Semiconductor Gas Delivery Solution — LAM RESEARCH 715-031199-001 | TS-4000Z Series
Where This Product Is Used
The LAM RESEARCH 715-031199-001 (alt P/N: 839-031209-001) Valve Weldment Manifold is a precision gas-path assembly deployed in high-volume semiconductor fabs running Lam Research TS-4000Z-16 CVD and ALD process chambers. It serves as the central gas-distribution node that routes, isolates, and sequences precursor and purge gases to the process chamber with leak-tight integrity.
- CVD / ALD Thin-Film Deposition — Controls precursor gas sequencing for dielectric and metal film deposition on 200 mm / 300 mm wafers.
- Etch Gas Panels — Used as an isolation manifold in plasma etch modules requiring ultra-high-purity gas switching.
- Diffusion Furnace Gas Boxes — Integrates into oxidation and annealing gas-delivery stacks where repeatable valve actuation is critical.
- Preventive Maintenance (PM) Replacement — Standard PM BOM item for TS-4000Z-16 chambers; replaced on scheduled intervals to maintain process baseline.
Technical Specifications
| Primary Part Number | 715-031199-001 |
| Alternate / Cross-Reference P/N | 839-031209-001 | M120 | MC-31049 | MC-31151P | 1181-000569-13 |
| Description | Valve Weldment Manifold (ALVE WELDMENT MANIFOLD) |
| OEM Manufacturer | Lam Research Corporation |
| Compatible Platform | TS-4000Z-16 CVD/ALD Process Module |
| Assembly Series | M120 / MC-31049 Gas Delivery Series |
| Weight | 2,600 g (approx.) |
| Construction | Welded stainless-steel manifold body with integrated valve seats |
| Wetted Surfaces | Electropolished 316L SS (typical for Lam gas-path assemblies) |
| Leak Standard | UHP-grade, He leak-tested per Lam internal spec |
| Condition Available | OEM New / Refurbished / Tested Used |
Why Engineers Specify This Model
- OEM-Exact Geometry — Weld-formed manifold body matches original Lam tooling drawings; no field modification required for drop-in replacement.
- Multi-P/N Cross-Reference — Covers six interchangeable part numbers (715-031199-001, 839-031209-001, M120, MC-31049, MC-31151P, 1181-000569-13), simplifying procurement across different fab BOM revisions.
- Process Baseline Protection — Replacing with an OEM-equivalent weldment preserves gas-flow Cv and leak-up rate, protecting wafer yield.
- Reduced Downtime — Ready-to-install assembly eliminates on-site welding or sub-assembly work, cutting chamber-down time.
- Traceability — Each unit ships with inspection records and, where available, original Lam traveler documentation.
Complete System Bill of Materials
This manifold is typically ordered alongside the following TS-4000Z-16 gas-delivery components. Contact Konmask for bundle pricing:
- Pneumatic Valve Actuator Assembly (TS-4000Z series)
- VCR / Swagelok Face-Seal Fittings — 1/4″ and 1/8″ UHP
- Mass Flow Controller (MFC) — compatible Lam-qualified models
- Purge Gas Filter Element — 0.003 µm sintered SS
- Pressure Transducer — 0–100 Torr range, Lam-compatible
- Gas-Box Mounting Bracket Kit — M120 series
Compliance & Industry Standards
- Designed and tested to SEMI S2 environmental, health, and safety guidelines for semiconductor manufacturing equipment.
- Wetted-surface electropolish meets SEMI F20 ultra-high-purity gas system requirements.
- Helium leak-test per SEMI E49 gas-system leak-integrity standard.
- RoHS-compliant materials of construction (where applicable to metallic assemblies).
Quality Assurance & Sourcing
Konmask sources this assembly through verified OEM-authorized channels and qualified secondary-market suppliers with documented fab-pull and refurbishment histories. Every unit undergoes:
- Visual and dimensional inspection against OEM drawings
- Helium mass-spectrometer leak test (≤ 1×10⁻⁹ std cc/s He)
- Functional valve-actuation cycle test (where applicable)
- Nitrogen purge and double-bagged clean-room packaging prior to shipment
How to Source This Part
- Request a Quote — Submit your P/N, required quantity, and condition preference (new / refurbished / used-tested) via [email protected] or the on-site inquiry form.
- Lead Time — In-stock units ship within 1–3 business days; sourced units typically 5–15 business days depending on origin.
- Export Compliance — Buyer is responsible for confirming EAR/ECCN classification and obtaining any required export licenses prior to shipment.
- Payment — T/T wire transfer, PayPal, and major credit cards accepted. Net-30 available for qualified accounts.
Application-Specific FAQ
Q: Is 839-031209-001 a direct replacement for 715-031199-001?
A: Yes. Both part numbers reference the same Valve Weldment Manifold assembly; 839-031209-001 is the revised drawing release. They are dimensionally and functionally interchangeable.
Q: Which Lam Research platforms use this manifold?
A: Primarily the TS-4000Z-16 CVD/ALD module. Cross-reference P/Ns (M120, MC-31049, MC-31151P) may also appear in adjacent Lam gas-box configurations — confirm with your tool’s BOM before ordering.
Q: Can Konmask supply the full gas-delivery sub-assembly?
A: Yes. We can source and kitting the complete gas-box assembly including MFCs, valves, fittings, and filters. Contact us with your full BOM for a consolidated quote.
Q: What is the typical PM interval for this part?
A: Lam-recommended PM intervals vary by process chemistry and chamber utilization. Consult your TS-4000Z-16 PM manual or contact Konmask’s applications team for guidance.
Q: Do you offer warranty on refurbished units?
A: Refurbished units carry a 90-day functional warranty. New OEM units carry the original manufacturer warranty where applicable.
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