Semiconductor & High-Vacuum Process Solution — Pfeiffer TPH 170 | PM-P01-210NAH2964 | TPH 170 Series
Where This Product Is Used
The Pfeiffer TPH 170 turbomolecular pump is engineered for demanding high-vacuum and ultra-high-vacuum environments across a wide range of industrial and scientific applications:
- Semiconductor Fabrication — Ion implantation, CVD/PVD chambers, etch process tools, and load-lock systems requiring stable base pressures in the 10⁻⁷ to 10⁻¹⁰ mbar range.
- Thin-Film & Optical Coating — Magnetron sputtering and e-beam evaporation systems where contamination-free vacuum is critical to film quality.
- Analytical Instrumentation — Mass spectrometers, electron microscopes (SEM/TEM), and surface analysis tools (XPS, AES, SIMS).
- Research & Development Laboratories — University and national lab vacuum chambers for physics, materials science, and nanotechnology research.
- Industrial Leak Detection — Helium leak detectors and residual gas analyzers requiring clean, oil-free vacuum.
- Medical Device Manufacturing — Sterile packaging, freeze-drying, and radiation therapy equipment vacuum systems.
Technical Specifications
| Parameter | Value |
|---|---|
| Part Number (SKU) | PM-P01-210NAH2964 / TPH 170 |
| Reference Numbers | 700422 | 716-443129-001 |
| Controller Model | PMC237 with SNP-PMC-DIG16 Interface |
| Pump Type | Turbomolecular (Turbo Molecular) |
| Pumping Speed (N₂) | 170 L/s |
| Ultimate Pressure | < 1 × 10⁻¹⁰ mbar (with suitable backing pump) |
| Compression Ratio (N₂) | > 10⁸ |
| Inlet Flange | DN 100 ISO-K |
| Rotation Speed | 1,500 Hz (90,000 RPM) |
| Bearing Type | Hybrid ceramic ball bearings |
| Lubrication | Grease-lubricated (maintenance-free) |
| Motor Type | Brushless DC |
| Power Supply | Via PMC237 controller |
| Communication Interface | RS-485 / Digital I/O via SNP-PMC-DIG16 |
| Operating Position | Any orientation |
| Weight | ~3.5 kg (pump head) |
| Country of Origin | Germany |
Why Engineers Specify This Model
- Integrated Controller Bundle — Supplied as a complete drive unit with PMC237 controller and SNP-PMC-DIG16 digital interface card, eliminating compatibility guesswork and reducing commissioning time.
- Oil-Free Operation — Grease-lubricated hybrid bearings deliver hydrocarbon-free vacuum, protecting sensitive process environments and analytical instruments.
- Compact Footprint — The TPH 170’s slim profile fits into space-constrained OEM tool designs and retrofit upgrades without major mechanical rework.
- Digital Process Control — The SNP-PMC-DIG16 interface enables full remote monitoring, speed control, and fault diagnostics via RS-485, compatible with PLC and SCADA systems.
- Proven Pfeiffer Reliability — Pfeiffer Vacuum’s turbomolecular technology is trusted in over 50 countries across semiconductor, research, and industrial sectors for decades of continuous operation.
- Any-Orientation Mounting — Flexible installation in horizontal, vertical, or inverted positions without performance degradation.
Complete System Bill of Materials
A typical TPH 170-based vacuum system includes the following components:
- Pfeiffer TPH 170 Turbomolecular Pump — this unit
- PMC237 Turbo Controller with SNP-PMC-DIG16 Digital Interface
- Backing / Fore-Vacuum Pump (e.g., Pfeiffer Duo 5 or equivalent rotary vane / scroll pump)
- DN 100 ISO-K Inlet Flange & Centering Ring with O-ring
- Foreline Adapter & KF-25 Flexible Hose to Backing Pump
- Vent Valve (manual or solenoid, KF-16)
- Vacuum Gauge (e.g., Pfeiffer PKR 251 Pirani/Cold Cathode Combination Gauge)
- RS-485 Communication Cable (for PLC/SCADA integration)
- Vibration Isolation Bellows (recommended for sensitive analytical instruments)
Compliance & Industry Standards
- CE Marking — Compliant with EU Machinery Directive 2006/42/EC and Low Voltage Directive 2014/35/EU.
- RoHS Compliant — Restriction of Hazardous Substances Directive 2011/65/EU.
- ISO 21360 — Vacuum pump performance measurement standard.
- SEMI S2 — Environmental, Health & Safety guidelines for semiconductor manufacturing equipment (applicable OEM configurations).
- Pfeiffer Vacuum Factory QC — Each unit undergoes full performance testing and certification at the Pfeiffer Vacuum facility in Asslar, Germany.
Quality Assurance & Sourcing
Konmask.com sources Pfeiffer vacuum components through verified industrial supply channels. Every unit offered is:
- Inspected for physical integrity and completeness upon receipt.
- Cross-referenced against Pfeiffer Vacuum’s official part number database (PM-P01-210NAH2964 / 700422 / 716-443129-001).
- Stored in ESD-safe, climate-controlled conditions to preserve bearing and electronic integrity.
- Shipped with original documentation where available, including test certificates and serial number records.
We specialize in hard-to-source industrial automation and vacuum components for MRO, OEM replacement, and system integration projects.
How to Source This Part
Ready to order or need a formal quotation for your procurement team?
- Online Order — Add to cart and complete checkout. We accept T/T bank transfer, PayPal, and major credit cards.
- RFQ / Bulk Inquiry — Email [email protected] with your required quantity, delivery timeline, and destination country for a tailored quote.
- Technical Pre-Sales — Our engineering team can advise on system compatibility, controller configuration, and integration with your existing vacuum infrastructure.
- Lead Time — In-stock units ship within 3–5 business days. Ex-stock or special configurations: contact us for availability.
- Export & Customs — We handle international shipping documentation, including commercial invoices, packing lists, and HS code classification (HS 8414.10).
Application-Specific FAQ
Q: Can the TPH 170 be used without the PMC237 controller?
A: No. The TPH 170 requires a compatible Pfeiffer turbo controller for power and speed regulation. This listing includes the PMC237 controller as a matched set.
Q: What backing pump is recommended?
A: Pfeiffer recommends a backing pump with a pumping speed of 5–10 m³/h. The Pfeiffer Duo 5 (rotary vane) or MVP 015 (diaphragm, oil-free) are common choices depending on process cleanliness requirements.
Q: Is the SNP-PMC-DIG16 interface compatible with Siemens S7 PLCs?
A: Yes. The RS-485 digital interface is compatible with standard industrial PLC systems including Siemens S7-300/400/1200/1500 series via appropriate RS-485 communication modules.
Q: What is the expected service interval?
A: Pfeiffer recommends bearing replacement every 3–5 years depending on operating hours and process conditions. Konmask can advise on spare bearing kits and service options.
Q: Can this pump handle corrosive gases?
A: The standard TPH 170 is designed for clean, dry gas applications. For corrosive or reactive gas service, consult Pfeiffer Vacuum for the appropriate corrosion-resistant variant.
Q: Do you provide a warranty?
A: All units sold by Konmask.com are covered by our standard 90-day functional warranty. Extended warranty and service contracts are available upon request.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
