HERAEUS 101888-01/C 36607 3870-04597 0020-76852 Quartz Boat – High-Purity Fused Silica Diffusion Furnace Component
When a quartz boat fails mid-process in a semiconductor diffusion furnace, the consequences extend far beyond a single wafer batch. Contamination events, thermal shock fractures, or dimensional inconsistencies can halt an entire production line, triggering costly downtime, yield loss, and re-qualification cycles that can take days to resolve. In high-temperature processes where purity is measured in parts per billion, there is no acceptable substitute for a precision-engineered quartz boat that meets exact OEM specifications.
The HERAEUS 101888-01/C 36607 3870-04597 0020-76852 Quartz Boat is a high-purity fused silica carrier component manufactured by Heraeus Quarzglas, the world’s leading producer of synthetic and natural quartz glass for semiconductor and industrial applications. This specific part number is engineered for use in horizontal diffusion and oxidation furnace tubes, where it serves as the primary wafer carrier during high-temperature thermal processing steps including oxidation, annealing, and dopant diffusion. Heraeus quartz components are trusted by leading semiconductor fabs, research institutions, and equipment OEMs across Asia, Europe, and North America for their unmatched purity, dimensional stability, and thermal performance.
Technical Specifications
- Part Number: 101888-01/C 36607 3870-04597 0020-76852
- Manufacturer: HERAEUS Quarzglas GmbH & Co. KG
- Material: High-purity fused silica (synthetic quartz glass)
- Product Type: Quartz Boat (Wafer Carrier)
- Application: Horizontal diffusion / oxidation furnace tube
- Weight: 2,600 g (2.6 kg)
- Purity Level: Semiconductor-grade, ultra-low metallic contamination
- Temperature Resistance: Up to 1,200°C continuous service (typical for fused silica grade)
- Condition: New / Refurbished (please specify at inquiry)
Key Features & Benefits
- OEM-Matched Dimensions: Manufactured to exact Heraeus engineering drawings, ensuring drop-in compatibility with original furnace tube configurations without process re-qualification.
- Ultra-High Purity Fused Silica: Heraeus quartz glass is produced under stringent cleanroom conditions, delivering metallic impurity levels in the sub-ppb range critical for advanced node semiconductor processes.
- Exceptional Thermal Stability: Near-zero thermal expansion coefficient minimizes dimensional drift during rapid thermal cycling, protecting wafer integrity and slot pitch accuracy.
- Chemical Inertness: Resistant to all common process gases including O₂, N₂, HCl, and H₂ at elevated temperatures, preventing cross-contamination between process steps.
- Smooth Surface Finish: Precision-polished contact surfaces reduce particle generation and minimize wafer scratching during loading and unloading operations.
- Traceable Manufacturing: Each Heraeus quartz component is produced with full material traceability, supporting semiconductor fab documentation and audit requirements.
Industry & Equipment Applications
- Semiconductor Manufacturing: Silicon wafer oxidation, boron/phosphorus diffusion, annealing, and LPCVD processes in horizontal tube furnaces.
- Solar Cell Production: High-temperature diffusion steps in crystalline silicon photovoltaic cell manufacturing lines.
- Optical Fiber Fabrication: Preform handling and high-temperature processing in fiber draw towers and deposition systems.
- LED & Power Device Manufacturing: Epitaxial growth support and thermal treatment of compound semiconductor wafers.
- Research & Development: University and national laboratory furnace systems requiring certified high-purity quartz consumables.
System Integration & Compatible Parts
The HERAEUS 101888-01/C quartz boat is designed for integration into horizontal diffusion furnace systems. Compatible and frequently co-ordered components include:
- Heraeus quartz furnace tubes (process tubes) – matching inner diameter series
- Quartz paddles and push rods for automated wafer handling
- Quartz end caps and flanges for tube sealing
- Quartz baffles and liners for gas flow management
- Thermocouple protection tubes (quartz or alumina)
Contact our technical team at support@konmask.com to confirm compatibility with your specific furnace model and tube inner diameter before ordering.
Our Quality Assurance Process
At Konmask.com, every quartz component sourced for our B2B clients undergoes a structured verification process before shipment:
- Visual Inspection: 100% inspection for cracks, chips, devitrification, and surface contamination under controlled lighting.
- Dimensional Verification: Key dimensions checked against OEM drawings using calibrated measurement tools.
- Documentation Review: Part number, lot traceability, and material certificates verified against Heraeus original documentation where available.
- Secure Packaging: Components are individually wrapped in cleanroom-grade foam and double-boxed to prevent transit damage.
How to Order
- Submit your inquiry via email to support@konmask.com or call +0086 19859288691.
- Provide your required quantity, delivery timeline, and destination country.
- Our team will confirm availability, lead time, and provide a formal quotation within 1 business day.
- Upon order confirmation, we arrange export documentation, packaging, and international freight coordination.
Why Choose Konmask.com?
- Specialized Industrial Focus: We exclusively serve B2B clients in semiconductor, automation, and industrial manufacturing — no consumer distractions, just expert sourcing.
- Global Supply Network: Direct access to OEM-authorized channels and verified secondary market sources for hard-to-find Heraeus quartz components.
- Technical Expertise: Our team includes engineers with hands-on experience in diffusion furnace operations, ensuring accurate part identification and application guidance.
- Export-Ready Logistics: Experienced in international shipping, customs documentation, and compliance for industrial components to Asia, Europe, and the Americas.
- Responsive Support: Dedicated account managers for B2B clients with fast response times and transparent communication throughout the procurement process.
Frequently Asked Questions
- Q: Is this quartz boat new or refurbished?
- A: We supply both new OEM stock and professionally inspected refurbished units depending on availability. Please specify your preference when submitting an inquiry and we will confirm the condition and pricing accordingly.
- Q: Can you confirm compatibility with my specific furnace model?
- A: Yes. Please provide your furnace manufacturer, model number, and tube inner diameter. Our technical team will verify dimensional compatibility before confirming your order.
- Q: What is the lead time for this part?
- A: Lead time varies by stock availability. In-stock items typically ship within 3–5 business days. For sourced items, lead time is 2–4 weeks. We will confirm at the time of quotation.
- Q: Do you provide material certificates or test reports?
- A: We provide available Heraeus documentation including material certificates and inspection reports where supplied by the manufacturer. Please request this at the time of inquiry.
- Q: Can you ship internationally?
- A: Yes. We ship to customers worldwide and handle all export documentation, commercial invoices, and packing lists required for international customs clearance.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
