NOVELLUS PVD300 17-307113-00 / 2301407-B / SM2315D-BRK / 02-306362-00 Shield Pedestal AL Grit CU – PVD300 Physical Vapor Deposition Series
When a Shield Pedestal fails mid-process in a PVD sputtering chamber, the consequences are immediate and costly: uncontrolled particle contamination, wafer yield loss, unplanned chamber vents, and extended downtime that can cascade across an entire fab line. In high-throughput semiconductor manufacturing, every unscheduled stop translates directly into lost revenue and compromised device quality. The NOVELLUS PVD300 Shield Pedestal AL Grit CU (Part Numbers: 17-307113-00 / 2301407-B / SM2315D-BRK / 02-306362-00) is the precision-engineered consumable that keeps your deposition process stable, your chamber clean, and your yields protected.
Within the NOVELLUS PVD300 platform — one of the most widely deployed physical vapor deposition systems in global semiconductor fabs — this Shield Pedestal occupies a critical position in the process kit hierarchy. Its aluminum substrate with grit-blasted copper-compatible surface finish is specifically engineered to maximize film adhesion, minimize flaking, and extend mean time between cleans (MTBC). As semiconductor nodes continue to shrink and process margins tighten, OEM-specification process kits like this one are non-negotiable for maintaining device integrity at scale.
Technical Specifications
- OEM Part Numbers: 17-307113-00 / 2301407-B / SM2315D-BRK / 02-306362-00
- Compatible Platform: NOVELLUS PVD300 Physical Vapor Deposition System
- Component Type: Shield Pedestal
- Material: Aluminum (AL) with Grit-Blasted Surface Finish
- Target Film Compatibility: Copper (CU) PVD processes
- Function: Chamber shielding / process kit consumable for sputtering deposition
- Weight: 800 g (approx.)
- Condition Available: New OEM / Refurbished / Used Tested
Key Features & Benefits
- OEM-Matched Geometry: Dimensionally identical to original NOVELLUS specification — ensures drop-in fit with zero chamber modification.
- Grit-Blasted Surface: Enhanced surface roughness maximizes copper film adhesion to the shield, dramatically reducing particle generation and extending service intervals.
- High-Purity Aluminum Substrate: Minimizes metallic contamination risk in copper PVD processes, protecting device yield.
- Extended MTBC: Engineered to maximize mean time between cleans, reducing preventive maintenance frequency and associated downtime costs.
- Multi-Part-Number Cross-Reference: Covers 17-307113-00, 2301407-B, SM2315D-BRK, and 02-306362-00 — simplifying procurement across different fab documentation systems.
- Rapid Sourcing: Konmask.com maintains global supplier networks to fulfill urgent orders with short lead times.
Industry & Equipment Applications
- Semiconductor Fabrication (Front-End): Copper interconnect deposition for logic and memory devices (DRAM, NAND, SRAM).
- Advanced Packaging: Under-bump metallization (UBM) and redistribution layer (RDL) copper seed layer deposition.
- MEMS Manufacturing: Thin-film copper deposition for MEMS sensor and actuator fabrication.
- Research & Development: University and R&D lab PVD300 systems requiring OEM-grade process kits.
- Refurbished Tool Builders: System integrators refurbishing NOVELLUS PVD300 tools for secondary market deployment.
System Integration & Compatible Parts
This Shield Pedestal is designed for use within the NOVELLUS PVD300 process chamber. It is typically replaced as part of a broader process kit maintenance cycle alongside:
- Chamber Shield / Deposition Ring
- Clamp Ring / Edge Ring
- Target Backing Plate
- Shutter Disk Assembly
- Lift Pin Assembly
Contact Konmask.com for complete PVD300 process kit packages and cross-reference support across all NOVELLUS part number revisions.
Our Quality Assurance Process
- Part Number Verification: Every unit is cross-referenced against OEM documentation before shipment.
- Visual & Dimensional Inspection: Surface finish, geometry, and critical dimensions are inspected against OEM specifications.
- Contamination Control: Parts are cleaned, bagged, and packaged in cleanroom-compatible materials to prevent particle contamination during transit.
- Traceability: Full documentation available including part number, revision, and condition report upon request.
- Warranty: All parts covered by Konmask.com’s standard quality guarantee — defective parts replaced or refunded.
How to Order
- Submit your inquiry via the Contact / RFQ form on Konmask.com.
- Provide your required part number(s): 17-307113-00 / 2301407-B / SM2315D-BRK / 02-306362-00.
- Specify quantity, required condition (new / refurbished / used tested), and target delivery date.
- Receive a formal quotation within 1 business day.
- Confirm order and receive shipment with full documentation.
Why Choose Konmask.com?
- Specialized in Industrial Automation & Semiconductor Equipment Parts — not a generalist distributor.
- Global Sourcing Network — access to OEM, refurbished, and hard-to-find obsolete parts worldwide.
- B2B Inquiry-First Model — we work directly with fab engineers, procurement teams, and equipment managers.
- Fast Response — RFQ responses within 24 hours, urgent orders prioritized.
- Technical Support — our team includes engineers with hands-on PVD process experience.
- Secure Packaging & Export Compliance — all shipments properly documented for international customs clearance.
Frequently Asked Questions
- Q: Are part numbers 17-307113-00, 2301407-B, SM2315D-BRK, and 02-306362-00 all the same part?
- A: Yes. These are cross-reference part numbers used across different NOVELLUS documentation revisions and fab procurement systems for the same Shield Pedestal AL Grit CU component on the PVD300 platform.
- Q: Is this part available new or only refurbished?
- A: Konmask.com can source this part in new OEM, certified refurbished, and used-tested conditions depending on availability. Please specify your preference in your RFQ.
- Q: What is the lead time for this part?
- A: Lead time varies by stock availability. In-stock parts typically ship within 3–5 business days. For sourced parts, lead time is typically 2–4 weeks. Contact us for current availability.
- Q: Can Konmask.com supply a complete PVD300 process kit?
- A: Yes. We can assemble complete process kit packages for the NOVELLUS PVD300. Please submit an RFQ with your full kit requirements.
- Q: Do you ship internationally?
- A: Yes. Konmask.com ships globally with full export documentation. We have experience shipping semiconductor equipment parts to fabs in Asia, Europe, and the Americas.
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