Swagelok 6LV-BN8BW6-DU-C – High Purity Bellows-Sealed Diaphragm Valve | 6LV Series
Engineering Background
The Swagelok 6LV Series represents the industry benchmark for ultra-high-purity (UHP) fluid control in semiconductor fabrication, specialty gas distribution, and critical process environments. Designed to meet SEMI F57 and SEMI E49 cleanliness standards, the 6LV platform delivers zero-dead-volume flow paths, sub-ppb metallic contamination levels, and leak-tight integrity across millions of actuation cycles.
Product Positioning
The 6LV-BN8BW6-DU-C is a manually-actuated, bellows-sealed angle valve configured for 6.0 mm OD butt weld process connections. Its 316L stainless steel body and Hastelloy C-22 bellows assembly make it the preferred choice for corrosive specialty gas service, reactive chemical delivery, and high-cycle purge/vent applications in 300 mm wafer fabs and advanced packaging lines.
Complete Technical Specifications
| Part Number (SKU) | 0051-89074 / 6LV-BN8BW6-DU-C |
| Cross-Reference | 1M 684-040774-001 | 3300-02261 | 6.0 OD |
| Series | Swagelok 6LV High Purity Bellows-Sealed Valve |
| Valve Type | Angle Body, Bellows-Sealed, Manually Actuated |
| Body Material | 316L Stainless Steel (electropolished) |
| Bellows Material | Hastelloy C-22 (8-ply welded) |
| Diaphragm / Seal | PCTFE / Metal-to-metal seat |
| Process Connection | Butt Weld (BW), 6.0 mm OD |
| Actuation | Manual (DU = Direct-acting, Unidirectional) |
| Flow Coefficient (Cv) | 0.30 (typical) |
| Max Working Pressure | 3300 psig (227 bar) at 21°C |
| Operating Temperature | -196°C to +232°C |
| Leak Integrity | < 1 × 10⁻¹⁰ std cc/sec He (external); < 1 × 10⁻⁹ std cc/sec He (seat) |
| Surface Finish (Ra) | ≤ 10 μin (0.25 μm) electropolished internal wetted surfaces |
| Cleanliness Standard | SEMI F57 / SEMI E49 compliant |
| Weight | 700 g (approx.) |
| Compliance | CE, RoHS, SEMI F57 |
Proven Application Environments
- Semiconductor Fab (Front-End): CVD/ALD precursor delivery, etch gas distribution, specialty gas cabinets (SGC), and VMB panels in 200 mm / 300 mm fabs.
- Specialty Gas Systems: Corrosive halogen service (Cl₂, HCl, HF, BCl₃), hydride gas (AsH₃, PH₃, SiH₄) distribution, and inert purge manifolds.
- Advanced Packaging & MEMS: High-cycle purge/vent sequences, vacuum isolation, and low-flow metering in packaging and MEMS process tools.
- Photovoltaic & LED Manufacturing: MOCVD precursor lines, silane distribution, and dopant gas delivery.
- Research & Analytical: Mass spectrometry sample introduction, gas chromatography carrier lines, and ultra-trace analytical instrument gas panels.
Engineering Advantages
- Zero External Leakage: Hastelloy C-22 multi-ply welded bellows eliminates stem packing — the primary external leak path in conventional valves — achieving <1×10⁻¹⁰ std cc/sec He external leak rate.
- Corrosion Resistance: C-22 alloy bellows withstands aggressive halogen and acid gas service where 316L bellows would fail prematurely, extending MTBF by 3–5× in corrosive duty.
- Electropolished Flow Path: ≤10 μin Ra internal finish minimizes particle generation, moisture adsorption, and outgassing — critical for sub-10 nm node process purity.
- Butt Weld Connections: Orbital-weldable 6.0 mm OD ends provide the lowest-contamination, highest-integrity joint geometry for UHP gas distribution systems.
- High Pressure Rating: 3300 psig working pressure supports high-pressure cylinder and bulk gas supply integration without additional pressure-reducing stages.
- Compact Angle Body: 90° flow path reduces system footprint and simplifies panel layout in space-constrained gas boxes and VMB assemblies.
System Architecture & Signal Flow
In a typical semiconductor gas delivery system, the 6LV-BN8BW6-DU-C is positioned as an isolation valve or vent valve within the gas stick architecture:
- Upstream: Cylinder valve → Pressure regulator (e.g., Swagelok KPR series) → Inlet isolation valve (this unit)
- Midstream: Mass flow controller (MFC) → Process isolation valve → Purge/vent manifold
- Downstream: Process tool inlet → Chamber isolation → Exhaust abatement
The angle body configuration allows direct in-line mounting on vertical gas stick panels, with the butt weld ends enabling continuous orbital-welded tubing runs that eliminate threaded or compression fittings from the high-purity flow path.
Sourcing & Quality Verification
- Origin: Genuine Swagelok manufactured component — traceable to Swagelok authorized distribution network.
- Certification: Each unit ships with Swagelok material certification (MTR), helium leak test certificate, and SEMI F57 cleanliness declaration.
- Packaging: Double-bagged in Class 10 cleanroom polyethylene with nitrogen purge; end caps installed on all process connections.
- Shelf Life: Unlimited when stored sealed in original packaging at 15–30°C, <60% RH, away from UV and corrosive atmospheres.
- Konmask Verification: All units inspected for packaging integrity, part number label accuracy, and certificate completeness prior to dispatch.
Procurement Process
-
Confirm Part Number: Verify SKU
0051-89074 / 6LV-BN8BW6-DU-Cagainst your BOM or gas panel drawing. Cross-reference with684-040774-001or3300-02261if applicable. - Request Quote: Contact support@konmask.com or call +0086 19859288691 for volume pricing, lead time, and export documentation (CO, Form E, EUR.1).
- Place Order: Add to cart and complete checkout, or submit a purchase order via email for net-terms B2B orders.
- Shipping: DHL Express / FedEx International Priority standard. EXW Xiamen available for freight-forwarder shipments. Typical lead time: 3–7 business days for in-stock units.
- Documentation: Commercial invoice, packing list, MTR, leak test certificate, and SEMI F57 declaration included with every shipment.
Technical FAQ
Q: What is the difference between BN and SS bellows material codes?
A: “B” in the model code denotes the body is 316L SS; “N” denotes Hastelloy C-22 bellows. Standard 316L bellows (“S” code) are suitable for inert gas service; C-22 bellows (“N” code) are required for halogen, acid, and corrosive specialty gas service.
Q: Can this valve be used with hydrogen (H₂) service?
A: Yes. The 316L SS body and C-22 bellows are compatible with hydrogen. Ensure system design accounts for H₂ embrittlement at elevated temperatures and verify downstream component compatibility.
Q: What orbital weld parameters are recommended for 6.0 mm OD butt weld ends?
A: Refer to Swagelok Technical Report MS-13-84 for orbital welding guidelines. Typical parameters: 316L filler wire (ER316L), argon purge gas, weld head sized for 6.0 mm OD tubing.
Q: Is a Certificate of Conformance (CoC) available?
A: Yes. Swagelok MTR and CoC are included as standard. SEMI F57 cleanliness declaration available upon request. Contact support@konmask.com.
Q: What is the cycle life rating?
A: Swagelok 6LV series bellows-sealed valves are rated for ≥150,000 full open/close cycles at rated pressure and temperature.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
