Applied Materials D-A80 0090-09006 Etch Slit Valve Assembly – Applied Materials Etch System Series
In a semiconductor fabrication facility, an unplanned slit valve failure does not simply pause production — it triggers a cascade of consequences: chamber contamination, wafer loss, unscheduled downtime, and costly maintenance windows that can idle an entire etch cluster for days. The slit valve assembly is the critical isolation gate between process chambers and transfer modules, and without a verified, spec-compliant replacement on hand, recovery time stretches from hours into days.
The Applied Materials D-A80 Etch Slit Valve Assembly (P/N 0090-09006 / 0010-70191) is a precision-engineered isolation component designed for Applied Materials’ Etch platform systems. Incorporating the CPU20-III control interface and rated at 0.3–8 BAR operating pressure, this assembly — cross-referenced as BG4-4276, BH8-1395-02, BG4-3835, and 8000317507 — represents the OEM-grade standard for chamber isolation in high-throughput plasma etch environments. It is a mission-critical spare stocked by leading fabs worldwide.
Technical Specifications
- Brand: Applied Materials
- Part Number (Primary): 0090-09006
- Cross-Reference P/Ns: 0010-70191 / BG4-4276 / BH8-1395-02 / BG4-3835 / 8000317507
- Assembly Designation: D-A80
- Control Interface: CPU20-III
- Operating Pressure Range: 0.3 – 8 BAR
- Function: Etch Slit Valve Assembly (Chamber Isolation Gate)
- Application: Plasma Etch / CVD Chamber Transfer Module Isolation
- Weight: 2,600 g (approx.)
- Condition: New / Refurbished / Used — specify on inquiry
Key Features & Benefits
- OEM-Grade Precision: Manufactured to Applied Materials’ original engineering tolerances, ensuring drop-in compatibility with existing etch chamber configurations.
- Multi-P/N Cross-Reference: Covers six part numbers (D-A80, 0090-09006, 0010-70191, BG4-4276, BH8-1395-02, BG4-3835, 8000317507), simplifying procurement across different BOM revisions.
- Wide Pressure Range: Rated 0.3–8 BAR, accommodating varied process chamber pressure profiles without additional hardware modification.
- CPU20-III Compatible: Integrates directly with the CPU20-III pneumatic control module for automated open/close sequencing.
- Contamination Prevention: Hermetic sealing design prevents cross-contamination between process and transfer chambers, protecting wafer yield.
- Reduced Downtime Risk: Stocking this assembly as a critical spare eliminates extended lead-time exposure during unplanned maintenance events.
Industry & Equipment Applications
- Semiconductor Fabrication: 200mm and 300mm wafer etch cluster tools
- Plasma Etch Systems: Applied Materials Centura, Producer, and related etch platform chambers
- CVD / PVD Systems: Transfer module isolation in multi-chamber deposition platforms
- Flat Panel Display (FPD) Manufacturing: Large-area substrate etch equipment
- MEMS Fabrication: Deep reactive ion etch (DRIE) systems requiring reliable chamber isolation
- Research & Development Labs: University and national lab etch tools using Applied Materials platforms
System Integration & Compatible Parts
This slit valve assembly is designed for integration within Applied Materials etch cluster architectures. Compatible and commonly co-ordered components include:
- CPU20-III Pneumatic Control Module
- Applied Materials Etch Chamber Liner Kits
- Transfer Module O-Ring & Seal Kits
- Slit Valve Door Actuator Assemblies
- Chamber Isolation Bellows
Contact our technical team at [email protected] to confirm compatibility with your specific tool configuration and software revision.
Our Quality Assurance Process
- Source Verification: All units are sourced from certified OEM channels, authorized distributors, or verified refurbishment partners.
- Incoming Inspection: Each assembly undergoes visual inspection, dimensional verification, and functional pre-check prior to dispatch.
- Traceability: Full part number and serial traceability documentation provided with every shipment.
- Packaging: ESD-safe, anti-static packaging with foam cushioning to prevent transit damage to precision components.
- Warranty: Warranty terms provided on a per-unit basis — details confirmed at time of quotation.
How to Order
- Submit your inquiry via [email protected] or call +0086 19859288691.
- Provide your tool model, chamber configuration, and required condition (new / refurbished / used).
- Receive a formal quotation with lead time, pricing, and shipping options within 24 business hours.
- Confirm order and receive proforma invoice for payment processing.
- Shipment dispatched with full documentation and tracking.
Why Choose Konmask.com?
- Specialist Inventory: Deep stock of Applied Materials, Siemens, ABB, Fanuc, and other leading automation and semiconductor equipment brands.
- Technical Expertise: Our team includes engineers with hands-on experience in semiconductor fab environments — we speak your language.
- Global Shipping: Reliable international logistics to fabs and equipment integrators across Asia, Europe, and the Americas.
- Fast Response: Quotations within 24 hours; emergency sourcing support available for critical downtime situations.
- Trusted by Industry: Serving semiconductor equipment engineers, procurement teams, and fab managers since our founding.
Frequently Asked Questions
- Q: Is this the same part as 0010-70191 or BG4-4276?
- A: Yes. Part numbers 0090-09006, 0010-70191, BG4-4276, BH8-1395-02, BG4-3835, and 8000317507 all refer to the same Applied Materials D-A80 Etch Slit Valve Assembly. Different BOM revisions and regional catalogs use different P/Ns for the same component.
- Q: What condition is the unit available in?
- A: We can supply new (OEM), certified refurbished, and used-tested units depending on availability and your budget requirements. Please specify your preference when inquiring.
- Q: What is the lead time?
- A: Lead time varies by stock availability. In-stock units typically ship within 3–5 business days. For sourced units, lead time is confirmed at quotation stage.
- Q: Can you provide a certificate of conformance or test report?
- A: Yes. Documentation including inspection reports and traceability records are available upon request for new and refurbished units.
- Q: Do you ship internationally?
- A: Yes. We ship globally via DHL, FedEx, and freight forwarder options. Export documentation is provided for all international shipments.
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Contact: [email protected] | +0086 19859288691
