compatible with SEMI S2 environmental, health & safety guidelines for fab equipment
- RoHS-compliant materials of construction (confirm with CoC documentation on request)
Quality Assurance & Sourcing
All parts supplied by Konmask.com undergo the following quality process:
- Visual and dimensional inspection upon receipt
- Cross-reference verification against OEM part number databases
- Functional test where applicable (pneumatic actuation cycle test)
- Traceable documentation: CoC, test reports, and photos available on request
- Sourced from authorized distributors, OEM surplus, or certified refurbishers
How to Source This Part
To place an order or request a quote for the Applied Materials VV5Q11-ULB970096 (4060-01102):
- 📧 Email: [email protected]
- 📞 Phone/WhatsApp: +0086 19859288691
- 🌐 Web: https://konmask.com
- Lead time: typically 3–10 business days depending on stock condition and destination
- Shipping: worldwide DHL / FedEx / UPS with export documentation
Application-Specific FAQ
Q: Is this valve compatible with Applied Materials Centura and Producer platforms?
A: Yes. The VV5Q11-ULB970096 is referenced in Applied Materials documentation for Centura-series chamber configurations. Confirm your tool BOM before ordering.
Q: Can this valve be used in corrosive gas service (HF, Cl₂)?
A: The PP body and EPDM seals provide good resistance to halogenated chemistries. For highly aggressive fluorine-based processes, consult our team for PTFE-seal alternatives.
Q: Do you supply a warranty or test certificate?
A: Yes. Functional test reports and certificates of conformance are available upon request. Warranty terms depend on part condition (new vs. refurbished).
Q: What is the minimum order quantity (MOQ)?
A: MOQ is 1 unit. Volume pricing is available for orders of 5+ units.
Q: Can you source other Applied Materials VV5Q11-series variants?
A: Yes. Contact us with your full part number and we will confirm availability across our supplier network.
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Contact: [email protected] | +0086 19859288691
