BALZERS LVM215-5BMO-X17 DN100 ISO-K Right Angle & Inlet Valve | Replacement, Equivalent & Selection Guide
The BALZERS LVM215-5BMO-X17 (also referenced as EVA 100, PA 0021-09718) is a pneumatically actuated right angle / inlet valve with DN100 ISO-K flange connection, designed for high-vacuum and ultra-high-vacuum systems. Konmask.com supplies genuine and compatible replacement units for OEM maintenance, system upgrades, and emergency sourcing.
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer | BALZERS (Pfeiffer Vacuum) |
| Part Number | LVM215-5BMO-X17 |
| Alternate P/N | EVA 100 / PA 0021-09718 |
| Valve Type | Right Angle & Inlet Valve |
| Nominal Diameter | DN100 |
| Flange Standard | ISO-K (ISO 1609) |
| Actuation | Pneumatic (5BMO) |
| Series | LVM / EVA 100 |
| Weight | 2.6 kg |
| Application | High Vacuum / Turbomolecular Pump Inlet |
Compatible Replacement & Equivalent Models
The following models are commonly evaluated as replacements or equivalents for the LVM215-5BMO-X17. Always verify flange standard, actuation type, and Cv before substituting.
- BALZERS EVA 100 / PA 0021-09718 — OEM direct equivalent (same valve, alternate catalog reference)
- VAT 26240-KA11 — DN100 ISO-K right angle valve, pneumatic; widely used as a functional replacement
- VAT 26240-KA24 — DN100 ISO-K with position indicator option
- MKS 152 Series DN100 — ISO-K right angle valve, check actuation compatibility
- Pfeiffer Vacuum DVC 100 — successor series after BALZERS/Pfeiffer integration; confirm dimensional fit
Note: Konmask.com recommends confirming part numbers with your system documentation before ordering replacements.
Why Choose the Original Model
- Proven OEM reliability — engineered to BALZERS vacuum system tolerances
- Leak-tight performance — metal-sealed design suitable for high-vacuum environments
- Pneumatic actuation (5BMO) — fast, repeatable open/close cycles with low particle generation
- ISO-K DN100 standardization — direct bolt-on compatibility with standard ISO-K components
- Long service life — robust construction minimizes downtime in critical vacuum processes
Typical Applications
- Turbomolecular pump inlet isolation (Pfeiffer, Leybold, Edwards, Agilent)
- Semiconductor CVD / PVD / etch chamber vacuum lines
- Electron beam and ion beam systems
- Research accelerators and synchrotron beamlines
- Industrial coating and thin-film deposition systems
- Mass spectrometry and analytical instrument vacuum stages
System Compatibility
The LVM215-5BMO-X17 is compatible with any vacuum system using DN100 ISO-K flanges. It integrates directly with:
- Pfeiffer / BALZERS turbopumps: TMH 1001, TMU 1001, TPH 1200
- Leybold TURBOVAC 1000 / 1100 series
- Edwards STP-iXA2206 and similar DN100 inlet configurations
- Standard ISO-K centering rings, clamps, and O-ring seals (DN100)
Pneumatic supply: typically 4–6 bar (58–87 psi) clean dry air or N₂. Verify actuator specifications with your control system.
Selection Guide
Use the checklist below to confirm the correct valve for your application:
- ✅ Flange size: DN100 ISO-K required
- ✅ Actuation: Pneumatic (if manual actuation needed, specify LVM215-5BM or equivalent)
- ✅ Orientation: Right angle (inline valves use different series)
- ✅ Sealing: Elastomer or metal seal — confirm process gas compatibility
- ✅ Position feedback: Required? Specify models with integrated sensor (e.g., VAT 26240-KA24)
- ✅ Pressure range: Confirm ultimate vacuum requirement (≤10⁻⁸ mbar for UHV variants)
Not sure which model fits your system? Contact our technical team with your pump model and system drawing.
Quality Assurance & Sourcing
- All units sourced from authorized distributors or verified surplus channels
- Pre-shipment inspection: visual, dimensional, and actuation function check
- Traceability documentation available on request
- Packaging: anti-static bag + foam-lined export carton
- Lead time: in-stock units ship within 2 business days; sourced units 5–15 business days
How to Order
- Confirm part number: BALZERS LVM215-5BMO-X17 (or EVA 100 / PA 0021-09718)
- Add to cart or contact us for bulk / project pricing
- Provide your shipping address and preferred freight method
- Receive order confirmation and tracking within 1 business day
📧 support@konmask.com | 📞 +0086 19859288691
Replacement & Compatibility FAQ
Q: Is the EVA 100 (PA 0021-09718) the same as LVM215-5BMO-X17?
A: Yes. These are alternate catalog references for the same BALZERS valve — EVA 100 is the product family name, PA 0021-09718 is the Pfeiffer/BALZERS part number, and LVM215-5BMO-X17 is the model code.
Q: Can I use a VAT 26240-KA11 as a direct replacement?
A: The VAT 26240-KA11 shares the DN100 ISO-K interface and pneumatic actuation, making it a common functional substitute. Verify overall length and actuator port position against your system layout.
Q: What is the lead time for this valve?
A: In-stock units ship within 2 business days. Contact us to confirm current availability.
Q: Do you supply the complete EVA 100 series?
A: Yes. Konmask.com stocks and sources multiple BALZERS / Pfeiffer vacuum valve series. Inquire for DN63, DN160, and other sizes.
Q: Can this valve be repaired or rebuilt?
A: Seal kits and actuator rebuild services are available for select models. Contact our technical team for details.
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Contact: support@konmask.com | +0086 19859288691
