Applied Materials 0040-92503 / 0020-31732 CDN496RC RF Electrode FEOL Small RF 300MM – Front-End-of-Line RF Power Delivery Component
When a 300mm FEOL etch or CVD chamber loses its RF electrode, the entire process line stops. Plasma uniformity collapses, wafer-to-wafer repeatability fails, and every hour of downtime translates directly into yield loss and missed delivery commitments. The Applied Materials part number 0040-92503 (alternate: 0020-31732, CDN code: CDN496RC) is the precision RF electrode designed to restore and maintain the exacting plasma conditions that advanced semiconductor fabrication demands.
Within the Applied Materials FEOL chamber ecosystem, the 0040-92503 Small RF Electrode occupies a critical position in the RF power delivery stack. Cross-referenced to MKS Instruments AS01496-0-3 (also listed as 0190-34283), this component bridges two of the most trusted names in semiconductor capital equipment. It is widely deployed in 300mm logic and memory fabs across Asia, North America, and Europe, making it one of the most actively sourced consumable/spare parts in the global semiconductor supply chain.
Technical Specifications
- OEM Part Number: 0040-92503
- Alternate Part Number: 0020-31732
- CDN Code: CDN496RC
- Cross-Reference (MKS): AS01496-0-3 / 0190-34283
- Description: RF Electrode, FEOL, Small RF, 300MM
- Wafer Size Compatibility: 300mm
- Process Stage: Front-End-of-Line (FEOL)
- Component Type: Small RF Electrode
- Weight: 360 g
- OEM Brand: Applied Materials / MKS Instruments
- Condition: New / Refurbished (specify on inquiry)
Key Features & Benefits
- Dual OEM Traceability: Sourced against both Applied Materials and MKS Instruments part numbers, ensuring full cross-reference compatibility for your procurement and MRO systems.
- Plasma Uniformity Restoration: Precision-machined electrode geometry maintains the RF field distribution required for tight CD (critical dimension) control in FEOL etch and deposition processes.
- 300mm Platform Ready: Engineered specifically for 300mm wafer processing chambers, compatible with high-volume production environments.
- Reduced Downtime Risk: Stocked and ready to ship, minimizing the mean time to repair (MTTR) for unplanned chamber outages.
- Rigorous Incoming Inspection: Every unit passes dimensional verification and surface condition checks before dispatch.
Industry & Equipment Applications
- 300mm FEOL Etch Chambers (Applied Materials platforms)
- CVD / PECVD Process Chambers requiring RF power delivery components
- Logic device fabs (sub-28nm nodes)
- DRAM and NAND Flash memory manufacturing lines
- Advanced packaging and compound semiconductor fabs
- Semiconductor equipment refurbishment and resale operations
System Integration & Compatible Parts
The 0040-92503 RF electrode is typically used alongside other Applied Materials chamber consumables and RF delivery components. When sourcing this part, buyers often also require:
- RF match networks and associated hardware (MKS / Advanced Energy)
- Chamber liner and focus ring assemblies for 300mm platforms
- Electrostatic chuck (ESC) components
- Gas distribution plates and showerhead assemblies
Contact Konmask.com to discuss bundled sourcing for complete chamber rebuild kits.
Our Quality Assurance Process
- Step 1 – Source Verification: Parts are sourced from authorized distributors, OEM surplus channels, or certified refurbishers with documented chain of custody.
- Step 2 – Incoming Inspection: Visual inspection, dimensional check, and surface condition assessment against OEM specifications.
- Step 3 – Documentation: Each shipment is accompanied by a packing list, part number confirmation, and condition report.
- Step 4 – Secure Packaging: Anti-static and protective packaging to prevent transit damage to precision surfaces.
- Step 5 – Post-Sale Support: Our technical team is available to assist with installation queries and cross-reference confirmation.
How to Order
- Submit your RFQ via the Contact / Inquiry form on this page, or email [email protected].
- Provide your required quantity, preferred condition (new or refurbished), and target delivery timeline.
- Our sourcing team will respond with availability, lead time, and a formal quotation within 1 business day.
- Upon PO confirmation, we arrange export documentation and international shipping to your facility.
Why Choose Konmask.com?
- Industrial Automation & Semiconductor Focus: We specialize exclusively in industrial control and semiconductor equipment components — no generalist catalog noise.
- Global Sourcing Network: Direct relationships with OEM surplus channels and certified distributors across Asia, Europe, and North America.
- B2B Inquiry-First Model: We work on your timeline and volume requirements, not off-the-shelf retail constraints.
- Export Expertise: Experienced in international trade documentation, customs compliance, and multi-modal logistics for sensitive electronic components.
- Technical Competence: Our team understands the application context — we speak your engineering language.
Frequently Asked Questions
Q: Is the 0040-92503 the same as 0020-31732?
A: Yes. Both are Applied Materials part numbers for the same RF Electrode FEOL Small RF 300MM assembly. 0020-31732 is an alternate or superseded part number. CDN496RC is the CDN catalog reference for the same item.
Q: What is the MKS cross-reference for this part?
A: The MKS Instruments equivalent is AS01496-0-3, also listed as 0190-34283. This cross-reference is commonly used when sourcing through MKS distribution channels.
Q: Do you supply new or refurbished units?
A: We can supply both, subject to availability. Please specify your preference in your RFQ. All units — regardless of condition — undergo our incoming inspection process.
Q: What is the typical lead time?
A: Lead time varies by stock availability. In-stock items typically ship within 3–5 business days after PO confirmation. For sourced items, lead time is quoted individually.
Q: Can you provide export documentation for international shipments?
A: Yes. We provide commercial invoices, packing lists, and can assist with other export documentation requirements. Contact us to discuss your specific compliance needs.
Q: What chambers is this electrode compatible with?
A: This part is designed for Applied Materials 300mm FEOL process chambers. Please confirm your specific chamber model with our technical team to ensure fitment.
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