Semiconductor Fab Power Solution – LAM Research 810-234640-312 | Power Supply Module
Where This Product Is Used
The LAM Research 810-234640-312 Power Supply Module is a precision DC power supply designed for use inside LAM Research plasma etch and chemical vapor deposition (CVD) systems. It is commonly found in the following production environments:
- Semiconductor wafer fabrication fabs – 200 mm and 300 mm process lines requiring stable, low-ripple DC power to RF generators and bias circuits
- Plasma etch chambers – Kiyo, Versys, and 2300 series platforms where consistent power delivery is critical to etch uniformity and selectivity
- CVD / PECVD deposition tools – Providing regulated voltage rails to heater controllers, gas flow electronics, and chamber diagnostics
- Equipment refurbishment and spare-parts programs – OEM-equivalent replacement for aging PSU assemblies in installed-base tools
- Semiconductor equipment integrators – System builders sourcing certified sub-assemblies for custom or refurbished etch platforms
Technical Specifications
| Attribute | Detail |
|---|---|
| Part Number | 810-234640-312 |
| Manufacturer | LAM Research Corporation |
| Module Type | Power Supply Module (PSU) |
| Platform Compatibility | LAM Research Etch & CVD Systems (Kiyo, Versys, 2300 Series) |
| Weight | 1,500 g (approx.) |
| Condition Available | Refurbished / Tested / New Surplus |
| Lead Time | Contact for availability |
Full electrical specifications (input voltage range, output rails, ripple, MTBF) available upon request. Contact support@konmask.com.
Why Engineers Specify This Model
- OEM-matched performance – Drop-in replacement maintaining original electrical tolerances; no re-qualification of process recipes required
- Reduced downtime risk – Stocking a spare 810-234640-312 eliminates multi-week OEM lead times during unplanned tool outages
- Tested & verified – Each unit undergoes functional power-on testing and output voltage verification before shipment
- Traceability – Serial number and revision level documented; full inspection report available on request
- Cost efficiency – Refurbished and new-surplus options deliver significant savings vs. new OEM pricing without compromising reliability
Complete System Bill of Materials
Engineers maintaining LAM Research etch tools typically source the following complementary components alongside the 810-234640-312:
- RF Generator Assemblies (LAM Research platform-specific)
- Match Network / Auto-Match Controllers
- Chamber Heater Controllers & Thermocouples
- Gas Flow Controller (MFC) Modules
- Backplane / Interconnect PCBs
- Cooling System Pumps & Chillers
Contact support@konmask.com for bundled BOM sourcing and volume pricing.
Compliance & Industry Standards
- Designed and manufactured to SEMI S2 environmental, health, and safety guidelines for semiconductor manufacturing equipment
- Compatible with SEMI E10 equipment reliability and availability reporting frameworks
- RoHS compliance status available upon request (revision-dependent)
- ESD-safe packaging and handling per ANSI/ESD S20.20
Quality Assurance & Sourcing
Konmask.com sources LAM Research spare parts through authorized secondary-market channels and established refurbishment partners. Our quality process includes:
- Visual inspection and mechanical integrity check upon receipt
- Functional power-on test with output rail verification
- ESD-safe storage and anti-static packaging for shipment
- Photographic documentation available for each unit
- 30-day warranty on refurbished units (terms apply)
How to Source This Part
- Request a Quote – Email support@konmask.com with your required quantity, condition preference (refurbished / new surplus), and target delivery date
- Confirm Availability – Our team will verify stock, revision level, and lead time within 1 business day
- Place Order – Secure checkout via this product page, or request a formal proforma invoice for B2B procurement
- Receive & Inspect – Units ship with inspection report; contact us within 7 days of receipt for any discrepancies
📞 WhatsApp / WeChat: +0086 19859288691
📧 Email: support@konmask.com
Application-Specific FAQ
Q: Is the 810-234640-312 compatible with all LAM Research etch platforms?
A: This PSU is designed for specific LAM Research platforms. Please confirm your tool model and chamber configuration with our team before ordering to ensure revision compatibility.
Q: What is the difference between refurbished and new surplus?
A: Refurbished units have been cleaned, tested, and repaired as needed. New surplus units are unused OEM stock that may have been stored. Both are functionally tested before shipment.
Q: Can you provide a certificate of conformance (CoC)?
A: Yes. A CoC and inspection report are available upon request for all units. Please specify this requirement when placing your order.
Q: Do you offer volume pricing for multiple units?
A: Yes. Contact us directly for volume discounts and blanket order arrangements for ongoing fab maintenance programs.
Q: What is the lead time?
A: Lead time varies by stock availability. In-stock units typically ship within 2–5 business days. Contact us for current availability.
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Contact: support@konmask.com | +0086 19859288691
