HDP-CVD Process Solution – Applied Materials 0020-18542 | MC-31106A RPSC Applicator
Where This Product Is Used
The Applied Materials 0020-18542 RPSC Applicator (also referenced as 0010-02146, MC-31106A, 118100053712, and 1181-000537-12) is a critical consumable/spare part used in High-Density Plasma Chemical Vapor Deposition (HDP-CVD) process chambers. It is deployed in semiconductor wafer fabrication facilities (fabs) for:
- Inter-layer dielectric (ILD) gap-fill deposition on logic and memory devices
- Shallow trench isolation (STI) fill processes at advanced technology nodes
- Pre-metal dielectric (PMD) deposition in CMOS front-end-of-line (FEOL) flows
- High-aspect-ratio gap-fill on DRAM and NAND Flash structures
- Oxide deposition on power devices and MEMS wafers
This applicator is a key component of the Remote Plasma Source Clean (RPSC) subsystem, responsible for delivering reactive plasma species into the chamber for in-situ cleaning cycles, directly impacting chamber uptime and process repeatability.
Technical Specifications
| Attribute | Detail |
|---|---|
| Manufacturer | Applied Materials (AMAT) |
| Primary Part Number | 0020-18542 |
| Cross-Reference Part Numbers | 0010-02146 / MC-31106A / 118100053712 / 1181-000537-12 / 17-08946-03 |
| Description | RPSC Applicator – Clampless Design |
| Compatible Platform | Applied Materials HDP-CVD (e.g., Ultima HDP-CVD, Producer HDP) |
| Component Category | Remote Plasma Source Clean (RPSC) Assembly |
| Design Type | Clampless |
| HS Code | 8486.90.00 |
| Country of Origin | USA |
| Weight | 150 g (approx.) |
| Condition Available | New OEM / Refurbished / Used-Tested |
Why Engineers Specify This Model
- Clampless design reduces mechanical stress on the applicator body, extending service life in high-RF-power environments
- Precision-machined interface ensures consistent plasma coupling efficiency, critical for repeatable clean cycles
- OEM-grade materials maintain compatibility with NF₃ and O₂ remote plasma chemistries used in RPSC cleaning
- Drop-in replacement for all cross-referenced part numbers — no chamber modification required
- Validated for high-uptime fabs where RPSC clean frequency directly impacts CoO (Cost of Ownership)
Complete System Bill of Materials
The RPSC Applicator (0020-18542) is typically sourced alongside the following components for a complete RPSC subsystem overhaul:
- Remote Plasma Source (RPS) Generator Assembly
- RPSC Applicator O-Ring Kit
- Plasma Tube / Applicator Liner
- RF Match Network Components
- Gas Delivery Line Fittings (NF₃ / O₂ compatible)
- Chamber Lid Seal Kit
Contact [email protected] for a complete BOM quote for your specific chamber configuration.
Compliance & Industry Standards
- HS Code: 8486.90.00 – Parts and accessories for semiconductor manufacturing machinery
- Compatible with SEMI S2 / S8 safety guidelines for semiconductor equipment
- Suitable for use in ISO Class 1–5 cleanroom environments
- RoHS-compliant materials available upon request
- Export classification: Consult your trade compliance team for EAR/ECCN applicability
Quality Assurance & Sourcing
At Konmask.com, every Applied Materials spare part undergoes a structured sourcing and verification process:
- Traceability: Each unit is documented with part number, cross-reference verification, and condition grading
- Inspection: Visual and dimensional inspection against OEM drawings where available
- Packaging: ESD-safe, cleanroom-compatible packaging for all semiconductor-grade components
- Warranty: 90-day warranty on new OEM parts; 30-day warranty on refurbished/tested units
- Sourcing Network: Procured from authorized distributors, OEM excess inventory, and certified refurbishers
How to Source This Part
- Submit your RFQ via [email protected] with your required quantity and condition preference
- Receive a quote within 1 business day with lead time and availability confirmation
- Approve the proforma invoice and select your preferred shipping method (DHL / FedEx / sea freight)
- Part ships with full documentation: packing list, commercial invoice, and inspection report
- WhatsApp / WeChat inquiries: +0086 19859288691
Application-Specific FAQ
Q: Is 0020-18542 compatible with both Ultima and Producer HDP-CVD platforms?
A: Compatibility depends on the specific chamber revision. Please provide your chamber model and software version when requesting a quote so we can confirm fitment.
Q: What is the typical replacement interval for the RPSC Applicator?
A: Replacement frequency varies by process chemistry and RF power levels. Most fabs replace the applicator every 500–1,000 RPSC clean cycles or during scheduled PM windows.
Q: Can you supply the full RPSC assembly, not just the applicator?
A: Yes. Contact us with your full BOM and we will provide a consolidated quote for the complete RPSC subsystem.
Q: Do you offer refurbished units with a warranty?
A: Yes. Refurbished units are available with a 30-day tested warranty. New OEM units carry a 90-day warranty.
Q: What cross-reference part numbers are confirmed equivalent?
A: Confirmed cross-references: 0010-02146, MC-31106A, 118100053712, 1181-000537-12, 17-08946-03. Always verify with your equipment documentation before installation.
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Contact: [email protected] | +0086 19859288691
