Lam Research 853-049542-171 Control Board – Precision Process Control for Semiconductor Etch & CVD Systems
When a control board fails inside a Lam Research etch or CVD chamber, the entire wafer fabrication line comes to a halt. Unplanned downtime in a semiconductor fab can cost tens of thousands of dollars per hour, and sourcing a verified replacement quickly is not optional — it is mission-critical. The Lam Research 853-049542-171 (also cross-referenced as 853-049542-161 and 853-04952R171) Control Board is the exact OEM-specification component engineered to restore your system to full operational status with zero compromise on process integrity.
Within the Lam Research spare parts ecosystem, this control board occupies a central role in the process control architecture of Lam’s industry-leading plasma etch and chemical vapor deposition (CVD) platforms. Lam Research holds a dominant position in the global semiconductor equipment market, and its control-layer components — including this board — are designed to meet the sub-nanometer precision demands of advanced node wafer processing. Sourcing the correct revision (171 / 161 / R171) ensures full firmware and hardware compatibility with your installed tool configuration.
Technical Specifications
- Part Numbers: 853-049542-171 | 853-049542-161 | 853-04952R171
- Manufacturer: Lam Research Corporation
- Component Type: Control Board / PCB Assembly
- Application: Plasma Etch & CVD Semiconductor Processing Equipment
- Condition Available: Used / Refurbished / New Surplus (specify on inquiry)
- Weight: Approx. 5.3 kg (as shipped)
- Compatibility: Lam Research etch and CVD tool platforms (confirm tool model on inquiry)
Key Features & Benefits
- OEM Cross-Reference Verified: All three part numbers (171 / 161 / R171) are validated as compatible revisions — reducing sourcing confusion and mis-shipment risk.
- Process-Critical Reliability: Designed to maintain precise RF power delivery, gas flow control, and endpoint detection signal integrity within Lam etch chambers.
- Rapid Availability: Konmask.com maintains sourcing channels for hard-to-find Lam Research spare parts, minimizing your fab downtime window.
- Global Export Compliance: Shipped with proper documentation to support your import clearance process.
- Inspection & Testing: Each unit undergoes visual inspection and functional verification before dispatch.
Industry & Equipment Applications
- Semiconductor wafer fabrication fabs (logic, memory, foundry)
- Plasma dry etch systems (dielectric etch, conductor etch)
- Chemical Vapor Deposition (CVD / PECVD / ALD) tool platforms
- Advanced packaging and MEMS processing lines
- University and R&D semiconductor research labs
- Refurbishment and resale of Lam Research equipment
System Integration & Compatible Parts
This control board is designed to integrate within Lam Research’s modular process tool architecture. When replacing or upgrading this component, the following associated parts are commonly required:
- Lam Research RF Match Network Boards
- Lam Research I/O Interface Cards
- Lam Research Power Supply Modules
- Lam Research Chamber Controller Assemblies
Please provide your tool model and current software revision when submitting an inquiry to ensure full compatibility confirmation.
Our Quality Assurance Process
- Step 1 – Source Verification: Parts are sourced from traceable supply chains including decommissioned fabs, authorized distributors, and OEM surplus channels.
- Step 2 – Visual Inspection: Each board is inspected for physical damage, corrosion, burnt components, and connector integrity.
- Step 3 – Functional Check: Where test fixtures are available, boards undergo powered functional verification.
- Step 4 – Secure Packaging: Anti-static packaging with foam cushioning to prevent transit damage.
- Step 5 – Documentation: Shipment includes part number confirmation, inspection record, and commercial invoice.
How to Order
- Submit an inquiry via the Contact / Request a Quote form on this page.
- Provide your tool model, site location, and required delivery timeline.
- Our team will confirm availability, condition, and pricing within 1 business day.
- Upon agreement, we issue a proforma invoice and arrange secure international shipment.
Why Choose Konmask.com?
- Specialized in Industrial & Semiconductor Automation Parts: We focus exclusively on hard-to-source control system components — not a generalist marketplace.
- B2B Inquiry-First Model: No pressure purchasing. We work with your procurement team to validate compatibility before any transaction.
- Global Shipping: Experienced in exporting to North America, Europe, Southeast Asia, and the Middle East with proper customs documentation.
- Responsive Support: Direct technical communication — no call centers, no bots.
- Competitive Pricing: Transparent quotation with no hidden fees.
Frequently Asked Questions
Q: Are part numbers 853-049542-171, 853-049542-161, and 853-04952R171 interchangeable?
A: These are revision variants of the same base assembly. Compatibility depends on your specific tool configuration and software version. Please confirm with our team before ordering.
Q: What condition is this board available in?
A: We can source used, refurbished, or new surplus units depending on current stock. Condition will be clearly stated in your quotation.
Q: How long does shipping take?
A: Standard international express delivery is 3–7 business days depending on destination. Expedited options are available.
Q: Do you provide a warranty?
A: Yes. We offer a limited warranty period on all verified functional units. Terms are specified in the quotation.
Q: Can you help identify if this part fits my Lam Research tool?
A: Yes. Share your tool model number and we will cross-reference compatibility before confirming your order.
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