Applied Materials 3200-00004 – Precision Gas Panel | CVD/Etch Process Platform
Engineering Background
Applied Materials (AMAT) is the world’s leading supplier of semiconductor manufacturing equipment, materials, and services. The 3200-00004 Gas Panel is a critical process-gas delivery and control assembly engineered for AMAT’s CVD (Chemical Vapor Deposition) and etch tool platforms. Designed to OEM specification, this module governs the precise metering, isolation, and sequencing of reactive and inert process gases within the process chamber environment.
Product Positioning
This unit — cross-referenced as 54011208, 930YNC, NOS6989, EX-C45FF-100S27 — is a direct OEM replacement or spare for qualified AMAT tool sets. It is sourced from decommissioned or surplus fab environments, inspected, and offered to procurement engineers seeking cost-effective, lead-time-sensitive alternatives to new OEM supply.
Complete Technical Specifications
| Manufacturer | Applied Materials (AMAT) |
| Primary Part Number | 3200-00004 |
| Cross-Reference / Alt P/N | 54011208 | 930YNC | NOS6989 | EX-C45FF-100S27 |
| Assembly Type | Gas Panel / Process Gas Delivery Module |
| Platform Compatibility | Applied Materials CVD / Etch Tool Series |
| Weight | 700 g (approx.) |
| Condition | Used / Surplus / Refurbished (specify on inquiry) |
| Warranty | 90-Day Functional Warranty (standard) |
| Country of Origin | USA |
Proven Application Environments
- AMAT Precision 5000 / Centura CVD platforms
- AMAT DPS / MxP Etch chambers
- Process gas delivery for SiO₂, Si₃N₄, W, and low-k dielectric deposition
- Reactive gas (SiH₄, NH₃, NF₃, N₂O) isolation and sequencing
- Inert purge gas (N₂, Ar) manifold control
- 300 mm and 200 mm wafer fab environments
Engineering Advantages
- OEM-Identical Form/Fit/Function: Direct drop-in replacement — no re-qualification of process recipes required.
- Multi-P/N Cross-Reference: Covers 54011208, 930YNC, NOS6989, and EX-C45FF-100S27 for simplified procurement across BOM variants.
- Reduced Lead Time: In-stock availability versus 16–52-week OEM new-build lead times.
- Cost Efficiency: Significant savings versus new OEM list price, with equivalent functional performance.
- Pre-Shipment Inspection: Each unit undergoes visual, dimensional, and functional pre-check before dispatch.
System Architecture & Signal Flow
The Gas Panel integrates into the tool’s gas box assembly, interfacing upstream with the gas stick manifold (MFC + valve train) and downstream with the process chamber gas inlet. Control signals are routed via the tool’s I/O board to the chamber controller (e.g., AMAT’s VME or PLC-based system). The panel provides:
- Pneumatic or solenoid-actuated isolation valves
- Pressure regulation and monitoring ports
- Purge and vent sequencing logic interfaces
- Leak-check test ports (where applicable)
Sourcing & Quality Verification
- Sourced exclusively from traceable, decommissioned semiconductor fab environments
- Each unit serialized and logged against original fab removal records where available
- Visual inspection: no cracks, corrosion, or mechanical damage
- Functional verification performed prior to listing
- Packaged in anti-static, foam-lined protective enclosure for international transit
- Certificate of Conformance (CoC) available on request
Procurement Process
- Inquiry: Submit your PO number, required quantity, and delivery timeline via email or the contact form.
- Quote & Lead Time: We respond within 1 business day with pricing, stock confirmation, and ETA.
- Order Confirmation: Payment via T/T (wire transfer), PayPal, or approved credit terms.
- Shipping: DHL / FedEx / UPS express worldwide. Export documentation (commercial invoice, packing list, EEI where required) included.
- After-Sales: 90-day warranty. Technical support available via email for installation and compatibility queries.
Technical FAQ
Q: Is this a new or used part?
A: This is a surplus/used OEM part sourced from decommissioned fab equipment. Condition is specified per unit — contact us for the exact condition report.
Q: What tools is this compatible with?
A: Primarily AMAT CVD and etch platforms. Please provide your tool model and chamber configuration for compatibility confirmation.
Q: Can you provide a datasheet or OEM documentation?
A: We can share available reference documentation. Contact us with your specific request.
Q: Do you accept returns?
A: Yes, within 30 days if the part is unused and in original packaging. Functional warranty claims are handled case-by-case.
Q: What is the minimum order quantity (MOQ)?
A: MOQ is 1 unit. Volume pricing available for orders of 3+ units.
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