NOVELLUS 02-310728-00 HDSIOC Electromagnetic Coil – High-Density Sub-Atmospheric CVD Series
When an electromagnetic coil in a NOVELLUS CVD deposition system fails, the consequences are immediate and severe: plasma ignition becomes unstable, deposition uniformity collapses, and the entire production line faces unplanned downtime. In semiconductor fabs where every hour of tool downtime translates to tens of thousands of dollars in lost wafer output, sourcing a verified replacement coil is not optional — it is mission-critical.
The NOVELLUS HDSIOC EM Coil (P/N 02-310728-00 / 810-028295-170 / C1859 / 0020-21261) is a precision electromagnetic component engineered for the High-Density Sub-Atmospheric CVD (HDSIOC / SPEED) platform — one of NOVELLUS Systems’ most widely deployed dielectric deposition tool families in global 200mm and 300mm fabs. This coil is responsible for generating and sustaining the high-density plasma environment required for consistent TEOS-based oxide film deposition, making it one of the most functionally critical consumable assemblies in the system.
Technical Specifications
- Manufacturer: NOVELLUS Systems (now Lam Research)
- Part Number: 02-310728-00
- Cross-Reference P/N: 810-028295-170 / C1859 / 0020-21261
- Description: HDSIOC Electromagnetic (EM) Coil
- Compatible Platform: NOVELLUS SPEED / HDSIOC CVD System
- Component Type: Electromagnetic Coil Assembly
- Weight: 800 g (approx.)
- Condition Available: New OEM / Refurbished / Used Tested
Key Features & Benefits
- OEM-Equivalent Performance: Manufactured or sourced to original NOVELLUS engineering specifications, ensuring drop-in compatibility without process re-qualification.
- Plasma Stability: Precision-wound coil geometry maintains consistent RF coupling efficiency, critical for uniform plasma density across the wafer surface.
- Multi-P/N Cross-Reference: Covers four interchangeable part numbers (02-310728-00, 810-028295-170, C1859, 0020-21261), simplifying procurement across different fab documentation systems.
- Reduced Downtime Risk: Stocked and ready to ship, minimizing mean time to repair (MTTR) for critical CVD tools.
- Rigorous Pre-Shipment Inspection: Each unit undergoes electrical continuity, insulation resistance, and dimensional verification before dispatch.
Industry & Equipment Applications
- Semiconductor Manufacturing: 200mm and 300mm wafer fabs using NOVELLUS SPEED/HDSIOC CVD tools for inter-layer dielectric (ILD) and pre-metal dielectric (PMD) deposition.
- Flat Panel Display (FPD) Production: Facilities utilizing NOVELLUS CVD platforms adapted for large-area substrate processing.
- Advanced Packaging: Backend-of-line (BEOL) processes requiring high-quality oxide film deposition.
- Research & Development: University and corporate R&D labs operating legacy NOVELLUS CVD equipment.
System Integration & Compatible Parts
This EM coil is designed for integration within the NOVELLUS HDSIOC/SPEED CVD chamber assembly. Compatible and frequently co-ordered components include:
- NOVELLUS RF Match Network Components
- NOVELLUS SPEED Chamber Liner Assemblies
- NOVELLUS Gas Distribution Faceplate / Showerhead
- NOVELLUS CVD Susceptor / Heater Assemblies
- NOVELLUS Plasma Source RF Coil Assemblies
Contact our technical team to verify compatibility with your specific tool configuration and software revision.
Our Quality Assurance Process
At Konmask.com, every critical semiconductor spare part passes through a structured quality gate before shipment:
- Step 1 — Source Verification: Parts are sourced exclusively from authorized distributors, OEM surplus channels, or certified refurbishers.
- Step 2 — Physical Inspection: Visual inspection for mechanical damage, corrosion, and connector integrity.
- Step 3 — Electrical Testing: Continuity and insulation resistance testing per OEM reference values.
- Step 4 — Documentation: Each shipment includes a test report and traceability documentation upon request.
- Step 5 — Secure Packaging: ESD-safe and anti-static packaging with moisture barrier protection for international shipping.
How to Order
- Submit your RFQ via the “Get a Quote” button on this page, or email [email protected].
- Provide your tool model, fab location, and required quantity.
- Our team will confirm availability, lead time, and pricing within 24 business hours.
- Upon agreement, we issue a proforma invoice and arrange secure international shipping (DHL / FedEx / UPS).
Why Choose Konmask.com?
- 🔧 Technical Expertise: Our team includes engineers with hands-on experience in semiconductor equipment maintenance and spare parts management.
- 🌐 Global Reach: We ship to fabs in Asia, Europe, North America, and the Middle East with full export documentation support.
- 📦 Inventory Depth: Extensive stock of NOVELLUS, Applied Materials, Tokyo Electron, and other OEM spare parts.
- ⚡ Fast Response: Dedicated account managers respond to urgent RFQs within hours.
- ✅ Trusted by Industry: Serving semiconductor fabs, equipment OEMs, and independent service organizations (ISOs) worldwide.
Frequently Asked Questions
Q: Is the NOVELLUS 02-310728-00 EM Coil available as a new OEM part?
A: We stock new OEM, factory-refurbished, and used-tested units. Availability depends on current inventory. Please submit an RFQ for the most up-to-date stock status.
Q: What is the difference between P/N 02-310728-00, 810-028295-170, C1859, and 0020-21261?
A: These are cross-reference part numbers used by different documentation systems (NOVELLUS internal, fab MES systems, and third-party databases) for the same physical component. All four numbers refer to the identical HDSIOC EM Coil assembly.
Q: Can you provide a certificate of conformance (CoC) or test report?
A: Yes. Test reports and CoC documentation are available upon request for refurbished and tested units. Please specify your documentation requirements when submitting your RFQ.
Q: What is the typical lead time for international orders?
A: In-stock items typically ship within 1–3 business days. International delivery via express courier (DHL/FedEx) is typically 3–7 business days depending on destination.
Q: Do you offer a warranty on this part?
A: Yes. We offer a 90-day functional warranty on all refurbished and tested units. New OEM parts carry the original manufacturer warranty where applicable.
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Original Source: https://Konmask.com
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