Applied Materials 0020-21707 MR-J3-200A SM3-1367 15854-1 Lifter – Precision Wafer Handling Component for CVD/PVD Process Systems
When a wafer lifter fails mid-process in a semiconductor fab, the consequences extend far beyond a single wafer loss. Process chambers must be vented, contamination protocols activated, and production lines halted — costing fabs tens of thousands of dollars per hour in downtime. The Applied Materials 0020-21707 Lifter is the precision mechanical interface that elevates and positions silicon wafers within the process chamber, ensuring repeatable, contamination-free wafer transfer at every cycle. Without a verified, OEM-compatible replacement, restoring chamber qualification can take days.
The 0020-21707 / MR-J3-200A / SM3-1367 / 15854-1 Lifter is an original Applied Materials spare part engineered for integration within AMAT CVD and PVD process platforms. Applied Materials commands over 18% of the global semiconductor equipment market, and their wafer handling components — including this lifter assembly — are critical consumables in fabs operating 200mm and 300mm wafer processes worldwide. This part number cross-references multiple AMAT internal tracking codes (MR-J3-200A, SM3-1367, 15854-1), confirming its role as a validated, multi-platform compatible component.
Technical Specifications
- Manufacturer: Applied Materials (AMAT)
- Primary Part Number: 0020-21707
- Cross-Reference Numbers: MR-J3-200A / SM3-1367 / 15854-1
- Component Type: Wafer Lifter Assembly
- Weight: Approx. 150 g
- Compatibility: Applied Materials CVD / PVD process chambers
- Condition: New / Refurbished (specify at inquiry)
- Shipping: ESD-safe packaging, worldwide export
Key Features & Benefits
- OEM-Grade Precision: Manufactured to Applied Materials’ original dimensional and material tolerances, ensuring drop-in replacement without chamber re-qualification delays.
- Multi-Code Traceability: Cross-referenced under four AMAT part numbers (0020-21707, MR-J3-200A, SM3-1367, 15854-1), simplifying procurement across different fab documentation systems.
- Contamination Control: Designed for cleanroom-compatible handling; shipped in ESD-safe, particle-controlled packaging.
- Repeatable Wafer Positioning: Maintains sub-millimeter positional accuracy across thousands of lift cycles, critical for process uniformity and yield.
- Rapid Availability: In-stock inventory enables same-week dispatch to minimize unplanned downtime impact.
Industry & Equipment Applications
- Semiconductor wafer fabrication (200mm / 300mm processes)
- Chemical Vapor Deposition (CVD) chambers — PECVD, LPCVD, MOCVD
- Physical Vapor Deposition (PVD) / Sputtering systems
- Etch and deposition process modules
- Flat panel display (FPD) manufacturing equipment
- Solar cell thin-film deposition systems
- Advanced packaging and compound semiconductor fabs
System Integration & Compatible Parts
The 0020-21707 Lifter operates as part of the wafer handling subsystem within Applied Materials process chambers. It interfaces with the robot end-effector, lift pin assemblies, and chamber baseplate. When replacing this component, engineers should also inspect:
- Lift pin assemblies and guides
- Chamber baseplate O-rings and seals
- Robot blade and end-effector alignment
- Wafer presence sensors and interlock circuits
Contact our technical team to confirm compatibility with your specific chamber configuration and process module generation.
Our Quality Assurance Process
At Konmask.com, every Applied Materials spare part undergoes a structured verification process before dispatch:
- Source Verification: Parts sourced from authorized distributors, certified refurbishers, or directly from decommissioned OEM equipment with full traceability documentation.
- Visual & Dimensional Inspection: Each unit inspected for mechanical integrity, surface condition, and dimensional conformance to OEM specifications.
- Part Number Validation: Cross-referenced against AMAT internal databases to confirm authenticity and correct revision level.
- ESD & Cleanroom Packaging: Packed in anti-static bags with desiccant, labeled with part number, serial/lot reference, and inspection date.
- Documentation: Certificate of conformance and inspection report available upon request.
How to Order
- Submit your RFQ via email to [email protected] or use the inquiry form on this page.
- Include your part number (0020-21707 or cross-reference), required quantity, and delivery timeline.
- Our technical team will confirm availability, condition, and pricing within 24 business hours.
- Upon agreement, we issue a proforma invoice; payment via T/T, PayPal, or trade finance terms for qualified buyers.
- Parts dispatched with full shipping documentation, commercial invoice, and packing list for customs clearance.
Why Choose Konmask.com?
- Semiconductor Equipment Specialists: Focused exclusively on industrial automation and semiconductor equipment spare parts — not a generalist marketplace.
- Global Export Experience: Serving fabs and equipment integrators across Asia, Europe, and the Americas with compliant export documentation.
- Technical Pre-Sales Support: Engineers available to assist with part identification, compatibility verification, and installation guidance.
- Competitive Lead Times: In-stock items ship within 3–5 business days; sourced items within 2–4 weeks depending on availability.
- Transparent Sourcing: Full disclosure of part condition (new, refurbished, used-tested) with supporting documentation.
Frequently Asked Questions
Q: What is the difference between part numbers 0020-21707, MR-J3-200A, SM3-1367, and 15854-1?
A: These are all Applied Materials internal cross-reference numbers for the same Lifter assembly. Different AMAT documentation systems and fab procurement databases may use different codes; all refer to the identical physical component.
Q: Is this a new or refurbished part?
A: We stock both new and certified-refurbished units. Please specify your requirement in your RFQ and we will confirm availability and pricing for each condition.
Q: Can you provide a certificate of conformance?
A: Yes. A certificate of conformance and inspection report are available for all units upon request at no additional charge.
Q: What is the lead time for this part?
A: In-stock units ship within 3–5 business days. If sourcing is required, typical lead time is 2–4 weeks. Contact us for current stock status.
Q: Do you ship internationally?
A: Yes. We export worldwide with full commercial documentation including commercial invoice, packing list, and certificate of origin as required.
Q: How is the part packaged for shipping?
A: All units are packed in ESD-safe anti-static bags with desiccant, placed in rigid outer packaging with foam cushioning to prevent transit damage.
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