Applied Materials 0020-30797 / 0020-84776 – Perforated Plate 200mm Giant Gap Nitride | CVD Chamber Platform
Engineering Background
The Applied Materials Perforated Plate (P/N 0020-30797 / 0020-84776) is a precision-engineered silicon nitride faceplate designed for 200mm CVD (Chemical Vapor Deposition) process chambers operating in Giant Gap electrode configurations. This component is a critical consumable in PECVD and thermal CVD systems, directly governing gas distribution uniformity, plasma confinement, and deposition film quality across the wafer surface.
Product Positioning
Sourced and verified by Konmask.com for procurement engineers requiring OEM-equivalent replacement parts for Applied Materials Centura, Producer, and compatible 200mm CVD platforms. Cross-referenced with legacy P/N 0020-84776 for backward compatibility across tool generations. Also cross-listed with ABB robot controller modules DSQC346E / 3HAB8101-11/05D for integrated automation cell sourcing.
Complete Technical Specifications
- Primary P/N: 0020-30797
- Alternate P/N: 0020-84776
- Cross-Reference: DSQC346E / 3HAB8101-11/05D (ABB IRC5 Robot Controller Module)
- OEM Manufacturer: Applied Materials (AMAT)
- Component Type: Perforated Plate / Showerhead Faceplate
- Wafer Size Compatibility: 200mm (8-inch)
- Electrode Configuration: Giant Gap
- Material: Silicon Nitride (Si₃N₄) – High-purity ceramic
- Process Compatibility: PECVD, Thermal CVD, SiN, SiO₂, a-Si deposition
- Weight: ~2,600 g
- Condition: New / Refurbished OEM-grade (specify at inquiry)
- Certification: Traceable lot documentation available on request
Proven Application Environments
- Applied Materials Centura 200mm CVD chambers (Giant Gap electrode configuration)
- Applied Materials Producer SE / GT PECVD systems
- Integrated automation cells using ABB IRC5 robot controllers (DSQC346E / 3HAB8101-11/05D) for wafer handling
- Semiconductor fabs running SiN passivation, gate oxide, and inter-layer dielectric (ILD) processes
- R&D and pilot-line tools requiring verified OEM replacement consumables
Engineering Advantages
- Uniform Gas Distribution: Precision-drilled perforation pattern ensures ±1% gas flow uniformity across 200mm wafer surface
- High-Purity Nitride Material: Si₃N₄ construction resists plasma erosion, minimizing particle contamination and extending service intervals
- Giant Gap Geometry: Optimized electrode spacing for low-stress film deposition and improved step coverage
- OEM Dimensional Compliance: Drop-in replacement with no chamber modification required
- Dual P/N Coverage: Satisfies both 0020-30797 and 0020-84776 BOM line items in a single procurement action
System Architecture & Signal Flow
In a standard PECVD Giant Gap chamber, the perforated plate serves as the upper electrode / gas distribution faceplate. Process gas enters through the showerhead manifold, passes through the precision-drilled holes in the nitride plate, and is excited into plasma by RF power applied between the faceplate and the susceptor (lower electrode). The 200mm wafer rests on the susceptor; deposition uniformity is directly determined by the hole pattern geometry and plate planarity.
In automation-integrated fabs, ABB IRC5 robot controllers (DSQC346E / 3HAB8101-11/05D) manage wafer transfer between load locks and process chambers, making simultaneous sourcing of both the chamber consumable and the robot controller module a common procurement requirement.
Sourcing & Quality Verification
- All parts are inspected upon receipt: dimensional check, visual inspection, and surface particle count
- OEM traceability documentation (lot number, date code) provided where available
- Refurbished units undergo ultrasonic cleaning and re-certification to OEM tolerances
- Konmask.com maintains a curated inventory of Applied Materials and ABB automation components for semiconductor and industrial automation customers
- Export compliance screening performed for all international shipments
Procurement Process
- Step 1: Submit RFQ via [email protected] with your P/N, quantity, and required condition (new / refurbished)
- Step 2: Receive formal quotation with lead time, condition report, and traceability documentation within 24 business hours
- Step 3: Confirm PO; payment via T/T, PayPal, or approved credit terms
- Step 4: Parts shipped with full packing list, inspection report, and tracking number
- Step 5: Post-delivery technical support available for installation and compatibility verification
Technical FAQ
Q: Is 0020-84776 a direct replacement for 0020-30797?
A: Yes. Both P/Ns refer to the same Perforated Plate 200mm Giant Gap Nitride assembly. The alternate P/N reflects an AMAT internal revision; the parts are dimensionally and functionally interchangeable.
Q: What is the typical service life of this plate?
A: Service life depends on process chemistry and RF hours. Typical replacement interval is 500–1,000 RF hours under standard SiN deposition conditions. Particle counts and etch rate uniformity are the primary indicators for replacement.
Q: Can this plate be used in non-Giant Gap chamber configurations?
A: No. The hole pattern pitch and plate thickness are optimized for Giant Gap electrode spacing. Using this plate in a standard gap chamber will result in non-uniform deposition and potential process excursions.
Q: Do you supply the ABB DSQC346E and 3HAB8101-11/05D modules separately?
A: Yes. These ABB IRC5 robot controller modules are available as standalone items. Contact us for availability and pricing.
Q: What shipping options are available for fragile ceramic components?
A: All ceramic parts are packed in custom foam-lined cases with anti-static protection. DHL Express, FedEx International Priority, and sea freight (for bulk orders) are available.
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