Applied Materials 0020-37215 / 0020-37216 – Lower Lamp Module | Centura RTP Platform
Engineering Background
The Applied Materials Lower Lamp Module is a precision thermal radiation assembly engineered for use in Rapid Thermal Processing (RTP) and Chemical Vapor Deposition (CVD) systems within the Applied Materials Centura platform. This module serves as the primary infrared heat source positioned beneath the process chamber, delivering uniform, high-intensity radiant energy to the wafer substrate during thermal cycles. Maintaining lamp module integrity is critical to process repeatability, wafer uniformity, and overall fab yield.
Product Positioning
Sourced and verified by Konmask.com, this Lower Lamp Module is offered as an OEM-equivalent replacement component for semiconductor fabs, equipment refurbishers, and MRO procurement teams requiring reliable, spec-accurate spare parts. Cross-referenced part numbers include: 0020-37215, 0020-37216, TLLB25-11, MTHBD-L, and 3895-120513-11.
Complete Technical Specifications
| Manufacturer | Applied Materials (AMAT) |
| Primary Part Number | 0020-37215 |
| Cross-Reference Part Numbers | 0020-37216 / TLLB25-11 / MTHBD-L / 3895-120513-11 |
| Component Description | Lower Lamp Module (LOWER LAMP MODULE) |
| Compatible Platform | Applied Materials Centura RTP / CVD System |
| Module Position | Lower (beneath process chamber / wafer support) |
| Lamp Type | Tungsten-Halogen Infrared Array |
| Heating Method | Radiant / Infrared (IR) |
| Weight | 2,600 g (approx. 5.73 lbs) |
| Condition | New / Refurbished (specify at inquiry) |
| Country of Origin | USA |
| Warranty | 90-Day Functional Warranty (Konmask Standard) |
Proven Application Environments
- Rapid Thermal Processing (RTP): Anneal, oxidation, silicidation, and nitridation processes requiring precise ramp rates and temperature uniformity across 200mm / 300mm wafers.
- CVD Thermal Cycles: Pre-deposition substrate conditioning and post-deposition anneal steps in LPCVD and PECVD chambers.Epitaxial Growth (Epi): High-temperature substrate preparation in silicon epitaxy reactors integrated with the Centura platform.
- Semiconductor Fab MRO: Scheduled preventive maintenance replacement to avoid unplanned downtime in high-volume production environments.
- Equipment Refurbishment: OEM-grade lamp module replacement for Centura tool refurb and resale programs.
Engineering Advantages
- Uniform Radiant Distribution: Multi-zone lamp array geometry engineered to minimize edge-to-center temperature delta (<±1°C target), directly supporting wafer uniformity specs.
- High Thermal Efficiency: Tungsten-halogen elements deliver rapid ramp rates (>100°C/s capability) with minimal thermal mass, enabling tight process window control.
- OEM-Equivalent Fit: Dimensional and electrical specifications match original Applied Materials BOM, ensuring drop-in replacement without chamber modification.
- Robust Construction: Quartz envelope and reflector assembly rated for sustained high-temperature cycling, reducing replacement frequency versus generic alternatives.
- Multi-PN Traceability: All cross-reference part numbers (0020-37215, 0020-37216, TLLB25-11, MTHBD-L, 3895-120513-11) are documented for procurement and ERP alignment.
System Architecture & Signal Flow
Within the Applied Materials Centura RTP chamber, the Lower Lamp Module operates as follows:
- Power Input: High-current AC power delivered via lamp power supply (LPS) through dedicated lamp bus bars to the lower module array.
- Thermal Emission: Tungsten-halogen filaments emit broadband IR radiation (peak ~1,000–1,200 nm), directed upward through the quartz window toward the wafer backside.
- Temperature Feedback: Pyrometers and thermocouples positioned above and below the wafer relay real-time temperature data to the RTP controller, which modulates lamp power via closed-loop PID control.
- Zone Control: The lower module may be segmented into inner/outer zones, allowing independent power adjustment to compensate for radial temperature non-uniformity.
- Interlock Integration: Module health is monitored by the system’s lamp current sensors; a failed lamp triggers an interlock and process abort to protect the wafer and chamber.
Sourcing & Quality Verification
- Source Traceability: Units sourced from authorized distributors, certified refurbishers, or direct OEM channels. Full provenance documentation available on request.
- Incoming Inspection: Each module undergoes visual inspection, dimensional verification, and electrical continuity check prior to listing.
- Packaging: Anti-static, foam-padded packaging with moisture barrier to protect lamp elements during international transit.
- Certification: Available with Certificate of Conformance (CoC) and test report upon request.
- Export Compliance: ECCN classification and export documentation available for international shipments.
Procurement Process
- Inquiry: Submit your part number, required quantity, and target delivery date via the contact form or email [email protected].
- Quotation: Konmask will respond within 1 business day with pricing, lead time, and stock availability confirmation.
- Order Confirmation: Purchase order accepted via email, Shopify checkout, or wire transfer (T/T). Pro-forma invoice issued upon request.
- Quality Hold: Final inspection and packaging completed before dispatch. Inspection report shared with buyer if required.
- Shipping: DHL / FedEx / UPS express available. Sea freight for bulk orders. Tracking number provided within 24 hours of dispatch.
- After-Sales: 90-day warranty period. Technical support available via email or WhatsApp: +0086 19859288691.
Technical FAQ
Q: Is 0020-37216 a direct substitute for 0020-37215?
A: Yes. Both part numbers refer to the same Lower Lamp Module assembly and are interchangeable within the Centura RTP platform. The secondary PN (0020-37216) is a revision or regional catalog variant.
Q: What is the expected service life of this lamp module?
A: Under normal operating conditions (standard RTP recipe cycles, proper cooling), OEM lamp modules typically achieve 500–1,500 process hours before replacement is recommended. Actual life depends on process temperature, ramp rate, and maintenance schedule.
Q: Can this module be used in non-Centura Applied Materials tools?
A: This module is specifically designed for the Centura RTP platform. Compatibility with other AMAT tools (e.g., Producer, Endura) has not been verified. Please consult your tool documentation or contact Konmask for cross-platform compatibility assessment.
Q: Do you offer refurbished units?
A: Yes. Refurbished units are available at reduced cost and include the same incoming inspection and 90-day warranty as new units. Condition will be clearly stated in the quotation.
Q: What documentation can you provide with the order?
A: Certificate of Conformance (CoC), packing list, commercial invoice, and test report (where available). MSDS/SDS available for applicable materials.
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