Tokyo Electron (TEL) HERAEUS 90150879 NIT Pedestal – CVD Chamber Susceptor Assembly
When a NIT (Nitride) Pedestal fails mid-process in a CVD chamber, the consequences cascade instantly: wafer batches are scrapped, chamber qualification must restart from zero, and fab downtime can cost tens of thousands of dollars per hour. The pedestal is not a peripheral component — it is the thermal and mechanical foundation upon which every nitride deposition layer is built. Without a dimensionally accurate, thermally stable pedestal, uniformity targets cannot be met and yield collapses.
The Tokyo Electron (TEL) NIT Pedestal identified by cross-reference part numbers HERAEUS 90150879, 1105-201196-61, 3870-02323, and 5PC600.5X02-00 is a precision-engineered susceptor component designed for TEL’s nitride CVD process modules. As a Heraeus-sourced quartz or ceramic pedestal assembly, it meets the stringent thermal uniformity and chemical purity requirements demanded by leading-edge semiconductor fabs worldwide. This part is widely deployed in 200mm and 300mm wafer processing lines across logic, memory, and power device manufacturing.
Technical Specifications
- OEM Part Number: HERAEUS 90150879
- Cross-Reference Numbers: 1105-201196-61 / 3870-02323 / 5PC600.5X02-00
- OEM / Equipment Manufacturer: Tokyo Electron Limited (TEL)
- Component Supplier: Heraeus
- Component Type: NIT Pedestal (Nitride CVD Susceptor / Pedestal Assembly)
- Application: CVD Nitride Deposition Process Chamber
- Weight: 2,600 g
- Condition Available: New OEM / Refurbished / Used Tested
Note: Electrical, dimensional, and process-specific parameters are available upon request. We do not publish unverified specifications.
Key Features & Benefits
- OEM-Matched Geometry: Manufactured to TEL’s original dimensional tolerances, ensuring drop-in replacement without chamber re-qualification delays.
- Heraeus Material Purity: Sourced from Heraeus, a global leader in high-purity quartz and advanced ceramics for semiconductor applications, guaranteeing contamination-free process environments.
- Thermal Stability: Engineered to withstand the high-temperature cycling inherent in nitride CVD processes, maintaining structural integrity over extended service life.
- Multiple Cross-References Verified: Four confirmed part numbers (90150879 / 1105-201196-61 / 3870-02323 / 5PC600.5X02-00) ensure procurement accuracy across different TEL BOM revisions.
- Reduced Downtime Risk: Stocked and ready to ship, minimizing mean time to repair (MTTR) for critical CVD tools.
Industry & Equipment Applications
- Logic IC fabs (advanced node gate dielectric and spacer nitride deposition)
- DRAM and NAND Flash memory manufacturing (nitride hard mask and storage node layers)
- Power semiconductor fabs (SiN passivation and isolation layers)
- MEMS and compound semiconductor production
- Compatible TEL equipment platforms: TEL Alpha-8S, TEL Trias, TEL Triase+ CVD systems (verify with your tool configuration)
System Integration & Compatible Parts
The NIT Pedestal works in conjunction with the following chamber consumables and assemblies. Konmask.com can source these complementary parts:
- CVD chamber liner / process tube
- Heater assembly and thermocouple modules
- Showerhead / gas distribution plate
- Lift pin assemblies and guide rings
- Edge ring / focus ring sets
- RF match network components
Contact us with your full BOM for a consolidated quote.
Our Quality Assurance Process
- Source Verification: All parts are traced to documented supply chains — OEM surplus, authorized distributors, or certified refurbishers.
- Visual & Dimensional Inspection: Each unit is inspected for cracks, chips, contamination, and dimensional conformance before shipment.
- Functional Testing (where applicable): Refurbished units undergo electrical and thermal performance checks.
- Secure Packaging: Shipped in anti-static, cleanroom-compatible packaging with full part labeling and traceability documentation.
- Warranty: Warranty terms provided per order — contact us for details.
How to Order
- Submit an inquiry via the Contact / RFQ form on this page or email [email protected].
- Provide your required quantity, preferred condition (new / refurbished / used), and target delivery timeline.
- Our team will respond with availability, lead time, and a formal quotation within 1 business day.
- Upon PO confirmation, we arrange secure export packaging and international logistics.
Why Choose Konmask.com?
- Specialized in hard-to-find semiconductor and industrial automation spare parts
- Global sourcing network covering OEM, surplus, and refurbished inventory
- Export experience to 30+ countries with full customs documentation support
- Dedicated B2B account management for fab procurement teams
- Competitive pricing with no hidden fees — transparent quotation process
Frequently Asked Questions
Q: Are part numbers 90150879, 1105-201196-61, 3870-02323, and 5PC600.5X02-00 all the same part?
A: Yes. These are cross-reference numbers used across different TEL documentation revisions and Heraeus supply records for the same NIT Pedestal assembly. We have verified interchangeability — please confirm with your process engineer for your specific tool revision.
Q: What condition is this part available in?
A: We stock new OEM, certified refurbished, and used-tested units depending on current inventory. Specify your preference in your RFQ and we will confirm availability.
Q: Can you ship internationally?
A: Yes. We ship worldwide with full export documentation. Lead times and shipping options are confirmed at the quotation stage.
Q: Do you offer a warranty?
A: Warranty coverage varies by part condition and is specified in the sales quotation. Contact us for details.
Q: How long does it take to get a quote?
A: Typically within 1 business day of receiving your RFQ with part number and quantity.
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