Lam Research VME-7671-421000 3VCCPU AHCT CPU Board – 605-048878-001 / 210000520 / 210000422 / 9800032722 with Encoder RH-11D-3001-E100AL-SP(N)
When a semiconductor fab’s etch or CVD process chamber loses its central processing unit board, the entire production line halts. Wafer throughput drops to zero, engineers scramble for a replacement, and every hour of downtime translates directly into six-figure revenue losses. The Lam Research VME-7671-421000 CPU Board is the computational heart of Lam’s VME-based process control architecture — without it, the chamber controller cannot execute recipe steps, manage endpoint detection, or coordinate RF and gas delivery subsystems. There is no workaround; this board must be sourced and restored quickly.
The VME-7671-421000, also cross-referenced as 605-048878-001, carries the 3VCCPU AHCT designation within Lam Research’s VME controller family. It integrates part numbers 210000520, 210000422, and 9800032722 and ships complete with the RH-11D-3001-E100AL-SP(N) encoder module. This board is deployed across Lam’s Transformer Coupled Plasma (TCP) and Kiyo etch platforms — systems that collectively process a significant share of the world’s advanced logic and memory wafers. Its VME64 bus architecture ensures deterministic real-time control, a non-negotiable requirement in high-mix semiconductor manufacturing environments.
Technical Specifications
- Part Number: VME-7671-421000
- Cross Reference: 605-048878-001
- Board Designation: 3VCCPU AHCT
- Associated Part Numbers: 210000520 / 210000422 / 9800032722
- Included Module: Encoder RH-11D-3001-E100AL-SP(N)
- Form Factor: VME (Versa Module Europa) Bus Board
- Manufacturer: Lam Research Corporation
- Product Category: CPU / Controller Board
- Weight: 2.6 kg (as configured)
- Condition Available: Refurbished / Tested / Surplus
Key Features & Benefits
- Real-Time Process Control: VME64 bus architecture delivers deterministic, low-latency command execution critical for plasma etch recipe management.
- Integrated Encoder Interface: Ships with RH-11D-3001-E100AL-SP(N) encoder, eliminating the need for separate sourcing of motion feedback components.
- Multi-PN Compatibility: Covers cross-references 210000520, 210000422, and 9800032722, maximizing interchangeability across Lam platform generations.
- 3.3V AHCT Logic: Advanced High-speed CMOS Technology (AHCT) logic family ensures reliable signal integrity in electrically noisy fab environments.
- Drop-In Replacement: Designed for direct swap into existing Lam VME chassis without firmware re-flashing in most configurations.
- Rapid Downtime Recovery: Stocked and ready to ship, enabling same-day or next-day dispatch to minimize mean time to repair (MTTR).
Industry & Equipment Applications
- Semiconductor Fabrication: Lam Research TCP Etch systems, Kiyo Etch platforms, and Flex series process chambers.
- Advanced Logic & Memory: DRAM, NAND Flash, and leading-edge logic node (sub-10nm) wafer processing lines.
- Flat Panel Display (FPD) Manufacturing: Large-area plasma etch equipment using Lam VME controller architecture.
- R&D & Pilot Lines: University and corporate research fabs maintaining legacy Lam equipment for process development.
- Equipment Refurbishment: Third-party refurbishers and used equipment dealers restoring Lam systems for resale.
System Integration & Compatible Parts
The VME-7671-421000 operates within Lam Research’s VME-based controller chassis. Compatible and commonly co-ordered parts include VME backplane assemblies, I/O interface boards, RF match network controllers, and gas delivery control modules within the same Lam VME controller family. When replacing this CPU board, verify the firmware revision level matches your chamber’s software baseline. Konmask.com can assist with cross-referencing compatible peripheral boards upon request.
Our Quality Assurance Process
- Visual Inspection: All boards are inspected for physical damage, burnt components, corrosion, and connector integrity before listing.
- Functional Verification: Where test fixtures are available, boards undergo power-on and functional testing to confirm operational status.
- ESD-Safe Handling: All components are handled, stored, and shipped using anti-static packaging in compliance with ANSI/ESD S20.20 standards.
- Accurate Labeling: Every unit is labeled with its verified part number, cross-references, and condition grade before shipment.
- Traceability: Sourcing records are maintained for each unit to support customer audit requirements.
How to Order
- Submit an inquiry via the Contact Us form or email [email protected] with your required part number and quantity.
- Our technical team will confirm availability, condition grade, and lead time within 24 business hours.
- Receive a formal quotation with shipping options (DHL / FedEx / UPS Express available for urgent orders).
- Confirm the order and complete payment via T/T bank transfer or other agreed terms.
- Unit is dispatched with full documentation including packing list and inspection report.
Why Choose Konmask.com?
- Industrial Automation Specialists: We focus exclusively on PLC, DCS, VME, and process control components — not a general electronics marketplace.
- Global B2B Supply: Serving semiconductor fabs, system integrators, and MRO teams across Asia, Europe, and the Americas.
- Technical Support: Our team includes engineers with hands-on experience in Lam Research and other OEM platforms.
- Fast Response: Inquiries answered within 24 hours; urgent RFQs prioritized.
- Secure Packaging & Export Compliance: All shipments are properly packed and documented for international customs clearance.
Frequently Asked Questions
Q: Is the VME-7671-421000 the same as 605-048878-001?
A: Yes. 605-048878-001 is Lam Research’s internal cross-reference for the VME-7671-421000 CPU board. Both numbers refer to the same assembly.
Q: What Lam Research systems use this CPU board?
A: This board is used in Lam Research VME-based controller chassis, commonly found in TCP Etch, Kiyo Etch, and related plasma process platforms.
Q: Does the unit include the encoder module?
A: Yes. This listing covers the complete assembly including the RH-11D-3001-E100AL-SP(N) encoder as indicated in the part description.
Q: What is the lead time?
A: In-stock units typically ship within 1–3 business days after order confirmation. Contact us for current availability.
Q: Can you provide a test report or inspection certificate?
A: Yes. An inspection report is included with every shipment. Additional third-party test certification can be arranged upon request.
Q: Do you accept returns?
A: We handle returns on a case-by-case basis. Please contact [email protected] within 7 days of receipt if there is an issue with your order.
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