Semiconductor Etch Chamber Solution – Lam Research 713-028553-102 | TPA175D Series
Where This Product Is Used
The Lam Research 713-028553-102 Confinement Ring (also cross-referenced as 3161911V01 and 9011496V02) is a critical plasma-facing consumable engineered for use in Lam Research Transformer Coupled Plasma (TCP) and Kiyo® etch systems. It is specifically designed for the TPA175D-P10-L400-M-M750W chamber configuration.
Typical deployment environments include:
- 300 mm wafer dielectric and conductor etch chambers
- High-density plasma (HDP) process modules in semiconductor fabs
- Logic, DRAM, and 3D NAND front-end-of-line (FEOL) etch processes
- Advanced packaging and TSV (Through-Silicon Via) etch applications
- Foundry and IDM facilities running 28 nm node and below
Technical Specifications
- OEM Part Number: 713-028553-102
- Cross-Reference / Alternate P/N: 3161911V01 | 9011496V02
- Assembly Code: TPA175D-P10-L400-M-M750W
- Component Type: Confinement Ring
- OEM / Manufacturer: Lam Research Corporation
- Compatible Platform: Lam Research TCP / Kiyo® Etch Systems
- Wafer Size: 300 mm
- Material: Anodized Aluminum / Quartz (OEM specification)
- Function: Plasma confinement and process gas flow control within the etch chamber
- Condition: New / Refurbished (specify at inquiry)
Why Engineers Specify This Model
- Plasma Uniformity: Precisely machined geometry maintains radial plasma uniformity across the 300 mm wafer, directly impacting etch rate uniformity (ERU) and critical dimension (CD) control.
- Extended Service Life: OEM-grade material selection resists erosion from aggressive fluorine- and chlorine-based chemistries (CF₄, Cl₂, HBr), reducing PM frequency.
- Drop-In Compatibility: Manufactured to OEM dimensional tolerances — no chamber re-qualification required when replacing like-for-like.
- Process Stability: Consistent confinement geometry minimizes particle generation and prevents plasma leakage to the chamber wall, protecting downstream components.
- Multi-P/N Traceability: Dual cross-reference (3161911V01 / 9011496V02) ensures seamless BOM reconciliation across legacy and current fab documentation systems.
Complete System Bill of Materials
This confinement ring is typically specified alongside the following chamber components for a full preventive maintenance (PM) kit:
- Upper Electrode / Showerhead Assembly
- Focus Ring (Edge Ring)
- Chamber Liner
- ESC (Electrostatic Chuck) Assembly
- O-Ring Kit (Chamber Seal Set)
- Baffle Plate
- Gas Distribution Plate
Contact Konmask for complete PM kit sourcing and cross-reference matching.
Compliance & Industry Standards
- Manufactured and inspected to SEMI S2 environmental, health, and safety guidelines
- Dimensional conformance to OEM engineering drawings (Lam Research internal spec)
- Compatible with SEMI E10 equipment reliability and maintenance frameworks
- RoHS-compliant materials where applicable
- Traceability documentation available upon request (CoC / CoA)
Quality Assurance & Sourcing
Konmask sources semiconductor chamber components through verified supply channels with full part number traceability. Each unit undergoes:
- Visual and dimensional inspection against OEM reference specifications
- P/N and revision-level verification (713-028553-102 / 3161911V01 / 9011496V02)
- Secure anti-static packaging with humidity indicators for safe international transit
- Certificate of Conformance (CoC) available for qualified buyers
How to Source This Part
To place an order or request a quote for the Lam Research 713-028553-102 Confinement Ring:
- Email: [email protected]
- Phone / WhatsApp: +0086 19859288691
- Website: https://konmask.com
- Provide your fab name, required quantity, and preferred delivery timeline for fastest response.
- Bulk orders and standing PO arrangements are welcome.
Application-Specific FAQ
Q: Is 713-028553-102 compatible with both TCP and Kiyo® platforms?
A: This part is designed for the TPA175D chamber configuration. Please confirm your exact tool model and chamber revision with our team before ordering.
Q: What is the difference between 3161911V01 and 9011496V02?
A: Both are Lam Research internal cross-reference numbers for the same assembly (713-028553-102). They may reflect different revision tracking systems used across fab documentation. The physical part is identical.
Q: Can this ring be refurbished and reused?
A: Yes. Confinement rings can typically be refurbished 2–3 times depending on erosion depth. Konmask can advise on refurbishment eligibility based on your current part condition.
Q: What is the lead time for this part?
A: Lead time varies by stock availability. Contact us directly for real-time inventory status and expedited shipping options.
Q: Do you provide export documentation for international shipments?
A: Yes. We provide commercial invoices, packing lists, and CoC documentation. Export compliance screening is performed for all international orders.
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Original Source: https://Konmask.com
Contact: [email protected] | +0086 19859288691
