Applied Materials 0020-21422 Clamp Assembly – ARIES ACR CVD Series
In a semiconductor fabrication environment, a failed or misaligned wafer clamp assembly can bring an entire CVD process chamber to a halt. Without a properly functioning clamp assembly, wafers shift during deposition, leading to film non-uniformity, particle contamination, and costly unscheduled downtime. The Applied Materials part number 0020-21422 — a precision-engineered DIA 27CM Clamp Assembly — is the critical interface component that secures the wafer in place throughout the deposition cycle, ensuring process repeatability and chamber integrity.
Within the Applied Materials ARIES ACR (Advanced CVD Reactor) platform, the 0020-21422 Clamp Assembly occupies a tier-one position in the chamber consumables hierarchy. Cross-referenced as CP*AR-13CE-15122 (Applied Materials internal), LAM 796-901039-002, and 100018066, this part is widely specified across global semiconductor OEM and aftermarket supply chains. Its 27 cm diameter format is designed for 200 mm wafer process chambers, making it a staple component in fabs running legacy and mid-generation ARIES ACR tools worldwide.
Technical Specifications
- Part Number: 0020-21422
- Description: Clamp Assembly (CLAMP ASSY)
- Diameter: 27 cm (DIA 27CM)
- OEM Brand: Applied Materials
- Compatible Platform: ARIES ACR CVD System
- Cross-Reference Numbers: CP*AR-13CE-15122 | LAM 796-901039-002 | 100018066
- Application: Wafer clamping / process chamber retention
- Wafer Size Compatibility: 200 mm process chamber
- Weight: Approx. 20 g (component only)
- Condition Available: New OEM / Refurbished / Used Tested
Key Features & Benefits
- OEM-Spec Dimensional Accuracy: Manufactured to Applied Materials original engineering drawings, ensuring drop-in fit without chamber modification.
- Multi-Cross-Reference Verified: Confirmed interchangeable with CP*AR-13CE-15122, LAM 796-901039-002, and 100018066 — reducing procurement confusion across multi-vendor fabs.
- Process Stability: Maintains consistent wafer positioning throughout high-temperature CVD cycles, directly supporting film thickness uniformity and yield.
- Reduced Downtime Risk: Stocking this consumable as a critical spare minimizes mean time to repair (MTTR) during unplanned chamber events.
- Broad Platform Compatibility: Designed for the ARIES ACR series, with cross-reference data supporting compatibility verification across LAM Research and Applied Materials tool variants.
Industry & Equipment Applications
- Semiconductor Fabrication (Front-End): CVD thin-film deposition processes in 200 mm wafer fabs
- MEMS Manufacturing: Precision deposition chambers requiring stable wafer retention
- LED & Power Device Production: Compound semiconductor CVD tools using ARIES ACR platform
- Research & Development Labs: University and institute-level CVD systems requiring OEM-grade spare parts
- Refurbishment & Resale: Equipment refurbishers restoring ARIES ACR chambers to OEM specification
System Integration & Compatible Parts
The 0020-21422 Clamp Assembly is designed to integrate within the Applied Materials ARIES ACR process chamber assembly. When sourcing this part, consider also verifying the condition of the following related chamber components:
- Susceptor / Heater Assembly (Applied Materials ARIES ACR series)
- Shadow Ring / Edge Ring components
- Lift Pin Assembly
- Chamber Liner
- Gas Distribution Faceplate (Showerhead)
Konmask.com maintains cross-reference databases for Applied Materials, LAM Research, and other major semiconductor OEM platforms. Contact our team to verify full BOM compatibility for your specific tool configuration.
Our Quality Assurance Process
Every Applied Materials part shipped from Konmask.com undergoes a structured inspection protocol before dispatch:
- Visual Inspection: Surface condition, dimensional check, and marking verification against OEM part number
- Cross-Reference Validation: Part number confirmed against multiple OEM and aftermarket databases
- Packaging: Anti-static, cleanroom-compatible packaging to prevent contamination during transit
- Documentation: Certificate of conformance and inspection report available upon request
- Traceability: Batch and source traceability maintained for all inventory
How to Order
- Submit an RFQ (Request for Quotation) via our website contact form or email [email protected]
- Provide your required quantity, preferred condition (new / refurbished / used tested), and target delivery timeline
- Our team will respond with availability, lead time, and pricing within 1 business day
- Upon confirmation, we issue a proforma invoice and arrange shipment via your preferred freight method
- Export documentation (commercial invoice, packing list, COC) provided for all international orders
Why Choose Konmask.com?
- Specialized Inventory: Focused exclusively on industrial automation and semiconductor equipment spare parts — not a generalist marketplace
- Global B2B Supply: Serving procurement teams, fab engineers, and equipment resellers across Asia, Europe, and the Americas
- Fast Response: Dedicated account managers respond to RFQs within 24 hours
- Flexible Sourcing: Access to new OEM, certified refurbished, and used-tested inventory across major brands
- Reliable Export Compliance: Full export documentation support for cross-border semiconductor parts procurement
Frequently Asked Questions
Q: Is the 0020-21422 compatible with both Applied Materials and LAM Research systems?
A: The 0020-21422 is an Applied Materials OEM part number. The cross-reference LAM 796-901039-002 indicates documented interchangeability with certain LAM Research configurations. Please contact us with your specific tool model to confirm compatibility before ordering.
Q: What condition options are available for this clamp assembly?
A: We can source new OEM, certified refurbished, and used-tested units depending on current inventory. Condition and pricing are confirmed at the RFQ stage.
Q: Can you provide a certificate of conformance (COC)?
A: Yes. A COC and inspection report are available upon request for all orders.
Q: What is the lead time for international orders?
A: Standard lead time is 3–7 business days for in-stock items. Express options are available. Contact us for urgent requirements.
Q: Do you accept returns or offer a warranty?
A: We offer a 30-day inspection warranty on all parts. Terms are confirmed in the proforma invoice. Contact [email protected] for warranty claims.
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