Applied Materials 0040-87020 / 0190-09257 / 0150-76461 – Lower Mag Coupled Rotation Bellows Assembly | Endura / Centura Platform
Engineering Background
The lower magnetic coupled rotation bellows assembly is a critical motion-isolation component within Applied Materials’ Endura and Centura physical vapor deposition (PVD) and chemical vapor deposition (CVD) process chambers. Designed to maintain hermetic vacuum integrity while transmitting rotational motion from the external drive mechanism to the internal substrate carrier, this assembly eliminates the need for dynamic rotary feedthroughs that are prone to particulate generation and leak failure. The multi-ply metallic bellows construction accommodates angular and axial misalignment under continuous cyclic loading, making it indispensable for high-throughput 200 mm and 300 mm wafer processing environments.
Product Positioning
Konmask.com supplies this assembly as a verified OEM-equivalent replacement targeting fab maintenance engineers, process equipment technicians, and procurement specialists who require traceable, specification-compliant spare parts with short lead times. Each unit is sourced through qualified distribution channels and undergoes incoming inspection before dispatch.
Complete Technical Specifications
| Primary Part Number | 0040-87020 |
| Cross-Reference P/N 1 | 0190-09257 |
| Cross-Reference P/N 2 | 0150-76461 |
| OEM / Manufacturer | Applied Materials (AMAT) |
| Assembly Description | Bellows, Lower, Mag Coupled Rotation |
| Compatible Platform | Endura, Centura (PVD / CVD process modules) |
| Wafer Size Compatibility | 200 mm / 300 mm |
| Construction Material | 316L Stainless Steel multi-ply welded bellows |
| Motion Type | Magnetic coupled rotational drive isolation |
| Operating Pressure Range | High vacuum (≤ 1 × 10⁻⁶ Torr base) |
| Temperature Rating | Compatible with process chamber bake-out cycles |
| Gross Weight | Approx. 700 g |
| Condition | New / Refurbished (specify at inquiry) |
| Compliance | RoHS-compatible; SEMI S2 process environment |
Proven Application Environments
- PVD Sputter Deposition – Titanium, TiN, Aluminum, and Copper barrier/seed layer deposition on Endura mainframes
- CVD Dielectric Deposition – TEOS oxide and nitride film deposition on Centura platforms
- Etch Pre-clean Modules – Pre-metal and pre-silicide cleans requiring ultra-high vacuum integrity
- Cluster Tool Transfer Chambers – Substrate rotation and alignment during robotic wafer transfer sequences
- High-Volume Manufacturing (HVM) – Logic, DRAM, and NAND flash fabs operating 24/7 continuous production schedules
Engineering Advantages
- Zero-Leak Rotational Isolation – Welded bellows construction eliminates dynamic O-ring seals, achieving helium leak rates < 1 × 10⁻⁹ std cc/s
- Magnetic Coupling Architecture – Contactless torque transmission prevents particulate generation inside the process chamber, protecting wafer yield
- High Cycle Fatigue Life – Multi-ply 316L SS bellows rated for > 1,000,000 flex cycles under nominal operating displacement
- Drop-In Replacement – Dimensional and functional equivalence to OEM specification; no chamber modification required
- Reduced Downtime – Stocked inventory enables same-week dispatch, minimizing unplanned equipment downtime (UPED) impact
- Traceable Sourcing – Each assembly carries lot documentation supporting fab quality management system (QMS) requirements
System Architecture & Signal Flow
In the Applied Materials magnetic coupled rotation design, an external motor drives a permanent magnet rotor assembly located outside the vacuum boundary. The lower bellows assembly forms the flexible vacuum wall that separates the external drive from the internal driven magnet assembly. Rotational torque is transmitted magnetically through the bellows wall without any mechanical penetration, preserving chamber vacuum integrity. The bellows accommodates the small angular and axial deflections inherent in the drive train while maintaining a continuous hermetic seal. This architecture is fundamental to achieving the sub-10⁻⁷ Torr base pressures required for advanced thin-film deposition processes.
Sourcing & Quality Verification
- Source: Authorized distribution network and certified secondary market channels
- Incoming Inspection: Visual, dimensional, and leak-check verification on representative samples per lot
- Packaging: Double-bagged in cleanroom-compatible polyethylene, nitrogen-purged, and ESD-protected where applicable
- Documentation: Certificate of Conformance (CoC) and packing list provided with each shipment
- Warranty: 90-day warranty against manufacturing defects under normal operating conditions
Procurement Process
- Submit Inquiry – Contact [email protected] or call +0086 19859288691 with your part number and required quantity
- Receive Quotation – Pricing, lead time, and availability confirmed within 1 business day
- Purchase Order – Issue PO referencing P/N 0040-87020 (or cross-reference P/N as applicable)
- Quality Documentation – CoC and inspection records dispatched with shipment
- Delivery – DHL / FedEx express international shipping available; EXW Xiamen, China
Technical FAQ
Q: Are all three part numbers (0040-87020, 0190-09257, 0150-76461) interchangeable?
A: Yes. These are Applied Materials’ internal revision or sub-assembly cross-references for the same functional assembly. Confirm your chamber revision with our technical team if uncertain.
Q: Is this assembly compatible with both 200 mm and 300 mm Endura platforms?
A: Compatibility depends on the specific process module configuration. Please provide your mainframe model and module type when inquiring to ensure correct fitment.
Q: Can you supply refurbished units?
A: Yes. Both new and professionally refurbished (cleaned, inspected, and leak-tested) units are available. Specify your preference at the time of inquiry.
Q: What is the typical lead time?
A: In-stock units ship within 3–5 business days. Out-of-stock items typically have a 2–4 week lead time depending on sourcing channel.
Q: Do you provide FOUP-compatible cleanroom packaging?
A: Standard shipments use double-bag cleanroom PE packaging. FOUP or specialized cleanroom packaging can be arranged upon request.
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Contact: [email protected] | +0086 19859288691
