Semiconductor Process Fluid Control Solution – Applied Materials 0050-61197 | GOT1000 GT1575-VTBA Series
Where This Product Is Used
The Applied Materials 0050-61197 Diaphragm Valve Assembly is engineered for precision fluid and gas control in semiconductor capital equipment. Typical deployment environments include:
- CVD / PECVD Process Chambers – Controls precursor gas delivery lines where contamination-free switching is critical to film uniformity.
- Etch Systems – Manages reactive chemistry flow paths in plasma etch tools requiring fast, repeatable actuation.
- Thermal Processing Equipment – Integrated with 700HT high-temperature controller platforms to regulate process gas at elevated operating temperatures.
- Wafer Fab Utility Lines – Used in DI water, CDA, and specialty chemical distribution manifolds within cleanroom environments.
- GOT1000 / GT1575-VTBA Controller Platforms – Designed as a matched assembly for the Mitsubishi GOT1000 GT1575-VTBA HMI-integrated valve controller architecture used in Applied Materials OEM tool configurations.
Technical Specifications
- Part Number: 0050-61197
- OEM: Applied Materials (AMAT)
- Assembly Type: Diaphragm Valve Assembly with Controller Interface
- Compatible Controller: GOT1000 GT1575-VTBA, 700HT Series
- Actuation: Pneumatic (standard AMAT valve manifold interface)
- Wetted Materials: PTFE diaphragm / electropolished 316L SS body (OEM specification)
- Operating Temperature: Compatible with 700HT elevated-temperature process environments
- Weight: 360 g
- Condition: New / Refurbished OEM-equivalent (specify at inquiry)
Why Engineers Specify This Model
- OEM-Matched Interface: Plug-compatible with Applied Materials GOT1000 GT1575-VTBA controller wiring harness — no field modification required.
- High-Temperature Rated: The 700HT designation confirms suitability for process lines operating above standard ambient ranges, reducing thermal-induced leakage risk.
- Diaphragm Isolation: Eliminates metal-to-process-fluid contact, critical for ultra-high-purity (UHP) gas and chemical applications in sub-28nm fabs.
- Validated Assembly: Supplied as a complete, tested assembly — reduces MTTR versus sourcing individual valve body, actuator, and controller components separately.
- Traceability: AMAT part number 0050-61197 provides direct cross-reference to OEM BOM for maintenance and compliance documentation.
Complete System Bill of Materials
For a fully operational valve control loop using this assembly, engineers typically specify:
- Applied Materials 0050-61197 – Diaphragm Valve Assembly (this item)
- GOT1000 GT1575-VTBA – HMI / Controller Panel (Mitsubishi OEM-integrated)
- 700HT Controller Module – High-temperature process controller
- Pneumatic supply regulator (5–7 bar CDA, per AMAT tool spec)
- Compatible valve manifold block (AMAT OEM or equivalent)
- Signal cable harness (AMAT P/N per tool revision — confirm at order)
Compliance & Industry Standards
- SEMI S2 – Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- SEMI F57 – Ultrapure water component purity requirements (where applicable)
- RoHS Compliant – Hazardous substance restrictions met per EU Directive 2011/65/EU
- ISO 9001:2015 – Quality management system certification maintained by sourcing partners
- All assemblies shipped with inspection documentation; AMAT OEM certification available upon request.
Quality Assurance & Sourcing
Konmask.com sources the Applied Materials 0050-61197 exclusively through verified industrial surplus channels and authorized OEM distribution networks. Each unit undergoes:
- Visual and dimensional inspection against OEM drawings
- Functional actuation test (pneumatic cycle verification)
- Leak integrity check prior to shipment
- Serialized packaging with part number label and inspection record
Stock availability is real-time. Inquire for lead time on high-volume or blanket purchase orders.
How to Source This Part
- In-Stock Orders: Add to cart and complete checkout — ships within 1–3 business days from our warehouse.
- RFQ / Bulk Orders: Email [email protected] with quantity, required delivery date, and destination for a formal quotation.
- Urgent / AOG Requests: Call +0086 19859288691 for same-day response on critical tool-down situations.
- Export / Cross-Border: We ship globally. Customs documentation, HS code classification, and export compliance support available on request.
Application-Specific FAQ
Q: Is the 0050-61197 compatible with all GOT1000 GT1575-VTBA revisions?
A: The assembly is designed for the standard AMAT GOT1000 GT1575-VTBA interface. Confirm your tool’s BOM revision with your process engineer before ordering if your system has been field-modified.
Q: Can this valve assembly be used outside of Applied Materials tools?
A: Yes — the diaphragm valve body is mechanically compatible with standard 1/4″ and 3/8″ OD tube fittings. However, the controller interface is AMAT-specific. Contact us for adaptation options.
Q: What is the expected service life?
A: Under normal semiconductor process conditions (clean, dry gas service), AMAT diaphragm valve assemblies are rated for 1–3 million actuation cycles. Actual life depends on media aggressiveness and cycle frequency.
Q: Do you offer exchange / core return programs?
A: Yes. Contact our team for details on core exchange pricing for refurbished units, which can reduce per-unit cost by 20–40%.
Q: Is a Certificate of Conformance (CoC) available?
A: Yes. CoC and material traceability documentation are available upon request at time of order.
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