CVD Process Window Solution – Applied Materials 0200-09429 | AL2O3 Coated BWCVD
The Applied Materials 0200-09429 (cross-reference: V10PFT03DX2 / 853-200977-002) is an AL2O3 (Aluminum Oxide) coated optical window engineered for Blanket Tungsten CVD (BWCVD) process chambers. This precision component provides a chemically resistant, thermally stable viewport critical to process monitoring and endpoint detection in high-throughput semiconductor fabs.
Where This Product Is Used
- Blanket Tungsten CVD (BWCVD) chambers – primary application for W deposition on wafer surfaces
- Applied Materials Centura & Producer platforms – compatible process module viewports
- In-situ optical emission spectroscopy (OES) – endpoint detection and plasma monitoring windows
- 300 mm wafer fabs – logic, memory, and foundry process lines requiring tungsten barrier/contact fill
- Preventive maintenance (PM) kits – scheduled chamber rebuild and wet clean cycles
- Advanced packaging & MEMS fabs – wherever tungsten CVD process windows are specified
Technical Specifications
| Parameter | Value |
|---|---|
| OEM Part Number | 0200-09429 |
| Cross-Reference / Alternate PN | V10PFT03DX2 | 853-200977-002 |
| Series / Platform | AL203 (AL2O3 Coated) – BWCVD |
| Component Type | Optical Window – CVD Chamber Viewport |
| Coating Material | Aluminum Oxide (AL2O3) – CVD-grade |
| Process Compatibility | Blanket Tungsten CVD (BWCVD), WF₆-based chemistry |
| Weight | 360 g (nominal) |
| OEM Brand | Applied Materials (AMAT) |
| Condition | New / Refurbished – specify at inquiry |
Why Engineers Specify This Model
- AL2O3 coating durability – resists WF₆ and by-product corrosion far longer than uncoated quartz windows
- Optical clarity retention – maintains transmission for OES and pyrometry over extended PM intervals
- Exact OEM geometry – drop-in replacement; no chamber modification required
- Thermal stability – withstands rapid thermal cycling inherent to CVD process sequences
- Reduced downtime – longer service life versus generic alternatives, lowering cost-of-ownership
- Dual cross-reference – V10PFT03DX2 and 853-200977-002 ensure compatibility across AMAT BOM revisions
Complete System Bill of Materials
This window is typically replaced as part of a broader BWCVD chamber PM. Commonly co-ordered components include:
- Chamber liner / process kit (AMAT BWCVD)
- Showerhead / gas distribution faceplate
- Susceptor / heater assembly
- O-ring and seal kit for viewport flange
- Purge gas fittings and viewport retainer hardware
- OES fiber optic cable assembly
Contact [email protected] for a complete PM kit quote.
Compliance & Industry Standards
- Manufactured to SEMI S2 environmental, health & safety guidelines
- Compatible with SEMI F47 voltage sag immunity requirements for fab equipment
- Traceable material certification available upon request (CoC / CoA)
- RoHS-compliant materials; no restricted substances in coating or substrate
- Packaging per JEDEC / SEMI ESD-safe standards for cleanroom-sensitive optics
Quality Assurance & Sourcing
- Dual-source inventory – genuine AMAT OEM stock and qualified aftermarket equivalents
- Each unit inspected for coating integrity, dimensional accuracy, and surface cleanliness
- Serialized traceability records maintained for all shipments
- Cleanroom-packaged in Class 100 / ISO 5 compatible bags
- Konmask.com has supplied semiconductor spare parts to fabs across Asia, Europe, and North America since 2015
How to Source This Part
- Email [email protected] with your PO or RFQ referencing PN 0200-09429
- Specify required condition: New OEM, Refurbished, or Equivalent aftermarket
- Provide target delivery date and destination country for lead-time confirmation
- Receive formal quotation within 1 business day
- Call / WhatsApp: +0086 19859288691
Application-Specific FAQ
Q: Is 0200-09429 compatible with both Centura and Producer BWCVD chambers?
A: The part is primarily specified for AMAT BWCVD modules. Please confirm your exact chamber model when inquiring, as viewport flange dimensions may vary by platform generation.
Q: What is the typical replacement interval for this window?
A: Most fabs replace BWCVD windows every 500–1,000 RF hours or at each wet clean PM cycle, whichever comes first. AL2O3 coating extends this interval versus bare quartz.
Q: Can you supply the cross-reference part V10PFT03DX2 separately?
A: V10PFT03DX2 and 853-200977-002 are alternate part numbers for the same component. All three references ship the identical part.
Q: Do you offer expedited shipping to Taiwan, South Korea, or Japan?
A: Yes. We ship DHL Express, FedEx IP, and UPS Worldwide from Xiamen, China. Typical transit: 2–4 business days to major fab locations in Asia.
Q: Is a Certificate of Conformance (CoC) available?
A: Yes, CoC and material traceability documentation are available for all new OEM units at no additional charge.
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Contact: [email protected] | +0086 19859288691
