LAM RESEARCH 50020R-10 Node Rocker Valve – Precision Gas Flow Control | HC-SFS202 Series
In a semiconductor etch or CVD chamber, a single failed valve can halt an entire production line. Uncontrolled gas flow leads to process drift, wafer contamination, and costly unplanned downtime that can cost fabs tens of thousands of dollars per hour. The node rocker valve is the critical on/off gating component that isolates and sequences process gases with millisecond precision — and when it fails, there is no workaround.
The LAM RESEARCH 50020R-10 is an OEM-specified Node Rocker Valve engineered for Lam Research etch and deposition platforms. Cross-referenced under part numbers 810-002895-232, 0041-81423, and C2088, and manufactured to HC-SFS202 series standards, this valve occupies a critical position in Lam’s gas delivery architecture. It is widely deployed across 200mm and 300mm fab environments globally, making it one of the most sought-after replacement components in the semiconductor MRO supply chain.
Technical Specifications
- Manufacturer: LAM RESEARCH
- Primary Part Number: 50020R-10
- Cross-Reference Part Numbers: 810-002895-232 / 0041-81423 / C2088
- Series / Drawing Reference: HC-SFS202
- Component Type: Node Rocker Valve
- Function: On/off gas flow isolation in process gas delivery nodes
- OEM Compatibility: Lam Research etch and CVD process chambers
- Actuation: Pneumatic (rocker mechanism)
- Media Compatibility: Corrosive and inert process gases (per OEM specification)
- Sealing Standard: High-purity semiconductor-grade
- Weight: Approx. 20 g (component only)
- Condition Available: New OEM / Refurbished / Tested Used
Note: All specifications are based on OEM documentation and cross-reference data. Contact us to confirm compatibility with your specific chamber configuration.
Key Features & Benefits
- OEM-Matched Design: Direct drop-in replacement for Lam Research systems — no modification required.
- Multi-Part Cross-Reference: Covers 810-002895-232, 0041-81423, C2088, and HC-SFS202 in a single sourcing solution, simplifying your BOM management.
- High-Purity Construction: Wetted surfaces meet semiconductor-grade cleanliness standards to prevent particle contamination in process gas streams.
- Fast Actuation Response: Rocker mechanism delivers repeatable, low-latency switching for precise recipe-step sequencing.
- Leak-Tight Sealing: Engineered to maintain hermetic integrity under cyclic pressure and corrosive gas exposure.
- Reduced Downtime Risk: Stocking this valve as a critical spare eliminates extended lead-time exposure during unplanned maintenance events.
Industry & Equipment Applications
- Semiconductor Fabrication: 200mm and 300mm wafer etch and CVD process chambers on Lam Research platforms (Versys, Kiyo, Flex, Altus series and equivalents).
- Gas Delivery Nodes: Process gas manifold assemblies requiring isolated on/off switching at individual gas lines.
- Preventive Maintenance Programs: Scheduled PM kits for high-utilization etch tools in high-volume manufacturing (HVM) fabs.
- Refurbishment & Rebuild: Chamber rebuild programs at IDMs, foundries, and third-party refurbishers.
- Research & Development: University and R&D fab environments running Lam Research legacy equipment.
System Integration & Compatible Parts
The 50020R-10 Node Rocker Valve operates within Lam Research’s modular gas delivery node architecture. It is typically installed alongside:
- Mass Flow Controllers (MFCs) for upstream gas metering
- Pressure transducers and regulators at the gas panel
- Pneumatic solenoid actuators and valve manifold blocks
- Process chamber isolation valves and throttle valves
If you are sourcing a full PM kit or rebuilding a gas delivery node, contact our engineering team — we can assist with a complete compatible parts list for your specific tool configuration.
Our Quality Assurance Process
At Konmask.com, every critical semiconductor component goes through a structured verification process before shipment:
- Source Verification: Parts are sourced from OEM-authorized channels, certified refurbishers, or decommissioned tools with documented service history.
- Visual & Dimensional Inspection: Each unit is inspected against OEM drawings for physical integrity, seal condition, and port cleanliness.
- Functional Testing: Where applicable, valves are bench-tested for actuation response and leak integrity prior to dispatch.
- Traceability Documentation: Full part traceability records are available upon request for regulated fab environments.
- Secure Packaging: Components are packaged in ESD-safe, cleanroom-compatible materials to prevent contamination and transit damage.
How to Order
- Submit an Inquiry: Use the contact form on this page or email [email protected] with your part number and required quantity.
- Receive a Quote: Our team will respond within 1 business day with pricing, availability, and lead time.
- Confirm & Pay: We accept T/T bank transfer, PayPal, and other B2B payment methods. A proforma invoice will be issued upon order confirmation.
- Shipping: We ship worldwide via DHL, FedEx, and UPS Express. Export documentation and customs support are included.
Why Choose Konmask.com?
- Specialized in hard-to-find semiconductor and industrial automation spare parts
- Global sourcing network covering OEM, aftermarket, and refurbished inventory
- Engineering-led team with hands-on knowledge of Lam Research, Applied Materials, ASML, and other major OEM platforms
- Fast response — most inquiries quoted within 24 hours
- Trusted by procurement engineers and fab managers across Asia, Europe, and North America
- Full export compliance and documentation support
Frequently Asked Questions
Q: Is the 50020R-10 compatible with all Lam Research etch tools?
A: The 50020R-10 is specified for Lam Research gas delivery node assemblies. Compatibility depends on your specific tool model and configuration. Please share your tool model and chamber type when submitting an inquiry so we can confirm fitment.
Q: What is the difference between part numbers 810-002895-232, 0041-81423, and C2088?
A: These are Lam Research internal cross-reference numbers that may correspond to different revision levels, assembly configurations, or procurement systems. The 50020R-10 is the primary component part number. Our team can help verify which reference applies to your BOM.
Q: Do you offer refurbished units?
A: Yes. We offer new OEM, certified refurbished, and tested-used conditions depending on availability. Condition and test documentation are disclosed at the time of quotation.
Q: What is the lead time?
A: Lead time varies by stock availability. In-stock units typically ship within 2–5 business days. For sourced or refurbished units, lead time is typically 2–4 weeks. Contact us for current availability.
Q: Can you supply a full PM kit including this valve?
A: Yes. We can compile complete preventive maintenance kits for Lam Research tools. Contact our engineering team with your tool model and PM scope for a full kit quotation.
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