HDPCVD Process Control Solution – Applied Materials 0100-01781 / 0010-10521 / AJ530FT-336-B4 | Producer Series
Where This Product Is Used
The Applied Materials (AMAT) 0100-01781 / 0010-10521 / AJ530FT-336-B4 HDPCVD Chamber Distribution Board is a critical PCB assembly deployed inside High-Density Plasma Chemical Vapor Deposition (HDPCVD) process chambers. It is found in leading semiconductor fabs running:
- Shallow Trench Isolation (STI) gap-fill processes at 28 nm – 5 nm nodes
- Inter-Metal Dielectric (IMD) and Pre-Metal Dielectric (PMD) deposition steps
- MEMS and power-device fabrication lines requiring high-aspect-ratio gap fill
- Advanced packaging back-end-of-line (BEOL) dielectric deposition
- Research & development fabs qualifying next-generation CVD processes
Typical host tools include the Applied Materials Producer® HDPCVD platform and compatible chamber configurations running SiO₂, SiN, and doped-oxide films.
Technical Specifications
| Attribute | Detail |
|---|---|
| OEM Part Number | 0100-01781 |
| Cross-Reference PN | 0010-10521 / AJ530FT-336-B4 |
| Assembly Type | Chamber Distribution Board (PCB) |
| Platform Compatibility | Applied Materials Producer® HDPCVD |
| Process Application | High-Density Plasma CVD (HDPCVD) |
| Weight | 2,600 g (approx.) |
| Country of Origin | United States |
| HS Code | 8537.10 |
| Condition | Used / Refurbished / New (specify on inquiry) |
Why Engineers Specify This Model
- OEM-matched signal routing – preserves chamber-to-chamber matching critical for process uniformity across multi-chamber tools.
- Plasma-environment hardened – board materials and conformal coating rated for the RF-rich, corrosive atmosphere inside HDPCVD chambers.
- Drop-in replacement – identical connector footprint and firmware compatibility eliminates re-qualification downtime.
- Dual cross-reference – stocked under both 0100-01781 and 0010-10521 to simplify procurement across different fab BOM revisions.
- Reduced MTTR – having a spare on-site cuts mean-time-to-repair from days to hours during unplanned chamber downtime.
Complete System Bill of Materials
This board is commonly sourced alongside the following complementary components to support a full chamber PM or repair kit:
- AMAT RF Match Network Assembly (Producer HDPCVD)
- Chamber Lid Electrode / Top Dome Assembly
- Gas Distribution Plate (GDP) / Showerhead
- ESC (Electrostatic Chuck) Assembly
- Chamber Liner Kit
- Throttle Valve Controller PCB
- Process Kit (Edge Ring, Focus Ring)
Contact us to bundle multiple line items for consolidated shipping and volume pricing.
Compliance & Industry Standards
- Compatible with SEMI S2 environmental, health & safety guidelines for semiconductor manufacturing equipment
- RoHS documentation available upon request for applicable board revisions
- Export classification reviewed under EAR / ECCN — please confirm end-use destination at time of order
- Traceability documentation (serial number, revision level) provided with shipment
Quality Assurance & Sourcing
Every unit offered through Konmask.com undergoes a structured inspection workflow:
- Visual inspection for physical damage, corrosion, and component integrity
- Functional bench test where applicable
- Photographic documentation of board condition pre-shipment
- Anti-static packaging (ESD bags + foam-lined carton) for safe international transit
- Sourced from decommissioned OEM tools, authorized resellers, or certified refurbishers
How to Source This Part
- Add to Cart – for in-stock units with listed price.
- Request a Quote – for volume orders, alternate condition grades, or expedited delivery.
- Email us at [email protected] with your tool serial number and required delivery date.
- Call / WhatsApp: +0086 19859288691 for urgent fab-down situations.
We ship globally via DHL Express, FedEx International Priority, and UPS Worldwide. Lead time: 1–5 business days for in-stock items.
Application-Specific FAQ
Q: Is this board compatible with both the Producer SE and Producer GT HDPCVD platforms?
A: Compatibility depends on the chamber revision. Please share your tool model and chamber serial number so we can confirm fitment before shipment.
Q: Can you provide a test report or functional verification?
A: Yes. Functional test reports are available for refurbished units. Please request at time of inquiry.
Q: What is the typical lead time for this part?
A: In-stock units ship within 1–3 business days. If sourcing is required, lead time is typically 5–15 business days depending on availability.
Q: Do you offer a warranty?
A: We offer a 90-day warranty against DOA (Dead on Arrival) and functional defects for refurbished units. Terms available on request.
Q: Can I return the part if it doesn’t fit?
A: Returns are accepted within 14 days for unused, uninstalled parts in original packaging. Contact support before returning.
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Contact: [email protected] | +0086 19859288691


