Lam Research 50020R-10 Node Type Power Supply Module | Replacement, Equivalent & Selection Guide
The Lam Research 50020R-10 (P/N: 810-013872-108) is a Node Type Power Supply / Auxiliary module used in Lam Research semiconductor etch and deposition systems. Cross-referenced as 48-8-16 PS/AUX, with additional part numbers 00-88060-004, 281-500463-9, and 208-500463-2. Konmask.com supplies genuine and compatible-grade units with full traceability for fab and OEM maintenance teams.
Technical Specifications
- Manufacturer: Lam Research Corporation
- Primary Part Number: 50020R-10
- Assembly P/N: 810-013872-108
- Reference P/N: 48-8-16 PS/AUX
- Cross-Reference P/N: 00-88060-004 / 281-500463-9 / 208-500463-2
- Module Type: Node Type Power Supply / Auxiliary (PS/AUX)
- Weight: 2.6 kg
- Condition Available: Refurbished / Tested / New (OEM)
- Lead Time: Contact us for current stock status
Compatible Replacement & Equivalent Models
When the 50020R-10 is unavailable or end-of-life, the following units may serve as functional equivalents depending on system configuration. Always verify with your field service engineer before substitution:
- Lam Research 810-013872-108 (same assembly, alternate label)
- Lam Research 00-88060-004 (earlier revision, verify firmware compatibility)
- Lam Research 281-500463-9 / 208-500463-2 (sub-assembly cross-reference)
- Third-party compatible PS/AUX node modules rated for equivalent voltage/current specs
Note: Konmask.com can assist with cross-reference validation. Contact [email protected] with your system model and slot configuration.
Why Choose the Original Model
- OEM Precision: Designed and validated specifically for Lam Research etch/CVD platforms — no firmware or calibration mismatch risk.
- System Stability: Node-type architecture ensures deterministic power delivery to downstream process modules.
- Traceability: Full OEM part number chain (50020R-10 → 810-013872-108) simplifies audit and compliance documentation.
- Reduced Downtime: Drop-in replacement with no re-qualification required when using the same P/N revision.
Typical Applications
- Lam Research Versys, Kiyo, and Flex series etch systems
- Lam Research SPEED and Vector CVD/ALD platforms
- PS/AUX node slot replacements during scheduled PM or unplanned downtime
- Spare parts inventory for semiconductor fab maintenance departments
- OEM refurbishment and system rebuild programs
System Compatibility
This module is designed for integration within Lam Research multi-node control architectures. Compatibility depends on:
- System platform generation (verify chassis backplane revision)
- Firmware version loaded on the host controller
- Slot assignment and node address configuration
- Power rail specifications of the target chassis
Contact Konmask.com with your system serial number and platform model for a compatibility confirmation before ordering.
Selection Guide
Use the table below to identify the correct module for your application:
| Scenario | Recommended Action |
|---|---|
| Direct like-for-like replacement | Order 50020R-10 (same P/N, same revision) |
| 50020R-10 EOL / unavailable | Request cross-reference to 810-013872-108 or 00-88060-004 |
| Budget-sensitive refurb project | Inquire about tested refurbished units with 90-day warranty |
| Urgent fab downtime | Contact us for expedited sourcing — same-day quote available |
| Spare parts stocking program | Request bulk pricing for 3–10 units |
Quality Assurance & Sourcing
- Source: Authorized distributors, OEM surplus, and certified refurbishers
- Testing: Functional power-on test and visual inspection prior to shipment
- Packaging: ESD-safe anti-static packaging with foam cushioning
- Documentation: Certificate of conformance available on request
- Warranty: 90-day replacement warranty on refurbished units; OEM warranty on new stock
How to Order
- Add to cart directly, or contact us for a custom quote.
- Provide your system model, platform, and slot location for compatibility verification.
- Specify required condition: New OEM / Refurbished / Tested.
- Request expedited shipping if fab downtime is critical.
📧 [email protected] | 📞 +0086 19859288691
Replacement & Compatibility FAQ
Q: Is 810-013872-108 the same as 50020R-10?
A: Yes — 810-013872-108 is the full assembly part number; 50020R-10 is the component-level reference. They refer to the same physical module.
Q: Can I use 00-88060-004 as a direct replacement?
A: In most cases yes, but verify the revision level and firmware compatibility with your Lam Research FSE before installation.
Q: Do you offer tested refurbished units?
A: Yes. All refurbished units undergo functional power-on testing and are shipped with an inspection report.
Q: What is the lead time?
A: Stock availability varies. Contact us for a real-time quote — expedited sourcing is available for critical downtime situations.
Q: Can I return the module if it doesn’t fit my system?
A: Yes, within 30 days of receipt, subject to our returns policy. Compatibility verification before purchase is strongly recommended.
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Contact: [email protected] | +0086 19859288691
