MKS L2-40-SP1 Stage Inline Valve with Limit Switch – OVATION Series (P/N 0190-76185 / 151223N0002 / PX60-005-L2 / 35162CR V/1 / 2303311-C)
In high-vacuum semiconductor and advanced process equipment, a single failed valve can halt an entire production line. The stage inline valve is a critical flow-control component that isolates process chambers, regulates gas delivery, and enables precise pressure management. Without a reliable, spec-matched replacement like the MKS L2-40-SP1, unplanned downtime can cascade into hours of lost yield, contamination risk, and costly maintenance windows.
The MKS L2-40-SP1 is a 40 mm bore pneumatically actuated inline valve engineered for demanding semiconductor process environments. Carrying cross-reference part numbers 0190-76185, 151223N0002, PX60-005-L2, OVATION 35162CR V/1, and 2303311-C, this valve is a direct OEM-grade replacement widely deployed in OVATION-platform process tools. MKS Instruments is a globally recognized leader in gas and pressure control solutions, and the L2-40-SP1 represents the precision and reliability that fabs worldwide depend on.
Technical Specifications
- Model / Part Number: L2-40-SP1
- Cross-Reference P/Ns: 0190-76185 | 151223N0002 | PX60-005-L2 | OVATION 35162CR V/1 | 2303311-C
- Type: Stage Inline Valve with Integrated Limit Switch
- Bore Size: 40 mm (L2 series)
- Actuation: Pneumatic
- Position Feedback: Limit switch (open/closed signal)
- Series: OVATION / L2 Series
- Manufacturer: MKS Instruments
- Weight: ~150 g
- Application Platform: OVATION 35162CR process tool
Note: All specifications are based on OEM documentation. Konmask.com does not fabricate or alter technical data.
Key Features & Benefits
- Integrated Limit Switch: Provides real-time open/closed position feedback to the PLC or process controller, enabling interlock logic and reducing fault response time.
- Pneumatic Actuation: Fast, repeatable actuation cycle suitable for high-throughput process sequences.
- OEM Cross-Reference Verified: Matches five distinct part numbers across MKS and platform-specific catalogs, ensuring drop-in compatibility.
- Inline Stage Design: Compact form factor optimized for integration within gas-line manifolds and vacuum foreline assemblies.
- Precision Flow Control: Engineered to MKS quality standards for leak-tight sealing and consistent cycle life in cleanroom environments.
- Reduced Downtime: Stocking this valve as a critical spare eliminates extended lead times during emergency maintenance.
Industry & Equipment Applications
- Semiconductor wafer fabrication (CVD, PVD, Etch, Diffusion)
- OVATION 35162CR process tool gas delivery and chamber isolation
- Advanced packaging and MEMS manufacturing
- Flat panel display (FPD) deposition equipment
- Solar cell thin-film process lines
- Research-grade vacuum systems requiring precision inline isolation
System Integration & Compatible Parts
The MKS L2-40-SP1 is designed for seamless integration within the OVATION platform. Compatible and commonly co-ordered components include:
- MKS L2-series pneumatic actuator assemblies
- MKS 0190-series valve body kits and seal rebuild kits
- PX60 series pressure transducers (PX60-005-L2 platform)
- OVATION 35162CR manifold blocks and gas-line fittings
- MKS Type 248 and 250 pressure controllers for upstream regulation
Contact our technical team at [email protected] to verify compatibility with your specific tool configuration.
Our Quality Assurance Process
- Source Verification: All MKS components are sourced from authorized distributors or directly from OEM-certified supply chains.
- Visual & Dimensional Inspection: Each unit is inspected against OEM drawings for physical integrity before shipment.
- Part Number Validation: Cross-reference numbers are verified against MKS Instruments official documentation.
- Secure Packaging: ESD-safe and anti-static packaging to protect sensitive valve electronics and seals during transit.
- Traceability: Full lot traceability documentation available upon request for regulated fab environments.
How to Order
- Submit an inquiry via the Contact / RFQ form on this page.
- Provide your required quantity, delivery timeline, and destination country.
- Our team will respond within 1 business day with availability, lead time, and a formal quotation.
- Upon PO confirmation, we arrange secure export packaging and international logistics.
Email: [email protected] | WhatsApp/Tel: +0086 19859288691
Why Choose Konmask.com?
- Industrial Automation Specialists: Focused exclusively on PLC, DCS, and process control components — not a generalist marketplace.
- Global B2B Export Experience: Serving semiconductor fabs, system integrators, and MRO teams across Asia, Europe, and the Americas.
- Technical Pre-Sales Support: Engineers available to confirm cross-references and compatibility before you commit to an order.
- Competitive Lead Times: Established supplier relationships enable faster sourcing than standard distribution channels.
- Transparent Documentation: COA, packing lists, and export documents provided as standard.
Frequently Asked Questions
- Q: Is the MKS L2-40-SP1 a new or refurbished part?
- A: We supply both new OEM stock and professionally refurbished units. Please specify your requirement when submitting an inquiry, and we will confirm availability and condition.
- Q: Can you confirm compatibility with my specific OVATION tool revision?
- A: Yes. Share your tool serial number or BOM reference and our technical team will cross-check against MKS documentation before quoting.
- Q: What is the typical lead time?
- A: Lead time varies by stock availability. In-stock units typically ship within 3–5 business days internationally. We will confirm exact lead time in your quotation.
- Q: Do you provide a warranty?
- A: Yes. All parts carry a standard 90-day warranty against manufacturing defects. Extended warranty options are available — contact us for details.
- Q: Can I order a single unit or is there a minimum order quantity?
- A: No minimum order quantity. We supply single units as well as bulk orders for MRO and project requirements.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
