Tokyo Electron 5085-404901-11 LITHIUS PRA ASSY – 12-Inch Wafer Pre-Aligner Assembly for TEL LITHIUS Coater/Developer Track Systems
When a pre-aligner assembly fails mid-production on a 12-inch wafer track, the consequences are immediate and severe: wafers mis-seat on the chuck, photolithography layers fall out of registration, and entire lots face scrapping. In high-volume fabs running 24/7, even a two-hour unplanned downtime event can cost hundreds of thousands of dollars. The Tokyo Electron 5085-404901-11 LITHIUS PRA ASSY is the OEM-specified replacement module that restores precise wafer orientation and keeps your LITHIUS track running at full throughput.
The LITHIUS series represents Tokyo Electron’s flagship coater/developer platform for 300mm (12-inch) wafer processing, widely deployed across leading logic, memory, and foundry fabs globally. The PRA (Pre-Aligner Assembly) module — cross-referenced as 2910-202413-12, 404200XRMPD2H14, and 7-249717 — is a precision mechatronic sub-assembly responsible for wafer edge detection and rotational alignment prior to coating or developing steps. Its accuracy directly determines overlay performance across the entire lithography stack.
Technical Specifications
- OEM Part Number: 5085-404901-11
- Cross-Reference Numbers: 2910-202413-12 / 404200XRMPD2H14 / 7-249717
- Assembly Name: LITHIUS PRA ASSY (Pre-Aligner Assembly)
- Compatible Platform: Tokyo Electron LITHIUS Series Coater/Developer Track
- Wafer Size: 12-Inch (300mm)
- Manufacturer: Tokyo Electron Limited (TEL)
- Component Weight: 150g (module only)
- Condition: New / Refurbished / Used — specify at inquiry
Key Features & Benefits
- OEM-Matched Precision: Manufactured to TEL’s original mechanical and electrical tolerances, ensuring drop-in compatibility with LITHIUS track systems without recalibration overhead.
- Multi-Reference Traceability: Carries four cross-reference part numbers (5085-404901-11, 2910-202413-12, 404200XRMPD2H14, 7-249717), simplifying procurement across different fab BOM systems.
- 300mm Wafer Optimized: Designed exclusively for 12-inch wafer handling, meeting the tight edge-grip and notch/flat detection requirements of advanced node lithography.
- Reduced Downtime Risk: Stocking this assembly as a critical spare eliminates extended lead-time exposure during emergency maintenance windows.
- Broad Fab Compatibility: Suitable for LITHIUS Pro, LITHIUS Pro+, and related TEL track variants deployed in logic, DRAM, NAND, and foundry environments.
Industry & Equipment Applications
- 300mm semiconductor fabs (logic, DRAM, NAND Flash, foundry)
- Tokyo Electron LITHIUS series coater/developer track systems
- Photolithography process modules requiring pre-alignment before coat or develop steps
- Advanced packaging and wafer-level packaging (WLP) lines using TEL track equipment
- Fab maintenance, engineering, and spare parts programs (PPM/PM kits)
System Integration & Compatible Parts
The 5085-404901-11 PRA ASSY integrates within the TEL LITHIUS track’s wafer handling subsystem. When sourcing this module, consider also reviewing related assemblies and consumables for your LITHIUS platform, including edge-grip pads, wafer chuck components, and track controller interface boards. Konmask.com maintains an expanding catalog of TEL LITHIUS spare parts — contact our team for a full compatibility cross-reference for your specific track configuration.
Our Quality Assurance Process
- Part Number Verification: Every unit is verified against OEM documentation before shipment — part numbers, revision levels, and cross-references are confirmed.
- Visual & Functional Inspection: All assemblies undergo visual inspection for mechanical integrity; refurbished units receive functional testing where applicable.
- Secure Packaging: ESD-safe packaging with anti-static bags and foam cushioning to protect sensitive mechatronic components during international transit.
- Documentation: Certificate of conformance and inspection report available upon request.
How to Order
- Submit an inquiry via the Contact Us page or email support@konmask.com with your required quantity and delivery timeline.
- Our team will confirm stock availability, condition grade, and lead time within 1 business day.
- Receive a formal quotation with pricing, shipping options, and payment terms.
- Confirm order and receive tracking information upon dispatch.
Why Choose Konmask.com?
- Semiconductor Equipment Specialization: We focus exclusively on industrial automation and semiconductor equipment spare parts — not a generalist marketplace.
- Global Sourcing Network: Access to OEM, refurbished, and hard-to-find components across TEL, AMAT, Lam Research, ASML, and other major OEMs.
- B2B Inquiry-First Model: We work directly with fab engineers, procurement teams, and equipment managers — no retail friction, just fast, accurate quotes.
- Export Compliance: Experienced in international shipping documentation for semiconductor components across Asia, Europe, and the Americas.
- Responsive Support: Dedicated account managers for ongoing spare parts programs and emergency procurement needs.
Frequently Asked Questions
- Q: Is the 5085-404901-11 compatible with all LITHIUS track variants?
- A: This PRA ASSY is designed for the TEL LITHIUS series 12-inch track platform. Compatibility may vary by specific track generation and configuration. Please provide your track model and software version when inquiring for confirmation.
- Q: What condition grades are available?
- A: We can source new (OEM), certified refurbished, and used/tested units depending on availability. Condition grade and inspection details are disclosed in the quotation.
- Q: What is the typical lead time?
- A: Lead time varies by stock availability. In-stock units typically ship within 3–5 business days internationally. For out-of-stock items, sourcing lead time is quoted individually.
- Q: Can you provide a certificate of conformance?
- A: Yes. A certificate of conformance and inspection report are available upon request for all shipments.
- Q: Do you accept returns or offer a warranty?
- A: Warranty terms are specified per order based on condition grade. Please contact us for details applicable to your specific purchase.
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