OEM 67799A / 142353K / MX100TP – Solid Shaft Rotary Motion Feedthrough | Vacuum Precision Rotary Drive Platform
Engineering Background
Rotary motion feedthroughs are critical interface components in vacuum systems, enabling continuous rotational transmission from atmospheric environments into vacuum chambers without compromising chamber integrity. The OEM 67799A / 142353K / MX100TP series represents a precision-engineered solid shaft feedthrough designed for demanding semiconductor processing, thin-film deposition, and industrial automation environments where leak-tight rotary motion transfer is non-negotiable.
Product Positioning
This unit — cross-referenced under part numbers 67799A, 142353K, MX100TP, 1101006401, and 2008A — is a direct OEM replacement and upgrade-compatible component for rotary drive assemblies in vacuum process equipment. It is sourced and verified for procurement engineers requiring traceable, specification-accurate parts with minimal lead time.
Complete Technical Specifications
| Part Numbers | 67799A / 142353K / MX100TP / 1101006401 / 2008A |
| Component Type | Solid Shaft Rotary Motion Feedthrough |
| Drive Configuration | Solid shaft, single-ended rotary |
| Shaft Material | Stainless steel (vacuum-grade) |
| Sealing Technology | Ferrofluidic / magnetic fluid seal (leak-tight to high vacuum) |
| Operating Vacuum Range | Atmosphere to high vacuum (≤ 1×10⁻⁸ Torr typical) |
| Rotational Speed | Refer to OEM datasheet for rated RPM |
| Torque Capacity | Refer to OEM datasheet |
| Flange Standard | ISO-KF / CF (confirm with part suffix) |
| Weight | 2,600 g |
| Condition | OEM — New / Refurbished (confirm at order) |
| Country of Origin | Confirm at order |
Proven Application Environments
- Semiconductor Wafer Processing — CVD, PVD, etch chamber substrate rotation
- Thin-Film Deposition Systems — Sputtering target rotation, substrate planetary drives
- Electron Beam & Ion Beam Equipment — Sample stage rotation under high vacuum
- Analytical Instrumentation — Mass spectrometers, surface analysis systems
- Industrial Vacuum Furnaces — Rotary hearth and fixture drives
- R&D Vacuum Chambers — University and national lab experimental rigs
Engineering Advantages
- Zero Particulate Generation — Ferrofluidic seal eliminates sliding contact contamination
- Continuous Rotation — No angular travel limit; full 360° unlimited rotation
- High Vacuum Compatibility — Outgassing-controlled materials meet process cleanliness requirements
- Compact Envelope — Drop-in replacement geometry minimizes retrofit engineering effort
- Multi-PN Cross-Reference — Single unit resolves five OEM part numbers, simplifying BOM consolidation
- Maintenance-Friendly — Modular design supports in-field seal replacement
System Architecture & Signal Flow
The feedthrough mounts to the vacuum chamber wall via a standard flange (ISO-KF or CF). The atmospheric-side shaft couples to an external motor or manual drive; the vacuum-side shaft transmits torque to the internal mechanism (substrate holder, target, sample stage). The ferrofluidic seal maintains vacuum integrity across the shaft-to-housing interface, with no dynamic O-ring contact. Bearing preload is factory-set to minimize radial runout and axial play.
[External Motor / Drive] → [Atm-Side Shaft] → [Ferrofluidic Seal | Flange] → [Vac-Side Shaft] → [Internal Load]
↕
[Vacuum Chamber Wall]
Sourcing & Quality Verification
- All units are inspected prior to shipment for shaft runout, seal integrity, and flange surface condition
- Part numbers are verified against OEM documentation before dispatch
- Packaging: anti-static, vacuum-sealed with desiccant for transit protection
- Traceability documentation available upon request (test reports, photos)
- Konmask.com maintains inventory of critical-path vacuum motion components for rapid fulfillment
Procurement Process
- Confirm Part Number — Verify against your BOM: 67799A / 142353K / MX100TP / 1101006401 / 2008A
- Submit RFQ — Contact [email protected] or call +0086 19859288691
- Receive Quotation — Lead time, unit price, and availability confirmed within 24 hours
- Place Order — Purchase order or online checkout accepted
- Inspection & Dispatch — Pre-shipment QC completed; tracking provided same day
- Delivery & Support — Post-delivery technical support available for installation queries
Technical FAQ
Q: Are all five part numbers (67799A, 142353K, MX100TP, 1101006401, 2008A) the same physical unit?
A: Yes. These are cross-reference part numbers used by different OEM equipment manufacturers for the same or functionally equivalent solid shaft rotary feedthrough assembly.
Q: What is the maximum operating vacuum level?
A: Ferrofluidic-sealed feedthroughs of this class typically operate to ≤ 1×10⁻⁸ Torr. Confirm with the specific unit datasheet provided at order.
Q: Can this feedthrough be used with corrosive process gases?
A: Compatibility depends on the specific process chemistry. Contact our engineering team for material compatibility assessment before ordering.
Q: Is installation support available?
A: Yes. Konmask.com provides post-sale technical support including installation guidance, torque coupling recommendations, and flange alignment procedures.
Q: What is the lead time?
A: In-stock units ship within 1–3 business days. Out-of-stock items are quoted with lead time at RFQ stage.
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Contact: [email protected] | +0086 19859288691
