Applied Materials 0010-02146 AQUATRAC AT Moisture Sensor | Replacement, Equivalent & Selection Guide
The Applied Materials 0010-02146 (cross-reference: TAB22A-1/PURF2-LF, 2L08-050039-11A, 2L81-050039-11, P/N 14.1139) is the AQUATRAC AT trace-moisture measurement module engineered for the Applied Materials HDPCVD ULTIMA platform. It delivers real-time H₂O concentration monitoring critical to process integrity in high-density plasma chemical vapor deposition environments. Konmask.com supplies verified original and compatible replacement units with full traceability and 90-day functional warranty.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Part Number: 0010-02146
- Cross-Reference P/Ns: TAB22A-1/PURF2-LF · 2L08-050039-11A · 2L81-050039-11 · 14.1139
- Module Name: AQUATRAC AT
- Platform: HDPCVD ULTIMA
- Function: Trace moisture / H₂O concentration measurement
- Technology: Quartz Crystal Microbalance (QCM) moisture sensing
- Weight: Approx. 800 g
- Condition Available: New OEM · Refurbished · Tested Used
Compatible Replacement & Equivalent Models
The following parts are confirmed compatible or functionally equivalent to the Applied Materials 0010-02146 AQUATRAC AT:
- TAB22A-1 / PURF2-LF – OEM sub-assembly reference, direct drop-in fit
- 2L08-050039-11A – Alternate AMAT internal P/N, same form / fit / function
- 2L81-050039-11 – Revision variant, fully compatible with ULTIMA chamber
- 14.1139 – Supplier cross-reference number (AQUATRAC series)
- Third-party AQUATRAC-compatible QCM moisture sensors (contact Konmask for validated alternatives)
Why Choose the Original Model
- Factory-calibrated for HDPCVD ULTIMA process windows — no re-tuning required
- Full AMAT firmware and recipe compatibility out of the box
- Traceable lot documentation and Certificate of Conformance (CoC) available on request
- Minimizes qualification risk versus third-party alternatives in critical fab environments
- Backed by Konmask’s sourcing verification and 90-day functional warranty
Typical Applications
- HDPCVD oxide / nitride deposition process moisture control
- Preventive maintenance replacement on ULTIMA chambers
- Spare-parts inventory for high-volume semiconductor fabs
- Tool qualification and recommissioning after wet cleans
- R&D environments requiring precise moisture baselines
System Compatibility
- Primary Platform: Applied Materials HDPCVD ULTIMA
- Compatible Systems: ULTIMA HDP-CVD chambers (200 mm & 300 mm configurations)
- Integration: Direct drop-in replacement — no hardware modification required
- Software: Compatible with standard AMAT HDPCVD process controller software
Selection Guide
Use the criteria below to confirm the correct part for your system:
- Need OEM traceability + CoC? → Order 0010-02146 (New OEM)
- Budget-sensitive / non-critical chamber? → Refurbished 0010-02146 or 2L81-050039-11 revision
- Emergency replacement / short lead time? → Contact Konmask for tested-used stock availability
- Unsure of revision compatibility? → Provide your chamber serial number; Konmask will confirm fit
- Bulk / fab-wide spares program? → Request volume pricing via [email protected]
Quality Assurance & Sourcing
- All units inspected and functionally tested before shipment
- Sourced from authorized distributors, OEM overstock, and certified refurbishers
- ESD-safe packaging with anti-static shielding bag and foam insert
- Certificate of Conformance (CoC) and test report available on request
- Export compliance reviewed — ECCN / HTS classification provided if required
How to Order
- Online: Add to cart directly on this page
- Email: [email protected] — include P/N, quantity, and required condition
- Phone / WhatsApp: +0086 19859288691
- Lead Time: In-stock units ship within 1–3 business days; sourced units 5–15 business days
- Payment: T/T wire transfer, PayPal, credit card (via Shopify checkout)
Replacement & Compatibility FAQ
Q: Is 2L81-050039-11 a direct replacement for 0010-02146?
A: Yes — it is an AMAT internal revision of the same AQUATRAC AT assembly and is functionally interchangeable on HDPCVD ULTIMA platforms.
Q: Can I use a third-party moisture sensor instead?
A: Third-party QCM sensors may be compatible but require fab-level qualification. Contact Konmask for validated alternatives if OEM lead times are a concern.
Q: Do you provide calibration certificates?
A: New OEM units include factory calibration data. Refurbished units can be supplied with third-party calibration reports upon request.
Q: What is the warranty?
A: Konmask offers a 90-day functional warranty on all shipped units. Extended warranty available for volume orders.
Q: Can you source other AMAT HDPCVD spare parts?
A: Yes — Konmask specializes in AMAT and multi-brand semiconductor spare parts. Submit your full BOM for a consolidated quote.
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Contact: [email protected] | +0086 19859288691
