Plasma Etch Process Control Solution – LAM Research IR-SENS V 14036-PE44-AGN1 | LAM 796 Series
Where This Product Is Used
The LAM Research 796-901039-002 IR-SENS V 14036-PE44-AGN1 infrared sensor module is a critical process-control component deployed in semiconductor wafer fabrication environments. It is specifically engineered for use in LAM Research plasma etch and CVD systems within the 796 platform series, where precise endpoint detection and real-time infrared emission monitoring are essential to yield control.
- Plasma Etch Chambers – Monitors etch endpoint via IR spectral emission to prevent over-etch on silicon, oxide, and nitride layers
- Chemical Vapor Deposition (CVD) Systems – Provides in-situ process monitoring during thin-film deposition cycles
- Semiconductor Fab Maintenance – Used as a direct OEM replacement during scheduled PM or unplanned downtime on LAM 796-series tools
- Advanced Packaging Lines – Supports process uniformity monitoring in high-volume manufacturing (HVM) environments
Technical Specifications
| Manufacturer Part Number | 796-901039-002 |
| Sensor Model | IR-SENS V |
| Internal Reference | 14036-PE44-AGN1 |
| Cross Reference / Alt P/N | 1075326 |
| Manufacturer | LAM Research Corporation |
| Platform Compatibility | LAM 796 Series (Plasma Etch / CVD) |
| Sensor Type | Infrared (IR) Emission Sensor Module |
| Function | Endpoint Detection / Process Emission Monitoring |
| Form Factor | Module (OEM Replacement) |
| Condition Available | Refurbished / Tested / New Surplus |
| Export Classification | Subject to EAR / ECCN review — contact us |
Why Engineers Specify This Model
- OEM-Grade Accuracy – The IR-SENS V delivers spectral sensitivity matched to LAM’s proprietary endpoint detection algorithms, ensuring process repeatability across wafer lots
- Drop-In Replacement – Designed to the exact mechanical and electrical interface of the 796 platform; no firmware modification required
- Reduced Downtime Risk – Stocking this module eliminates critical-path delays caused by OEM lead times, which can exceed 16–26 weeks for new units
- Validated Performance – Each unit sourced by Konmask undergoes functional verification prior to shipment
- Dual P/N Coverage – Cross-referenced as both 796-901039-002 and 1075326, ensuring compatibility with legacy BOM and current procurement systems
Complete System Bill of Materials
Engineers maintaining LAM 796-series tools typically source the following complementary components alongside this sensor module:
- LAM Research RF Match Network Assembly (796-series)
- Electrostatic Chuck (ESC) Power Supply Module
- Chamber Pressure Transducer / MFC Controllers
- Endpoint Detection Controller Board
- Fiber Optic Harness for IR Sensor Interface
- LAM 796 Mainframe I/O Interface Card
Contact Konmask for bundled BOM sourcing — we can consolidate multi-line PM kits into a single shipment.
Compliance & Industry Standards
- SEMI S2 – Environmental, Health & Safety guidelines for semiconductor manufacturing equipment
- SEMI S8 – Ergonomic guidelines for equipment design
- RoHS / REACH – Compliance status available upon request for applicable refurbished units
- EAR / Export Control – This component may be subject to U.S. Export Administration Regulations. Buyers are responsible for verifying end-use compliance. Konmask will request end-user documentation where required.
- ISO 9001 – Konmask operates under quality management principles aligned with ISO 9001 for sourcing and inspection
Quality Assurance & Sourcing
Konmask.com specializes in the global sourcing of hard-to-find semiconductor equipment components. Every unit of the LAM 796-901039-002 IR-SENS V offered through our platform is:
- ✔ Sourced from verified, traceable supply channels (OEM surplus, certified refurbishers, or decommissioned fab lots)
- ✔ Inspected for physical integrity — connectors, housing, optical window, and PCB condition
- ✔ Functionally tested where test fixtures are available
- ✔ Photographed and documented prior to shipment
- ✔ Shipped with ESD-safe packaging and anti-static protection
Warranty: 90-day return-to-base warranty on refurbished units. New surplus units carry a 30-day DOA guarantee.
How to Source This Part
- Request a Quote – Email [email protected] with your required quantity, condition preference (refurbished / new surplus), and target delivery date
- Receive Availability Confirmation – Our team will confirm stock status, condition report, and lead time within 1 business day
- Place Order – Purchase directly through Konmask.com or via PO for qualified B2B accounts
- Inspection & Dispatch – Units are inspected, photographed, and dispatched with full documentation
- Worldwide Shipping – DHL / FedEx express available; export documentation provided for international shipments
📞 Hotline: +0086 19859288691 | 📧 Email: [email protected]
Application-Specific FAQ
Q: Is the 796-901039-002 compatible with both the LAM 796 Exelan and 796 Flex platforms?
A: The IR-SENS V module is designed for the LAM 796 platform family. Compatibility with specific sub-variants (Exelan, Flex, etc.) should be confirmed against your tool’s BOM. Contact us with your tool serial number for verification.
Q: What is the difference between P/N 796-901039-002 and 1075326?
A: These are cross-reference part numbers for the same physical module — 796-901039-002 is the LAM Research OEM part number, while 1075326 is an alternate catalog or internal reference number used in some procurement systems.
Q: Can this sensor be recalibrated after installation?
A: Calibration procedures are defined in the LAM 796 service manual. Konmask recommends following OEM calibration protocols post-installation. We can provide guidance on calibration resources upon request.
Q: Do you offer expedited shipping for emergency fab downtime situations?
A: Yes. We prioritize emergency orders and can arrange same-day dispatch for in-stock units with DHL Express or FedEx Priority. Contact us immediately at +0086 19859288691.
Q: What documentation is provided with the shipment?
A: Standard documentation includes a packing list, inspection report, and certificate of conformance (CoC). Export documentation (commercial invoice, HS code declaration) is provided for international orders.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
