VAT 0750X-VE24 – Atmospheric Door L-VAT Valve Actuator | L-VAT Series
Engineering Background
VAT Group AG is the world’s leading manufacturer of high-performance vacuum valves and systems, headquartered in Haag, Switzerland. VAT valves are the de facto standard in semiconductor fab, flat-panel display, solar, and advanced coating processes where contamination control and cycle-life reliability are non-negotiable.
Product Positioning
The VAT 0750X-VE24 (P/N 949-608-00) is a pneumatically actuated atmospheric door valve from VAT’s L-VAT series, designed for load-lock chamber isolation in cluster tool architectures. Cross-reference part numbers: LA608, C2148, P166/64, 8COM, 02-116798-00. It delivers repeatable, particle-free sealing at atmospheric pressure differentials, making it the preferred choice for wafer transfer gate applications in 200 mm and 300 mm process equipment.
Complete Technical Specifications
- Manufacturer: VAT Group AG (Switzerland)
- Part Number: 0750X-VE24 / 949-608-00
- Cross-Reference: LA608 | C2148 | P166/64 | 8COM | 02-116798-00
- Series: L-VAT Atmospheric Door Valve
- Actuation: Pneumatic (24 VDC solenoid, VE24)
- Valve Type: Atmospheric Door / Gate Valve
- Operating Pressure Range: Atmospheric to rough vacuum (≥ 1 × 10⁻³ mbar)
- Leak Rate: ≤ 1 × 10⁻⁸ mbar·l/s (He, per VAT standard)
- Seal Material: Fluoroelastomer (FKM) / Viton®
- Body Material: Hard-anodized aluminum alloy
- Actuation Voltage: 24 VDC
- Cycle Life: ≥ 5,000,000 cycles (per VAT qualification data)
- Weight: ~800 g
- Mounting: Flange-mount, compatible with standard cluster tool load-lock interfaces
- Condition Available: New OEM / Tested Refurbished / Exchange
Proven Application Environments
- Semiconductor wafer load-lock chamber isolation (200 mm / 300 mm fabs)
- CVD, PVD, ALD, and etch cluster tool transfer modules
- Flat-panel display (FPD) deposition systems
- Solar cell PECVD and sputtering equipment
- Advanced packaging and MEMS process tools
- Research-grade ultra-high vacuum (UHV) systems
Engineering Advantages
- Zero-particle design: Guided door motion eliminates lateral seal scrubbing, preventing particulate generation during wafer transfer.
- Fast cycle time: Pneumatic actuation delivers <1 s open/close response, maximizing throughput in high-volume production.
- Long MTBF: VAT’s proprietary seal geometry and hard-anodized body extend mean time between failures beyond 5 million cycles.
- Drop-in replacement: Dimensional and interface compatibility with original OEM specifications — no tooling changes required.
- Broad media compatibility: FKM seals resist aggressive process gases including halogens, oxidizers, and fluorine-based chemistries.
System Architecture & Signal Flow
The 0750X-VE24 integrates into cluster tool I/O via a 24 VDC solenoid pilot signal. The pneumatic actuator drives the door plate along a precision linear guide, pressing the FKM seal against the valve seat under controlled force. Position feedback (open/closed) is provided by integrated reed switches or proximity sensors (configuration-dependent). The valve interfaces with the equipment controller via standard M12 or flying-lead connectors.
Signal path: Equipment PLC/Controller → 24 VDC solenoid coil → Pneumatic pilot → Actuator cylinder → Door plate → FKM seal engagement → Chamber isolation confirmed.
Sourcing & Quality Verification
- All units sourced through authorized VAT distribution channels or certified refurbishment partners.
- New OEM units ship with original VAT packaging, serialization, and certificate of conformance.
- Refurbished units undergo full leak-rate testing (He mass spectrometer), cycle verification, and dimensional inspection prior to shipment.
- Traceability documentation available upon request (lot number, test report, CoC).
- Export compliance: ECCN EAR99 (verify applicability for your jurisdiction).
Procurement Process
- Submit your RFQ via Konmask.com/contact or email [email protected].
- Receive lead time, condition, and pricing confirmation within 1 business day.
- Review and approve proforma invoice.
- Payment processed; unit reserved and prepared for shipment.
- Shipping via DHL Express / FedEx International Priority with full tracking and commercial invoice.
- Post-delivery technical support available from our engineering team.
Technical FAQ
Q: Is the 0750X-VE24 compatible with my existing cluster tool without modification?
A: In most cases, yes. The L-VAT series maintains consistent flange dimensions and solenoid interface across production runs. Confirm your OEM part number against our cross-reference list before ordering.
Q: What is the difference between 949-608-00 and other VAT 0750X sub-variants?
A: The suffix denotes specific seal material, actuator voltage, and port configuration. 949-608-00 specifies 24 VDC actuation (VE24) with standard FKM seals. Contact us if you require an alternative configuration.
Q: Can you supply a test report for refurbished units?
A: Yes. All refurbished units include a helium leak test report and cycle count verification. Request documentation at the time of order.
Q: What is the typical lead time?
A: New OEM units: 4–12 weeks (subject to VAT factory availability). Refurbished/exchange units: 3–7 business days from stock.
Q: Do you accept trade-in / exchange of failed units?
A: Yes. Contact us to discuss exchange pricing and core return logistics.
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