CELERITY DSVAF100 32/900 ATN CEIA 45-A – Precision IN2 Mass Flow Controller | DSVAF Series
Engineering Background
The CELERITY DSVAF100 series represents a mature, field-proven platform engineered for high-accuracy gas delivery in demanding semiconductor fabrication and industrial process environments. Designed to meet the rigorous requirements of OEM tool builders and process engineers, the DSVAF100 delivers repeatable, stable flow control across a wide dynamic range.
Product Positioning
This unit — configured as DSVAF100 32/900 ATN CEIA 45-A for IN2 (Nitrogen) service — is sourced from verified industrial channels and is available for immediate procurement through Konmask.com. It is suited for engineers requiring a drop-in replacement or spare for existing CELERITY-equipped process tools.
Complete Technical Specifications
| Manufacturer | CELERITY (now part of Brooks Instrument) |
| Model / SKU | DSVAF100 32/900 ATN CEIA 45-A |
| Series | DSVAF Series |
| Device Type | Mass Flow Controller (MFC) |
| Process Gas | IN2 – Nitrogen (N₂) |
| Full Scale Range | 32 / 900 sccm (per configuration code) |
| Valve Type | ATN (Normally Closed) |
| Fitting / Port | CEIA 45-A (per model suffix) |
| Control Signal | Analog 0–5 VDC / 4–20 mA (standard DSVAF interface) |
| Accuracy | ±1% F.S. (typical) |
| Repeatability | ±0.2% F.S. |
| Response Time | <2 seconds to 98% F.S. |
| Operating Pressure | Up to 150 psig inlet (typical) |
| Leak Integrity | <1×10⁻⁹ atm·cc/sec He |
| Wetted Materials | 316L SS, Viton / EPDM seals |
| Operating Temperature | 0°C to 50°C ambient |
| Power Supply | ±15 VDC (standard) |
| Connector | 15-pin D-sub (standard CELERITY/Brooks) |
| Weight | ~20 g (controller body; verify with datasheet) |
| Certifications | CE, RoHS compliant (verify per unit) |
Proven Application Environments
- Semiconductor CVD / PECVD / ALD process chambers
- Etch tool gas panels (N₂ purge and carrier gas lines)
- Diffusion furnace nitrogen ambient control
- Industrial gas blending and mixing systems
- R&D laboratory flow calibration benches
- Photovoltaic (PV) thin-film deposition equipment
Engineering Advantages
- Drop-in compatibility: Direct replacement for existing CELERITY DSVAF100-series installations — no re-calibration of the gas panel required when replacing like-for-like.
- Proven thermal sensing: DSVAF platform uses a bypass-type thermal mass flow sensor for long-term drift stability in continuous-duty applications.
- Normally-closed valve (ATN): Fail-safe design ensures gas flow stops on power loss, critical for safety-sensitive process environments.
- Wide dynamic range: 32–900 sccm range covers both low-flow purge and high-flow process steps within a single unit.
- Low dead volume: Compact internal flow path minimizes gas residence time, improving process response.
System Architecture & Signal Flow
The DSVAF100 integrates a thermal bypass mass flow sensor, a proportional control valve, and an onboard PID controller in a single body. Signal flow is as follows:
- Setpoint command received via 0–5 VDC analog input (pin 7 on D-sub connector).
- Thermal sensor measures actual mass flow; signal conditioned by onboard electronics.
- PID loop drives the ATN valve to minimize error between setpoint and actual flow.
- Flow output signal (0–5 VDC) available on pin 9 for real-time monitoring by host controller or MFC readout box.
- Valve override (open/close) available via dedicated pins for purge and emergency shutoff sequences.
Sourcing & Quality Verification
- Units sourced from verified industrial surplus and OEM decommission channels — not grey-market or counterfeit supply.
- Each unit undergoes visual inspection and basic functional screening prior to listing.
- Serial number and date code available upon request for traceability.
- Konmask.com specializes in hard-to-find automation and process control components for semiconductor, energy, and industrial sectors.
- Certificate of conformance (CoC) and test reports available for select units — inquire before purchase.
Procurement Process
- Confirm compatibility: Verify your existing MFC model number, gas service, and connector type match this listing before ordering.
- Request a quote: Contact support@konmask.com for volume pricing, lead time, and availability confirmation.
- Place order: Checkout securely via Konmask.com or request a proforma invoice for bank transfer / corporate PO.
- Shipping: Units shipped with ESD-safe packaging; international export documentation provided upon request.
- After-sales support: Technical questions answered by our engineering team within 1 business day.
Technical FAQ
Q: Is this unit calibrated for N₂ or can it be re-ranged for other gases?
A: This unit is factory-calibrated for IN2 (Nitrogen). Re-ranging for other gases requires recalibration using the appropriate gas conversion factor (GCF). Contact us for recalibration service options.
Q: What is the difference between DSVAF100 and DSVAF200 series?
A: The DSVAF100 is the standard analog interface variant; DSVAF200 typically refers to digital/DeviceNet-enabled configurations. Confirm your tool’s interface requirement before ordering.
Q: Can this MFC be used with corrosive gases?
A: This unit is configured for inert N₂ service. Wetted materials (316L SS, Viton) are not rated for highly corrosive halogen gases. Contact us if you require a corrosive-service variant.
Q: Do you provide a warranty?
A: Konmask.com offers a 30-day functional warranty on all listed units. Extended warranty and exchange programs available — inquire at support@konmask.com.
Q: What connector and cable do I need?
A: Standard CELERITY/Brooks 15-pin D-sub male connector. Mating cables and breakout boxes are available separately — ask our team for compatible accessories.
© 2026 Konmask.com. All rights reserved.
Original Source: https://Konmask.com
Contact: support@konmask.com | +0086 19859288691
