LAM RESEARCH 9600PTX 715-330825-007 Chamber Reanodized Kit – 9600PTX Etch System Series
When a plasma etch chamber loses its anodized surface integrity, the consequences cascade fast: particle contamination spikes, etch uniformity degrades, wafer yield drops, and unplanned downtime can cost a fab tens of thousands of dollars per hour. The chamber body is not a commodity — it is the controlled environment where every critical etch process lives or dies. Without a properly reanodized chamber assembly with matched cables and power components, your 9600PTX tool simply cannot hold process specification.
The LAM RESEARCH 9600PTX 715-330825-007 Chamber Reanodized Kit occupies a critical position in the 9600PTX platform’s maintenance lifecycle. The 9600PTX is one of LAM Research’s flagship dielectric etch systems, widely deployed in 200mm and legacy 300mm fabs worldwide. This kit — combining the reanodized chamber body (715-330825-007), cable harness assembly (CABLES 550111), RF match network components (EMGA-60-P-G5-SAS-55), electromechanical module (EMMS-AS-55-M-LS-TM), and power supply board (IC693PWR3215) — represents a complete chamber refurbishment solution trusted by process engineers across Asia, North America, and Europe.
Technical Specifications
- OEM Brand: LAM RESEARCH
- Platform / Series: 9600PTX Etch System
- Primary Part Number: 715-330825-007
- Kit Components: CABLES 550111, EMGA-60-P-G5-SAS-55, EMMS-AS-55-M-LS-TM, IC693PWR3215
- Assembly Type: Chamber Reanodized Kit
- Product Weight: 2,600 g (approx.)
- Condition: Refurbished / Reanodized OEM
- Shipping: Worldwide, ESD-safe packaging
Key Features & Benefits
- OEM-Matched Reanodization: Chamber surfaces restored to original anodize specification, ensuring plasma resistance and particle performance equivalent to new.
- Complete Kit Solution: Eliminates multi-vendor sourcing risk — cables, RF components, electromechanical modules, and power supply are matched and tested together.
- Reduced Downtime: Drop-in replacement designed for the 9600PTX platform; minimizes re-qualification time versus piecemeal sourcing.
- Process Stability: Restored chamber geometry and surface chemistry support tight CD control and etch uniformity across wafer lots.
- Cost-Effective Refurbishment: Reanodized OEM parts deliver new-equivalent performance at a fraction of new-part lead times and cost.
- Traceability: Each kit is documented with part numbers and inspection records for fab audit compliance.
Industry & Equipment Applications
- Semiconductor wafer fabrication (200mm legacy fabs, 300mm retrofit lines)
- Dielectric etch processes (oxide, nitride, low-k materials)
- LAM RESEARCH 9600PTX plasma etch tool maintenance and chamber swap programs
- Fab equipment refurbishment and used tool reconditioning
- Spare parts inventory for high-volume etch module fleets
System Integration & Compatible Parts
This kit is engineered for the LAM RESEARCH 9600PTX platform. Compatible and commonly co-ordered parts include:
- LAM RESEARCH 9600PTX RF Generator assemblies
- 9600PTX ESC (Electrostatic Chuck) assemblies
- 9600PTX gas distribution plate (GDP) and focus ring sets
- 9600PTX match network components and RF cables
- IC693 series GE Fanuc PLC power supply modules (for tool controller integration)
Contact our technical team to verify compatibility with your specific tool configuration and process recipe requirements.
Our Quality Assurance Process
- Incoming Inspection: All parts are inspected against OEM drawings and part number verification upon receipt.
- Functional Testing: Electrical and mechanical sub-assemblies are bench-tested prior to kit assembly.
- ESD & Contamination Control: Handled in controlled environments with ESD-safe packaging and cleanroom-compatible materials.
- Documentation: Full part number traceability and inspection records provided with each shipment.
- Warranty: Backed by Konmask.com’s standard warranty — contact us for terms applicable to your order.
How to Order
- Submit your inquiry via the Contact / Request a Quote button on this page.
- Provide your tool serial number, fab location, and required delivery timeline.
- Our technical team will confirm availability, lead time, and pricing within 1 business day.
- Upon agreement, we issue a proforma invoice and arrange ESD-safe international shipping.
- Tracking and export documentation provided for all international orders.
Why Choose Konmask.com?
- Specialized Inventory: We focus exclusively on industrial automation and semiconductor equipment parts — not a generalist marketplace.
- Technical Expertise: Our team includes engineers with hands-on experience in LAM RESEARCH, AMAT, and other major OEM platforms.
- Global Shipping: Serving fabs and equipment dealers in Asia, Europe, North America, and the Middle East.
- Responsive Support: Dedicated account managers for B2B clients — real people, real answers, fast turnaround.
- Compliance Ready: Export documentation, commercial invoices, and packing lists provided for customs clearance.
Frequently Asked Questions
- Q: Is this a new OEM part or a refurbished assembly?
- A: This is a reanodized OEM refurbished kit. The chamber body has been professionally reanodized to restore surface performance. Sub-components are OEM-sourced and tested.
- Q: What is the lead time for this kit?
- A: Lead time varies by current stock status. Please submit an inquiry and we will confirm availability and estimated ship date within 1 business day.
- Q: Can you provide a certificate of conformance or inspection report?
- A: Yes. Documentation packages including part traceability and inspection records are available upon request for qualified buyers.
- Q: Do you ship internationally?
- A: Yes. We ship worldwide with full export documentation. Contact us for freight options and Incoterms applicable to your destination.
- Q: Is the IC693PWR3215 in this kit a GE Fanuc PLC power supply?
- A: The IC693PWR3215 is included as a matched component in this kit for the 9600PTX tool controller. Please confirm your tool’s controller configuration with our team before ordering.
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