Semiconductor Wafer Processing Solution – TREK 684-1-L-CE | 684 Series
Where This Product Is Used
The TREK 684-1-L-CE Electrostatic Chuck (ESC) Power Supply is purpose-built for high-precision semiconductor fabrication environments. Engineers and process technicians specify this unit in the following applications:
- Wafer Chuck Clamping – Provides stable high-voltage DC bias to electrostatically clamp silicon wafers (200 mm / 300 mm) to ceramic or polymer ESC assemblies during plasma etch, CVD, and PVD processes.
- Plasma Etch Tools – Deployed in reactive ion etch (RIE) and inductively coupled plasma (ICP) etch chambers where precise wafer temperature control via ESC contact is critical.
- Chemical Vapor Deposition (CVD) – Used in PECVD and LPCVD systems to maintain wafer planarity and thermal uniformity across the chuck surface.
- Ion Implantation Systems – Supports wafer holding during high-energy ion beam exposure where mechanical clamping is not viable.
- Flat Panel Display (FPD) Manufacturing – Applied in large-area substrate processing tools requiring electrostatic clamping of glass substrates.
- Research & Development Labs – Used in university and national lab cleanrooms for advanced materials research requiring controlled wafer handling.
Technical Specifications
| Parameter | Value |
|---|---|
| Part Number (OEM) | 191137359-00 |
| Model | 684-1-L-CE |
| Series | 684 / SH60 |
| Variant / Revision | V2 101116243 10 |
| Reference Designation | DGR 4022.436.4700 |
| SKU | TREK-684-1-L-CE |
| Manufacturer | TREK (Advanced Energy Industries) |
| Product Type | Electrostatic Chuck Power Supply |
| Output Type | High-Voltage DC Bipolar |
| Certification | CE Marked |
| Weight | 2.6 kg (approx.) |
| Condition | Surplus / Tested Functional |
Why Engineers Specify This Model
- CE Certified – The “-CE” suffix confirms compliance with EU machinery and low-voltage directives, enabling deployment in European fab environments without additional certification overhead.
- Bipolar Output Architecture – Supports both Johnsen-Rahbek (JR) and Coulombic ESC chuck types, providing flexibility across tool generations.
- SH60 Platform Compatibility – Designed for integration with SH60-series chuck assemblies, ensuring plug-and-play replacement in existing tool configurations.
- Stable High-Voltage Output – Delivers consistent clamping voltage with low ripple, critical for maintaining wafer temperature uniformity (ΔT < 1°C across wafer).
- Compact Form Factor – Rack-mountable design fits standard 19″ equipment bays in process tool sub-fab areas.
- Proven Field Reliability – The 684 series has an established track record in high-volume production fabs globally.
Complete System Bill of Materials
For a complete ESC power delivery system, engineers typically source the following alongside the TREK 684-1-L-CE:
- Electrostatic Chuck Assembly (ceramic or polymer, matched to wafer size)
- High-Voltage Coaxial Cable Assembly (SHV or MHV connectors)
- ESC Controller / Interlock Module
- RF Filter / Isolation Network (for plasma environments)
- Wafer Temperature Monitoring Module
- Rack Mount Kit (19″ EIA standard)
Contact support@konmask.com for BOM sourcing assistance.
Compliance & Industry Standards
- CE Marking – EU Low Voltage Directive (LVD) 2014/35/EU & EMC Directive 2014/30/EU
- SEMI Standards – Compatible with SEMI E49 (ESC performance) and SEMI S2 (safety guidelines for semiconductor equipment)
- RoHS – Verify with your procurement team for RoHS compliance status on surplus units
- ISO 9001 – TREK manufacturing facilities operate under ISO 9001 quality management systems
Quality Assurance & Sourcing
Konmask.com specializes in surplus and refurbished semiconductor process equipment components. Every TREK 684-1-L-CE unit offered is:
- Visually inspected for physical damage, connector integrity, and label legibility
- Powered-on tested where applicable to verify basic functionality
- Photographed and documented with actual unit serial/part numbers
- Stored in ESD-safe, climate-controlled warehouse conditions
- Shipped with appropriate anti-static and cushioned packaging
Note: Surplus units are sold as-is. Konmask.com does not represent OEM warranty. For new units with full OEM warranty, contact TREK / Advanced Energy directly.
How to Source This Part
- Add to Cart – Click “Add to Cart” above to purchase directly online.
- Request a Quote – Email support@konmask.com with your PO requirements, quantity, and delivery timeline.
- Bulk / Contract Orders – We support blanket POs and scheduled releases for MRO and fab maintenance programs.
- Export & Global Shipping – We ship worldwide. Export documentation (commercial invoice, packing list, COO) provided upon request.
- Phone / WeChat – Reach our technical sales team at +0086 19859288691 for urgent requirements.
Application-Specific FAQ
Q: Is the TREK 684-1-L-CE compatible with 300 mm wafer ESC assemblies?
A: The 684-1-L-CE is designed for the SH60 chuck platform. Compatibility with specific 300 mm assemblies depends on the chuck manufacturer’s voltage and current specifications. Contact us with your chuck datasheet for confirmation.
Q: What is the difference between the 684-1-L and 684-1-L-CE variants?
A: The “-CE” suffix denotes CE certification for European market compliance. Electrically and functionally, the units are equivalent. The CE variant includes additional EMC shielding and documentation.
Q: Can this unit replace an Advanced Energy (AE) ESC power supply?
A: TREK was acquired by Advanced Energy Industries. The 684 series is an AE/TREK product. Cross-compatibility with other AE ESC models depends on output voltage range and connector pinout — consult your tool OEM documentation.
Q: Do you provide a test report or functional verification certificate?
A: Basic functional test results are available upon request. Full calibration certificates require third-party NIST-traceable testing, which can be arranged at additional cost.
Q: What is the lead time for this part?
A: In-stock units ship within 1–3 business days. Contact us to confirm current stock status before placing a time-critical order.
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Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
