Semiconductor Vacuum Control Solution – APPLIED MATERIALS 0190-53496 | ECOVARIO 414AR-BJ-000-000
In semiconductor fabrication, precise gas flow and vacuum isolation are not optional — they are the foundation of every successful deposition and etch process. When a two-stage inline valve fails or becomes unavailable, CVD and PVD chambers cannot maintain the pressure differentials required for repeatable thin-film deposition. Process engineers face unplanned downtime, wafer scrap, and costly tool qualification cycles. The APPLIED MATERIALS 0190-53496 MKS Two Stage Inline Valve with Limit Switch is the OEM-specified component that keeps these critical vacuum circuits operational.
The ECOVARIO 414AR-BJ-000-000 series represents MKS Instruments’ precision inline valve platform, integrated into Applied Materials process tools under part number 0190-53496. Cross-referenced as XY-HRS 095CM200AD and 90401-20095, this valve is a globally recognized component in 200mm and 300mm fab environments, trusted by process engineers across Asia, North America, and Europe for its repeatable actuation and reliable limit-switch feedback.
Where This Product Is Used
- CVD / PECVD Chambers — Inline gas isolation and throttle control for precursor delivery lines in chemical vapor deposition systems.
- PVD / Sputter Systems — Vacuum circuit isolation between process chamber and foreline, maintaining base pressure integrity during target conditioning.
- Etch Tool Gas Panels — Two-stage actuation provides soft-start flow control, preventing pressure spikes that can damage sensitive etch chemistry balance.
- Cluster Tool Transfer Chambers — Limit switch feedback integrates with tool PLC/EFEM controllers to confirm valve open/close state before wafer transfer sequences.
- Abatement System Inlets — Used upstream of point-of-use abatement units to isolate process exhaust during maintenance without breaking chamber vacuum.
Technical Specifications
- OEM Part Number: 0190-53496
- Cross Reference: XY-HRS 095CM200AD / 90401-20095
- Valve Series: ECOVARIO 414AR-BJ-000-000 (MKS Instruments)
- Type: Two Stage Inline Valve with Limit Switch
- OEM Platform: Applied Materials CVD / PVD Process Tools
- Actuation: Pneumatic, two-stage (soft-start + full open)
- Position Feedback: Integrated limit switch (open/closed signal output)
- Weight: 2,600 g (approx.)
- Compatibility: 200mm and 300mm wafer process tools
Note: Specifications are based on OEM documentation and cross-reference data. Konmask does not fabricate or modify components. Contact us to verify compatibility with your specific tool configuration.
Why Engineers Specify This Model
- Two-Stage Actuation: The soft-start first stage prevents pressure transients in sensitive vacuum lines — critical for protecting mass flow controllers and pressure transducers upstream.
- Integrated Limit Switch: Provides real-time open/close position feedback to the tool’s PLC, enabling interlock logic and automated process sequencing without external sensors.
- OEM-Matched Form Factor: Direct drop-in replacement for Applied Materials tools — no bracket modifications, no re-qualification of pneumatic fittings.
- MKS ECOVARIO Platform Reliability: The ECOVARIO 414AR series is a proven platform with extensive field history in high-uptime fab environments globally.
- Multi-Reference Traceability: Dual cross-reference numbers (XY-HRS 095CM200AD and 90401-20095) simplify procurement across different ERP and MES systems.
Complete System Bill of Materials
The 0190-53496 valve typically operates within a broader vacuum gas panel assembly. Compatible and associated components often sourced alongside this valve include:
- MKS pressure transducers and Baratron gauges (foreline and process chamber)
- Applied Materials pneumatic solenoid valve manifolds (gas panel)
- MKS / Tylan mass flow controllers (process gas lines)
- Applied Materials O-ring kits and valve seat rebuild kits
- Pneumatic tubing and fittings (Swagelok / Parker equivalent)
- EFEM / robot controller I/O cards (limit switch signal integration)
Contact Konmask.com to source complete BOM packages for your tool maintenance or spare parts inventory build.
Compliance & Industry Standards
- Designed for use in semiconductor cleanroom environments (ISO Class 3–5)
- Compatible with SEMI S2 / S8 safety guidelines for process tool gas systems
- MKS ECOVARIO series manufactured under ISO 9001 quality management systems
- RoHS-compliant materials of construction (verify with OEM datasheet for specific revision)
Quality Assurance & Sourcing
Konmask.com specializes in sourcing hard-to-find and long-lead semiconductor process components. Every part we supply goes through a structured verification process:
- Part Number Verification: Cross-checked against OEM documentation and supplier databases before shipment.
- Physical Inspection: Visual and dimensional inspection upon receipt — no counterfeit or refurbished parts shipped without explicit disclosure.
- Traceability Documentation: Certificate of conformance and sourcing records available upon request.
- Packaging Integrity: Components shipped in anti-static, moisture-barrier packaging appropriate for vacuum-wetted parts.
How to Source This Part
- Submit an Inquiry: Use the contact form on this page or email support@konmask.com with your part number and required quantity.
- Receive a Quote: Our sourcing team will confirm availability, lead time, and pricing — typically within 1 business day.
- Order Confirmation: Approve the quotation and provide shipping details. We support EXW, FOB, and DDP Incoterms.
- Shipment & Documentation: Parts shipped with packing list, COC, and tracking information. Express air freight available for urgent requirements.
📧 support@konmask.com | 📞 +0086 19859288691
Application-Specific FAQ
- Q: Can this valve be used as a direct replacement in Applied Materials Centura or Producer platforms?
- A: The 0190-53496 part number is an Applied Materials OEM designation. Please confirm your tool’s BOM revision with your process engineer before installation. Contact us with your tool model and we can assist with compatibility verification.
- Q: What is the difference between the two stages in this valve?
- A: A two-stage inline valve opens in two sequential steps — a small initial opening (soft-start) to equalize pressure, followed by full open. This prevents sudden pressure surges that can disturb upstream MFCs or downstream gauges.
- Q: Does the limit switch output a dry contact or active signal?
- A: The ECOVARIO 414AR series typically uses a mechanical limit switch with dry contact output. Verify the specific wiring configuration against your tool’s I/O schematic. Contact us for OEM wiring documentation if available.
- Q: What is the typical lead time for 0190-53496?
- A: Lead time varies by current stock and sourcing channel. Submit an inquiry and our team will provide a confirmed availability timeline, typically within 24 hours.
- Q: Do you supply rebuilt or refurbished valves?
- A: We source new OEM and new surplus components as a priority. If only refurbished stock is available, this will be explicitly disclosed in the quotation before order confirmation.
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Contact: support@konmask.com | +0086 19859288691
