Nikon M Plan 100X/0.80 ELWD Microscope Objective Lens | Replacement, Equivalent & Selection Guide
SKU: 5964C2MAFQ5KA (GAS HE) / 5964C2MAGU5KA (GAS NF3) — Nikon 100/0.80 ELWD 210/0 M Plan Series. This page provides full technical specifications, compatible replacement models, and a structured selection guide for engineers and procurement teams sourcing this objective lens or evaluating alternatives.
Technical Specifications
- Brand: Nikon
- Series: M Plan (Reflected Light, Metallurgical)
- Magnification: 100X
- Numerical Aperture (NA): 0.80
- Working Distance: ELWD (Extra Long Working Distance)
- Tube Length / Cover Glass: 210 / 0 (infinity-corrected, no cover glass)
- Gas Compatibility: GAS HE (5964C2MAFQ5KA) / GAS NF3 (5964C2MAGU5KA)
- Application: Semiconductor inspection, wafer metrology, industrial surface analysis
- Thread Mount: RMS / Nikon proprietary (verify with system)
- Country of Origin: Japan
- Weight: 360 g
Compatible Replacement & Equivalent Models
The following models are commonly evaluated as functional equivalents or replacements for the Nikon M Plan 100X/0.80 ELWD. Always verify NA, working distance, tube length, and gas compatibility before substitution.
- Nikon CF Plan 100X/0.70 ELWD — Lower NA, longer WD; suitable where depth of field is prioritized
- Olympus MPLFLN100X — 100X/0.90, shorter WD; higher resolution but reduced clearance
- Mitutoyo M Plan Apo 100X/0.70 — Infinity-corrected, long WD; widely used in semiconductor metrology
- Leica N Plan L 100X/0.75 — Long WD variant; compatible with Leica DMI/DM series
- Zeiss LD EC Epiplan-Neofluar 100X/0.75 HD — High-definition coating; suitable for bright-field and DIC
Note: Gas-purged variants (HE / NF3) are application-specific. Confirm gas compatibility with your system integrator before ordering a replacement.
Why Choose the Original Model
- Factory-calibrated for Nikon Eclipse and MM series platforms
- Gas-purged design (HE or NF3) for cleanroom and semiconductor fab environments
- Optimized for 210mm tube length — maintains parfocality within Nikon M Plan sets
- Traceable MPN and lot documentation for quality audits
- OEM-sourced stock with full inspection records available upon request
Typical Applications
- Semiconductor wafer surface inspection (pre/post-etch)
- MEMS and microelectronics defect analysis
- Thin-film coating thickness measurement
- PCB and substrate quality control
- Photomask and reticle inspection
- Industrial metallurgical microscopy
System Compatibility
- Nikon Eclipse LV / MM series upright microscopes
- Nikon Optiphot / Epiphot metallurgical platforms
- Custom OEM integration systems using Nikon M Plan objective mounts
- Automated wafer inspection tools with Nikon optical heads
Confirm thread pitch and flange distance with your system manual before installation.
Selection Guide
Use the following criteria to select the correct variant or replacement:
- Gas environment: Select 5964C2MAFQ5KA for Helium (HE) purge; 5964C2MAGU5KA for NF3 environments
- Resolution vs. working distance: NA 0.80 provides high resolution with ELWD clearance — do not substitute with NA < 0.70 for critical defect detection
- Tube length: 210mm — incompatible with 160mm finite tube systems without adapter
- Cover glass: Designed for 0 (no cover glass) — do not use with cover-glass specimens without recalibration
- Budget alternatives: Mitutoyo M Plan Apo 100X offers comparable WD at potentially lower cost; verify NA requirements first
Quality Assurance & Sourcing
- All units sourced from authorized distributors or verified OEM surplus channels
- Pre-shipment inspection: optical clarity, parfocality, thread integrity
- Packaging: anti-static foam, individual lens case, humidity-controlled shipping
- Documentation available: MPN verification, condition report, test images on request
- Returns accepted within 14 days for DOA or mis-shipped items
How to Order
- Add to cart directly on this page
- For bulk orders (>3 units) or system integration quotes, contact: [email protected]
- Phone / WhatsApp: +0086 19859288691
- Lead time: In-stock items ship within 2 business days; sourced items 5–15 business days
- Export documentation (commercial invoice, packing list, COO) provided for international orders
Replacement & Compatibility FAQ
Q: Can I use the GAS HE version in a NF3 environment?
A: No. The gas-purged variants are sealed and calibrated for specific gas types. Cross-use may cause contamination or optical degradation.
Q: Is this lens compatible with Nikon Ti2 inverted microscopes?
A: The M Plan series is designed for reflected-light (epi) upright systems. It is not recommended for inverted configurations without custom adapters.
Q: What is the difference between M Plan and CF Plan objectives?
A: M Plan uses a 210mm tube length; CF Plan is designed for Nikon’s CFI (Chrome-Free Infinity) system. They are not directly interchangeable without tube lens adapters.
Q: Can Konmask source discontinued or hard-to-find Nikon objective variants?
A: Yes. Contact us with your full MPN and quantity. We maintain relationships with OEM surplus and refurbishment channels globally.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
