Tokyo Electron TF906276-001 414713-001 Pin Base Assembly | Replacement, Equivalent & Selection Guide
The Tokyo Electron (TEL) TF906276-001 (cross-reference: 414713-001, assembly code 0010-33417) is a precision Pin Base Assembly designed for TEL semiconductor process modules. Measuring 480 mm × 190 mm, this component is engineered for PM P02 360 TMH 064 chamber configurations and is critical to wafer-lift and pin-alignment functions in CVD, PVD, and etch process equipment.
Technical Specifications
| Parameter | Value |
|---|---|
| Part Number (Primary) | TF906276-001 |
| Cross Reference | 414713-001 |
| Assembly Code | 0010-33417 |
| Description | Pin Base Assembly |
| Dimensions | 480 mm × 190 mm |
| Chamber Compatibility | PM P02 360 TMH 064 |
| Manufacturer | Tokyo Electron (TEL) |
| Weight | Approx. 2.6 kg |
| Material | Precision-machined aluminum / anodized alloy (OEM spec) |
| Application | Wafer lift pin support, process module base alignment |
Compatible Replacement & Equivalent Models
The following part numbers are known cross-references or functional equivalents for the TF906276-001. Always verify dimensional and electrical compatibility before substitution:
- 414713-001 — TEL internal cross-reference (same assembly, alternate catalog number)
- 0010-33417 — TEL assembly/build code used in BOM documentation
- Third-party OEM-compatible pin base assemblies matching 480 mm × 190 mm footprint for TEL TMH 064 chambers
Need help confirming compatibility? Contact our engineering team at [email protected].
Why Choose the Original TF906276-001
- OEM Precision: Manufactured to Tokyo Electron’s exact tolerances for PM P02 360 TMH 064 chambers
- Process Stability: Ensures repeatable wafer positioning and minimizes particle contamination risk
- Certified Traceability: Full OEM part traceability for fab qualification and audit compliance
- Drop-in Fit: No modification required — direct replacement for worn or failed pin base assemblies
- Longevity: OEM materials and surface treatment extend service intervals vs. generic alternatives
Typical Applications
- TEL Trias / Triase+ CVD process chambers
- TEL Vigus / Tactras etch module PM assemblies
- Wafer lift pin base replacement during PM (preventive maintenance) cycles
- Semiconductor fab equipment refurbishment and spare parts inventory
- 300 mm wafer process tool upgrades and retrofits
System Compatibility
- Chamber Type: PM P02 360 TMH 064
- Wafer Size: 300 mm (12-inch) process tools
- TEL Platform: Compatible with TEL systems utilizing TMH 064 transfer module hardware
- Integration: Works with standard TEL lift-pin actuator and guide-pin assemblies
For system-level compatibility verification, provide your tool model and chamber ID when contacting us.
Selection Guide
Use the checklist below to confirm the correct part for your application:
- ✅ Confirm chamber designation: PM P02 360 TMH 064
- ✅ Verify footprint: 480 mm × 190 mm
- ✅ Match cross-reference: TF906276-001 / 414713-001 / 0010-33417
- ✅ Check wafer size: 300 mm process tool
- ✅ Confirm OEM vs. compatible-grade requirement for your fab qualification standard
If your chamber model differs or you need a compatible-grade alternative, contact us with your tool serial number for a tailored recommendation.
Quality Assurance & Sourcing
- Source: Sourced from authorized TEL distributors and certified refurbishment channels
- Inspection: Each unit undergoes dimensional verification and visual inspection prior to shipment
- Packaging: ESD-safe, cleanroom-compatible packaging to prevent contamination in transit
- Documentation: Certificate of conformance and traceability documentation available on request
- Warranty: 90-day warranty against manufacturing defects (OEM units); contact us for refurbished-grade terms
How to Order
- Add the TF906276-001 to your cart and proceed to checkout
- For bulk orders (>3 units) or urgent fab requirements, email [email protected] for a dedicated quote
- Provide your shipping address and preferred freight method (DHL / FedEx / sea freight available)
- Lead time: In-stock units ship within 1–3 business days; special-order units 7–15 business days
- Payment: T/T bank transfer, PayPal, and major credit cards accepted
Replacement & Compatibility FAQ
Q: Is 414713-001 the same as TF906276-001?
A: Yes. 414713-001 is an alternate TEL catalog number for the same Pin Base Assembly. Both part numbers refer to the identical component.
Q: Can I use a third-party compatible pin base assembly?
A: Compatible-grade alternatives are available for cost-sensitive applications. Contact us to discuss OEM vs. compatible options and their qualification implications.
Q: What is the typical replacement interval for this assembly?
A: TEL recommends inspection every 500,000 wafer passes or per your fab’s PM schedule. Replace immediately if pin height deviation exceeds OEM tolerance.
Q: Do you provide installation support?
A: We provide part documentation and can connect you with certified TEL field service engineers. Contact us for details.
Q: Is this part available for export?
A: Yes. We ship globally. Export compliance documentation is available for controlled-technology jurisdictions upon request.
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