Vacuum Isolation Solution – VAT 0200X-ZE24-1011 80-S09/S10 | Series 02 Slide Valve
Where This Product Is Used
The VAT 0200X-ZE24-1011 Slide Valve Assembly is engineered for high-vacuum process isolation in demanding industrial and semiconductor environments. Typical deployment scenarios include:
- Semiconductor Wafer Fabrication – Gate isolation between process chambers and transfer modules in CVD, PVD, and etch systems
- Flat Panel Display (FPD) Manufacturing – Vacuum load-lock and cluster tool isolation valves
- Solar Cell Production Lines – PECVD and sputtering chamber isolation
- Industrial Vacuum Furnaces – High-temperature process chamber sealing
- Research & Analytical Instruments – Mass spectrometers, electron microscopes, and surface analysis systems
- Thin-Film Coating Equipment – Substrate handling and chamber segmentation
Technical Specifications
| Parameter | Value |
|---|---|
| Manufacturer Part Number | 0200X-ZE24-1011 |
| Variant / Config Code | 80-S09/S10 |
| Cross-Reference PN | 0190-18154 / ABX-X302 / 722A11TGA3FC |
| Assembly Type | Slide Valve Assembly (ASSY) |
| Brand / OEM | VAT Group AG |
| Series | VAT Series 02 – Rectangular Vacuum Gate Valve |
| Actuation | Pneumatic (ZE24 actuator code) |
| Nominal Size | 80 mm |
| Leak Rate | < 1 × 10⁻⁹ mbar·l/s (He) |
| Operating Pressure Range | Atmosphere to 10⁻⁸ mbar |
| Seal Material | Fluoroelastomer (FKM) / Metal seal options |
| Body Material | Anodized Aluminum Alloy |
| Weight | 360 g |
| Condition | New / Refurbished OEM-Grade Available |
Why Engineers Specify This Model
- Ultra-High Vacuum Integrity – Helium leak rate < 1×10⁻⁹ mbar·l/s ensures contamination-free process isolation
- Pneumatic Actuation (ZE24) – Fast, repeatable open/close cycles compatible with PLC and DCS control architectures
- Compact 80 mm Gate – Optimized footprint for cluster tool and load-lock integration without sacrificing conductance
- Multi-PN Compatibility – Direct replacement for 0190-18154, ABX-X302, and 722A11TGA3FC across multiple OEM platforms
- VAT Group Pedigree – VAT is the global benchmark for vacuum valves; this assembly meets OEM performance standards
- Reduced Downtime – Drop-in ASSY format minimizes field replacement time versus component-level repair
Complete System Bill of Materials
For a fully operational vacuum isolation circuit using this valve, engineers typically specify:
- VAT 0200X-ZE24-1011 Slide Valve Assembly (this unit)
- Pneumatic supply line: 5–8 bar clean dry air or N₂
- Solenoid pilot valve (24 VDC, 3/2-way) – e.g., VAT Series 65 or equivalent
- Position feedback sensor (open/close reed switch or proximity sensor)
- PLC digital output module for valve control signal
- Vacuum-compatible flange gaskets (ISO-KF or CF per installation)
- Mounting hardware: M5 stainless steel fasteners
Compliance & Industry Standards
- Designed and manufactured to ISO 3529 vacuum technology terminology standards
- Compatible with SEMI S2 environmental, health, and safety guidelines for semiconductor equipment
- RoHS compliant materials
- CE marking applicable per EU Machinery Directive 2006/42/EC
- Traceable manufacturing documentation available upon request
Quality Assurance & Sourcing
Every VAT slide valve assembly shipped by Konmask.com undergoes the following verification process:
- Visual and dimensional inspection against OEM drawings
- Helium leak test to confirm vacuum integrity (< 1×10⁻⁹ mbar·l/s)
- Pneumatic actuation cycle test (minimum 10 open/close cycles)
- Part number and serial number cross-verification
- Anti-static packaging with desiccant for long-term storage protection
We source directly from authorized VAT distributors and certified surplus channels. All units are accompanied by a Konmask inspection report.
How to Source This Part
To place an order or request a quote for the VAT 0200X-ZE24-1011 80-S09/S10 Slide Valve Assembly:
- Online: Add to cart directly on this page
- Email RFQ: [email protected] – include your required quantity, delivery timeline, and any certification requirements
- Phone / WhatsApp: +0086 19859288691
- Lead Time: In-stock units ship within 2 business days; special configurations quoted within 24 hours
- MOQ: 1 piece
Application-Specific FAQ
Q: Is this valve compatible with my Applied Materials (AMAT) system?
A: The cross-reference PN 0190-18154 is an AMAT-format part number. This assembly is designed as a direct replacement for AMAT platforms using this specification. Please confirm your system model before ordering.
Q: Can this valve be used with corrosive process gases?
A: The standard FKM seal is suitable for most process gases. For highly corrosive environments (HF, Cl₂, etc.), please contact us to discuss metal-seal or FFKM-seal variants.
Q: What PLC I/O type is required to control the ZE24 pneumatic actuator?
A: The ZE24 actuator is controlled via a 24 VDC solenoid pilot valve. A standard digital output (DO) module on any major PLC platform (Siemens, Allen-Bradley, Mitsubishi, Omron) is sufficient.
Q: Do you offer exchange / core return programs?
A: Yes. Contact us for details on our exchange program for failed VAT valve assemblies.
Q: What is the expected service life?
A: VAT rates this series at > 1,000,000 actuation cycles under normal operating conditions with proper maintenance intervals.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
