CVD Chamber Bottom Purge Solution – Applied Materials 0050-10193 | C3608 Series
Where This Product Is Used
The Applied Materials 0050-10193 (Ref: 810-046015-009) Bottom Purge Assembly is a critical process component deployed in Chemical Vapor Deposition (CVD) and epitaxial growth chambers within semiconductor fabrication facilities. It is specifically engineered for the C3608 / C3202 platform and is found in:
- 300mm and 200mm wafer CVD process chambers (front-end-of-line)
- Dielectric and metal CVD modules in high-volume manufacturing (HVM) fabs
- Epi reactor bottom purge zones requiring inert gas isolation
- Cleanroom tool refurbishment and preventive maintenance (PM) kits
- Spare parts inventory for Applied Materials Centura and Producer platform tools
Technical Specifications
- Part Number: 0050-10193
- Reference / Assembly PN: 810-046015-009
- Platform Compatibility: Applied Materials C3608 / C3202
- Component Function: Bottom Purge Assembly — delivers inert purge gas (N₂/Ar) to the underside of the susceptor to prevent process gas backflow and contamination
- Weight: ~800 g
- Material: Quartz / Anodized Aluminum (platform-dependent sub-assembly)
- Condition: New / Refurbished (specify at inquiry)
- Lead Time: Contact for availability
Why Engineers Specify This Model
- Process Isolation: Maintains a positive purge pressure beneath the susceptor, preventing reactive gas ingress that causes backside deposition and particle contamination.
- Yield Protection: Reduces wafer backside defects — a key metric in advanced node fabs where even sub-micron particles cause die loss.
- Platform-Specific Fit: Designed to OEM dimensional tolerances for the C3608/C3202 chamber geometry — no field modification required.
- PM Cycle Alignment: Typically replaced on a scheduled PM interval alongside susceptor and liner components to maintain chamber baseline.
- Downtime Reduction: Having this part in spares inventory eliminates unplanned tool downtime caused by purge flow degradation or assembly failure.
Complete System Bill of Materials
This component is typically sourced alongside the following C3608 chamber PM parts:
- Susceptor / Heater Assembly (C3608 platform)
- Chamber Liner / Quartz Ring
- Gas Inlet Manifold / Showerhead
- Purge Gas Flow Controller (MFC)
- O-Ring Kit (chamber seal set)
- Lift Pin Assembly
Contact [email protected] to source a complete PM kit for your C3608 tool.
Compliance & Industry Standards
- Compatible with SEMI S2 / S8 environmental, health & safety guidelines for semiconductor equipment
- Suitable for use in ISO Class 1–5 cleanroom environments
- Traceable part number aligned with Applied Materials OEM documentation
- RoHS-compliant materials (confirm at order for specific sub-assembly revision)
Quality Assurance & Sourcing
At Konmask.com, every Applied Materials spare part undergoes a structured sourcing and verification process:
- Part number cross-referenced against OEM documentation and fab engineering records
- Physical inspection for dimensional integrity, surface condition, and assembly completeness
- Refurbished units cleaned and tested to chamber-ready specification
- Packaged in ESD-safe, cleanroom-compatible materials for safe transit
- Full traceability documentation available upon request
How to Source This Part
- Submit your RFQ via [email protected] with your tool ID and required quantity.
- Our team confirms availability, condition (new/refurbished), and lead time within 24 hours.
- Receive a formal quotation with shipping options (DHL Express, FedEx, sea freight).
- Part ships with inspection report and packing documentation.
WhatsApp / WeChat: +0086 19859288691 | Email: [email protected]
Application-Specific FAQ
Q: Is 0050-10193 compatible with both C3202 and C3608 platforms?
A: The bottom purge assembly shares a common design lineage across the C3202/C3608 family. Confirm your exact chamber revision with our team before ordering to ensure dimensional fit.
Q: What is the typical replacement interval for this part?
A: Most fabs replace the bottom purge assembly every 250,000–500,000 RF hours or at each major PM cycle, whichever comes first. Consult your tool’s PM schedule.
Q: Can you supply a certificate of conformance (CoC)?
A: Yes. CoC and inspection documentation are available for all new and refurbished units. Request at time of order.
Q: Do you ship internationally?
A: Yes. We ship globally via DHL Express, FedEx International Priority, and sea freight for bulk orders. Export documentation (commercial invoice, packing list, HS code) is provided.
Q: What is the HS code for customs clearance?
A: Typically classified under HS 8486.90 (parts and accessories for semiconductor manufacturing machines). Confirm with your customs broker for your jurisdiction.
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Contact: [email protected] | +0086 19859288691
