LAM RESEARCH DGF 710-031325-002 IGS Motherboard | Replacement, Equivalent & Selection Guide
The LAM RESEARCH DGF 710-031325-002 (also referenced as 810-031325-002, 716-443129-001, and 10320294) is a high-reliability 16-channel IGS Motherboard designed for use in LAM Research semiconductor etch and deposition systems. Konmask.com specializes in sourcing, verifying, and supplying this board for MRO, spare-parts, and system-upgrade applications worldwide.
Technical Specifications
- Manufacturer: LAM RESEARCH Corporation
- Primary Part Number: DGF 710-031325-002
- Alternate / Cross-Reference P/Ns: 810-031325-002 · 716-443129-001 · 10320294 · 810-UNV
- Board Type: IGS (Integrated Gas System) Motherboard
- Channel Count: 16
- Form Factor: Industrial PCB Assembly
- Weight: ~2,600 g
- Condition Available: Refurbished / Tested / New Surplus
- Warranty: 90-day functional warranty (Konmask standard)
Compatible Replacement & Equivalent Models
The following part numbers are confirmed cross-references or functional equivalents for the DGF 710-031325-002. Always verify firmware revision and connector pinout before substitution.
- 810-031325-002 — LAM RESEARCH factory alternate P/N (same assembly, different catalog prefix)
- 716-443129-001 — Sub-assembly board reference used in certain LAM system revisions
- 10320294 — Legacy internal tracking number; functionally identical
- 810-UNV — Universal-variant designation; confirm channel count before ordering
Note: Cross-reference compatibility is based on publicly available LAM RESEARCH service documentation. Konmask.com recommends engineering verification for safety-critical applications.
Why Choose the Original Model
- Firmware Integrity: Factory-programmed firmware ensures full compatibility with LAM system controllers without re-flashing.
- Connector Precision: OEM-spec connectors eliminate fitment issues common with third-party alternatives.
- Validated Signal Timing: 16-channel IGS timing is calibrated to LAM’s gas-delivery sequencing requirements.
- Traceability: Original boards carry LAM RESEARCH serialization for audit and compliance purposes.
Typical Applications
- LAM Research Kiyo / Flex / Versys etch chamber gas-delivery control
- Integrated Gas System (IGS) motherboard replacement in fab MRO programs
- Spare-parts inventory for semiconductor wafer fabrication facilities
- System refurbishment and capacity-expansion projects
- University and R&D lab equipment maintenance
System Compatibility
- LAM Research Kiyo series etch systems
- LAM Research Flex series dielectric etch platforms
- LAM Research Versys Metal etch systems
- LAM Research 2300 series process modules (verify revision)
- Third-party IGS retrofit systems using LAM-compatible backplane (engineering review required)
Selection Guide
Use the checklist below to confirm the correct part before ordering:
- ✅ Confirm your system model and IGS backplane revision from the LAM service manual.
- ✅ Match the primary P/N (710-031325-002) or an accepted cross-reference listed above.
- ✅ Verify channel count = 16; do not substitute an 8-channel or 32-channel board.
- ✅ Check firmware version compatibility with your system controller software.
- ✅ Confirm connector type (J1–J4 header configuration) matches your chassis.
- ✅ For refurbished units, request the test report and burn-in certification from Konmask.
Not sure which part fits your system? Contact our engineering team with your system serial number for a free compatibility check.
Quality Assurance & Sourcing
- Source: Decommissioned fab equipment, authorized surplus channels, and certified refurbishers.
- Inspection: Visual inspection + functional power-on test + 48-hour burn-in on all refurbished units.
- Packaging: ESD-safe anti-static bag + foam-lined carton; compliant with JEDEC J-STD-033.
- Documentation: Certificate of conformance and test report available on request.
- Export Compliance: ECCN classification reviewed; export license obtained where required.
How to Order
- Add the item to your cart and proceed to checkout, or
- Email [email protected] with your P/N, quantity, and required condition (new surplus / refurbished / tested).
- For bulk orders (>3 units) or urgent fab-down situations, call +0086 19859288691 for priority handling.
- Lead time: In-stock units ship within 1–3 business days; sourced units 5–15 business days.
- Payment: T/T wire transfer, PayPal, credit card (Visa/MC/Amex) accepted.
Replacement & Compatibility FAQ
Q: Can 810-031325-002 directly replace 710-031325-002?
A: Yes. The 810- prefix is LAM RESEARCH’s alternate catalog designation for the same physical assembly. No modification is required.
Q: Is 716-443129-001 a drop-in replacement?
A: In most LAM system revisions, yes. However, verify the J3 connector pinout on your chassis before installation, as early-revision systems may differ.
Q: What is the difference between DGF and non-DGF variants?
A: DGF (Digital Gas Flow) designates boards with integrated digital flow-control logic. Non-DGF boards use analog control and are not interchangeable.
Q: Do you offer exchange / core-return pricing?
A: Yes. Send your defective unit as a core return and receive a discount on the replacement. Contact us for core-return terms.
Q: Can this board be repaired instead of replaced?
A: Board-level repair is available for select failure modes. Contact our technical team with your fault description for a repair feasibility assessment.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691


